Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지

Development of Nano Positioning Stage using PZT Actuator

압전 액츄에이터를 이용한 초정밀 위치제어장치 개발

  • 정상화 (조선대학교 기계공학부) ;
  • 차경래 (조선대학교 대학원 기계공학과)
  • Published : 2002.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

Keywords