Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Behavioral Characteristics of Nano-Stages According to Hinge Structure

힌지 형태에 따른 나노 스테이지의 거동특성

  • 오현성 (부산대학교 정밀기계공학과) ;
  • 이성준 (부산대학교 정밀기계공학과) ;
  • 최수창 (부산대학교 나노융합기술학과) ;
  • 박정우 (부산대학교 나노융합기술학과) ;
  • 이득우 (부산대학교 나노융합기술학과)
  • Published : 2007.06.15
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Abstract

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope(SPM), optical fiber aligners, ultra-precision cutting, measuring systems, and optical systems. It is difficult to find the solutions because the performances and characteristics of nano-scale motion stage are determined by various factors. To understand effects of nano-scale motion stage, three types of hinge structures were designed and manufactured. Each hinge structures were designed following with the results of simulation. And from the result of experiments, hysteresis, displacement, and accuracy were compared with each hinge structures.

Keywords

References

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