• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.21-25
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.22-29
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.26 no.12
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• pp.23-31
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• 2009

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1990-1996
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• 2004

This paper presents a nonlinearly modulated digital actuator (NMDA) for producing nano-precision digital stroke. The NMDA, composed of a digital microactuator and a nonlinear micromechanical modulator, purifies the stroke of the digital actuator in order to generate the high-precision displacement output required for nano-positioning devices. The function and concept of the nonlinear micromechanical modulator are equivalent to those of the nonlinear electrical limiters. The linear and nonlinear modulators, having an identical input and output strokes of 15.2${\mu}{\textrm}{m}$ and 5.4${\mu}{\textrm}{m}$, are designed, fabricated and tested, respectively. The linear and nonlinear modulators are linked to identical digital actuators in order to compare the characteristics of the linearly modulated microactuator (LMDA) and NMDA. In addition, an identical linear modulator is attached to the output ports of LMDA and NMDA. The NMDA shows the repeatability of 12.3$\pm$2.9nm, superior to that of 27.8$\pm$2.9nm achieved by LMDA. When the identical linear modulator is connected to LMDA and NMDA, the final modulated output from NMDA shows the repeatability of 10.3$\pm$7.2nm, superior to that of 15.7$\pm$7.7nm from LMDA. We experimentally verify the displacement purifying capability of the nonlinear mechanical modulator, applicable to nano-precision positioning devices and systems.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.13-17
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• 2002

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.214-218
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• 2002

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.40-46
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• 2005

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.05a
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• pp.627-630
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• 2009

The combination of the marine use various multi sensor surveillance system technology with the development of servo motion control algorithm and gyro sensor in six freedom motion is implemented to analyze the movement response. The stabilization of the motion control is developed and Nano driving Precision Pan-Tilt/Gimbal system is obtained from the security positioning cameras with ultra high speed device is used to carry out the exact behavior of the device. The exact behavior will be used to make a essential equipment. Finally the development of the Nano Driving Multi Sensor, Nano of Surveillance System Driving Precision Pan-Tilt/Gimbal optimal design and production, 3-aix Gyro Sensor based with Servo Motion Control algorithm development, Image trace video software and hardware tracking the development is organized and discuss in details. The development of the equipment and the system integration are fully experimented and verified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.477-480
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• 2005

In this paper, the concept of sustainability was applied to mechanical design and manufacturing of mobile-phone case. A new evaluation method to find products' good and weak point for sustainability was developed. Two mobile phones were evaluated using the evaluation tool. As a result, electro-magnetic (EM) wave was considered as a harmful factor of the products, and improved front panel was made using nano particles that absorb EM waves. The EM shielding tests revealed that silver nano powders absorbed EM while MWCNT had no effect.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.3
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• pp.23-30
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• 2007

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.