• Title/Summary/Keyword: Nano-$TiO_2$

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The Dry Etching of TiN Thin Films Using Inductively Coupled CF4/Ar Plasma

  • Woo, Jong-Chang;Choi, Chang-Auck;Joo, Young-Hee;Kim, Han-Soo;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.2
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    • pp.67-70
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    • 2013
  • In this study, we changed the input parameters (gas mixing ratio, RF power, DC bias voltage, and process pressure), and then monitored the effect on TiN etch rate and selectivity with $SiO_2$. When the RF power, DC-bias voltage, and process pressure were fixed at 700 W, - 150 V, and 15 mTorr, the etch rate of TiN increased with increasing $CF_4$ content from 0 to 20 % in $CF_4$/Ar plasma. The TiN etch rate reached maximum at 20% $CF_4$ addition. As RF power, DC bias voltage, and process pressure increased, all ranges of etch rates for TiN thin films showed increasing trends. The analysis of x-ray photoelectron spectroscopy (XPS) was carried out to investigate the chemical reactions between the surfaces of TiN and etch species. Based on experimental data, ion-assisted chemical etching was proposed as the main etch mechanism for TiN thin films in $CF_4$/Ar plasma.

Preparation and Electrochemical Properties of PANI/TiO2 Composites for Supercapacitor Electrodes (수퍼커패시터 전극을 위한 폴리아닐린/TiO2 복합체의 제조 및 전기화학적 성질)

  • Park, Sukeun;Kim, Kwang Man;Lee, Young-Gi;Jung, Yongju;Kim, Seok
    • Korean Chemical Engineering Research
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    • v.50 no.1
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    • pp.50-54
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    • 2012
  • In this study, PANI and PANI/$TiO_2$ composites were prepared as electrode materials for a supercapacitor application. Cyclic voltammetry (CV) was performed to investigate the supercapacity properties of these electrodes in an electrolyte solution of 6 M KOH. The PANI/$TiO_2$ composites were polymerized by amount of various ratios through a simple in-situ method. The morphological properties of composites were analyzed by SEM and TEM method. The crystallinity of the composite and $TiO_2$ particle size were identified using X-ray diffraction (XRD). In the electrochemical test, The electrode containing 10 wt% $TiO_2$ content against aniline units showed the highest specific capacitance (626 $Fg^{-1}$) and delivered a capacitance of 286 $Fg^{-1}$ reversibly at a 100 $mVs^{-1}$ rate. According to the surface morphology, the increased capacitance was related to the fact that nano-sized $TiO_2$ particles (~6.5 nm) were uniformly connected for easy charge transfer and an enhanced surface area for capacitance reaction of $TiO_2$ itself.

Biocompatibility and Surface Characteristics of PEO-treated Ti-40Ta-xZr Alloys for Dental Implant Materials

  • Yu, Ji-Min;Cho, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.23-23
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    • 2018
  • In this study, new titanium alloys were prepared by adding elements such as tantalum (Ta), zirconium (Zr) and the like to complement the biological, chemical and mechanical properties of titanium alloys. The Ti-40Ta-xZr ternary alloy was formed on the basis of Ti-40Ta alloy with the contents of Zr in the contents of 0, 3, 7 and 15 wt. %. Plasma electrolytic oxidation (PEO), which combines high-voltage sparks and electrochemical oxidation, is a novel method to form ceramic coatings on light metals such as Ti and its alloys. These oxide film produced by the electrochemical surface treatment is a thick and uniform porous form. It is also composed of hydroxyapatite and calcium phosphate-based phases, so it has the characteristics of bone inorganic, non-toxic and very high bioactivity and biocompatibility. Ti-40Ta-xZr alloys were homogenized in an Ar atmosphere at $1050^{\circ}C$ for 1 hour and then quenched in ice water. The electrochemical oxide film was applied by using a power supply of 280 V for 3 minutes in 0.15 M calcium acetate monohydrate ($Ca(CH_3COO)_2{\cdot}H_2O$) and 0.02 M calcium glycerophosphate ($C_3H_7CaO_6P$) electrolyte. A small amount of 0.0075M zinc acetate and magnesium acetate were added to the electrolyte to enhance the bioactivity. The mechanical properties of the coated surface of Ti-40Ta-xZr alloys were evaluated by Vickers hardness, roughness test, and elastic modulus using nano-indentation, and the surface wettability was evaluated by measuring the contact angle of the coated surface. In addition, cell activation and differentiation were examined by cell culture of HEK 293 (Human embryonic kidney 293) cell proliferation. Surface properties of the alloys were analyzed by scanning electron microscopy(FE-SEM), EDS, and X-ray diffraction analysis (XRD).

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Manufacturing of $BaTiO_3$ Nano-powder by Solid Reaction and Its Evaluations (고상 반응법을 이용한 $BaTiO_3$ 나노 분말 제조 및 특성 평가)

  • Son, Yong-Ho;Woo, Duck-Hyun;Yoon, Man-Soon;Ur, Soon-Chul;Ryu, Sung-Lim;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.217-217
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    • 2008
  • $BaTiO_3$는 perovskite 구조를 가지는 대표적인 강유전체 재료로서 MLCC (Multi Layer Ceramic Capacitor), PTC thermistor 등에 널리 사용되어지고 있으며, 그 특성을 향상시키기 위하여 많은 연구가 진행되고 있다. 현제 $BaTiO_3$ 분말 제조의 대표적인 합성법으로는 하소와 분쇄공정이 없는 수열합성법이 대표적이나, 나노 사이즈로 제작시 $BaTiO_3$는 마이크로 크기와 달리 입방정상으로 우세한 상태로 존재한다. 이는 제조과정 중의 hydroxyl defect의 영향과 나노 분말의 표면에너지 증가 때문이라고 보고된다. 따라서 본 연구는 이러한 문제점을 해결하기 위해 일반적인 세라믹 제조 방법인 고상반응법을 이용한 나노 사이즈의 $BaTiO_3$ 제조를 위한 최적의 공정 조건을 확립하기 위하여 본 연구를 진행하였다. 조성은 $BaTiO_3$와 반응온도를 낮추기 위한 anatase의 $TiO_2$를 사용하였고, $BaCO_3/TiO_2$ 의 조성비 (1. 1.01, 1.02, 1.03)를 제어하여 혼합한 후, 24h ball-mill 하여 하소 온도 ($860^{\circ}C{\sim}1000^{\circ}C$) 변화에 따른 입자 사이즈와 입도 분포를 측정하였다. 제조된 $BaTiO_3$분말의 결정 구조 분석을 위하여 XRD (X-ray diffraction) 분석을 수행 하였는데, 분석 결과로부터 제조된 분말들이 정방정 (tetragonal)의 perovskite구조를 갖고 있음을 확인하였다. 또한 분말의 미세구조 확인을 위하여 SEM (scanning electron microscope) 관찰을 수행하였는데, 나노 사이즈의 구형 분말을 얻을 수 있음을 확인할 수 있었다.

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Surface properties and interception behaviors of GO-TiO2 modified PVDF hollow fiber membrane

  • Li, Dongmei;Liang, Jinling;Huang, Mingzhu;Huang, Jun;Feng, Li;Li, Shaoxiu;Zhan, Yongshi
    • Membrane and Water Treatment
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    • v.10 no.2
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    • pp.113-120
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    • 2019
  • To investigate surface properties and interception performances of the new modified PVDF membrane coated with Graphene Oxide (GO) and nano-$TiO_2$ (for short the modified membrane) via the interface polymerization method combined with the pumping suction filtration way, filtration experiments of the modified membrane on Humic Acid (HA) were conducted. Results showed that the contact angle (characterizing the hydrophilicity) of the modified membrane decreased from $80.6{\pm}1.8^{\circ}$ to $38.6{\pm}1.2^{\circ}$. The F element of PVDF membrane surface decreased from 60.91% to 17.79% after covered with GO and $TiO_2$. O/C element mass ratio has a fivefold increase, the percentage of O element on the modified membrane surface increased from 3.83 wt% to 20.87%. The modified membrane surface was packed with hydrophilic polar groups (like -COOH, -OH, C-O, C=O, N-H) and a functional hydrophilic GO-polyamide-$TiO_2$ composite configuration. This configuration provided a rigid network structure for the firm attachment of GO and $TiO_2$ on the surface of the membrane and for a higher flux as well. The total flux attenuation rate of the modified membrane decreased to 35.6% while 51.2% for the original one. The irreversible attenuation rate has dropped 71%. The static interception amount of HA on the modified membrane was $158.6mg/m^2$, a half of that of the original one ($295.0mg/m^2$). The flux recovery rate was increased by 50%. The interception rate of the modified membrane on HA increased by 12% approximately and its filtration cycle was 2-3 times of that of the original membrane.

Effect of Nano Particles on the Hathcing rate of Artemia sp. Cyst Zooplankton (나노입자가 알테미아(Artemia sp.) Cyst 부화율에 미치는 영향)

  • Jeong, Yeon-Kyu;Lee, Byeong-Woo;Park, Chan-Il;Choi, Kwang-Soo;Kim, Mu-Chan
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.12 no.4
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    • pp.302-306
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    • 2009
  • 9 kinds of nanoparticle used for this study was a particle with the size of less than 100 nm of diameter, and Artemia sp. cyst examined what kind of influence to have upon the process hatched out in nauplius. 82% hatched in nauplius at the opposition ward where a nanoparticle wasn't added after 24 time course. AGZ020, Nano silver, P-25, Sb and SnO nanoparticle showed hatching rate of 18%, 20%, 13%, 50% and 0% respectively by the 20mg/L density, and it became clear that a harmful effect is big, but I had a harmful effect compared with the opposition ward by 75%, 60%, 73% and 73% respectively by Ag-$TiO_2$, In, Sn and Zn nanoparticle, but a feeble thing was known relatively compared with AGZ020, Nano silver, P-25, Sb and SnO nanoparticle. The difference has caused this with the ingredient a nanoparticle has. Ag is included 2 % and AGZ020, Nano silver and P-25 nanoparticle are used widely as anti-fungus agent, and the SnO nanoparticle which became combination is a light catalyst pill, and oxygen is used for a Sn particle. This and others, a possibility that use is generalized and flows into aquatic environment in sequence the home electronics, functionality cosmetics, anti-fungus agent and a light catalyst pill at present becomes high for nanoparticles and others. The anxiety which has an influence on the ecology world in the water with this can be generated, so I'd have to study the potential danger a nanoparticle has continuously.

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Effect of Nano Particles on the Hathcing rate of Artemia sp. Cyst (알테미아(Artemia sp.) Cyst 부화율에 미치는 나노입자의 영향)

  • Lee, Byeong-Woo;Cho, Sang-Man;Park, Chan-Il;Jeong, Woo-Gun;Kim, Mu-Chan
    • Proceedings of KOSOMES biannual meeting
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    • 2008.05a
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    • pp.137-141
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    • 2008
  • 9 kinds of nanoparticle used for this study was a particle with the size of less than 100 nm of diameter, and Artemia sp. cyst examined what kind a influence to have upon the process hatched out in nauplius. 82% hatched in nauplius at the opposition ward where a nanoparticle wasn't added after 24 time course. AGZ020, Nano silver, P-25, Sb and SnO nanoparticle showed hatching rate of 18%, 20%, 13%, 50% and 0% respectively by the 20mg/L density, and it became clear that a harmful effect is big, but I had a harmful effect compared with the opposition ward by 75%, 60%, 73% and 73% respectively by Ag-$TiO_2$, In, Sn and Zn nanoparticle, but a feeble thing was known relatively compared with AGZ020, Nano silver, P-25, Sb and SnO nanoparticle. The difference was mused this with the ingredient a nanoparticle has. Ag is included 2% and AGZ020, Nano silver and P-25 nanoparticle are used widely as anti-fungus agent, and the SnO nanoparticle which became combination is a light catalyst pill, and oxygen is used for a Sn particle. This and others, a possibility that use is generalized and flows into aquatic environment in sequence the home electronics, functionality cosmetics, anti-fungus agent and a light catalyst pill at present becomes high for nanoparticles and others. The anxiety which has an influence on the ecology world in the water with this can be generated, so I'd have to study the potential danger a nanoparticle has continuously.

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Effect of MnO2 Addition on Microstructure and Piezoelectric Properties of 0.95(Na0.5K0.5)NbO3-0.05CaTiO3 Piezoelectric Ceramics

  • Kim, Jong-Hyun;Seo, In-Tae;Hur, Joon;Kim, Dae-Hyeon;Nahm, Sahn
    • Journal of the Korean Ceramic Society
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    • v.53 no.2
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    • pp.129-133
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    • 2016
  • $MnO_2$ was added to the $0.95(Na_{0.5}K_{0.5})NbO_3-0.05CaTiO_3$ (NKN-CT) ceramics in order to promote the densification and improve the poling efficiency by increasing the resistance of the specimens. Densification and abnormal grain growth occurred in the $MnO_2$-added NKN-CT ceramics sintered at $1020^{\circ}C$, indicating that $MnO_2$ assisted the liquid-phase sintering of these materials. $Mn^{3+}$ ions were considered to enter the A-site of the matrix, thereby producing the free electrons, which interacted with the holes resulting from the evaporation of alkali ions. This interaction results in an increase in the resistance of the specimens. The increased resistance improved the poling efficiency and, hence, the dielectric and piezoelectric properties of the NKN-CT ceramics. A few of the $Mn^{3+}$ ions that entered the B-site of the NKN-CT matrix led to a slight increase in the mechanical quality factor.

Scale-dependent buckling of embedded thermo-electro-magneto-elastic cylindrical nano-shells with different edge conditions

  • Yifei Gui;Honglei Hu
    • Advances in nano research
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    • v.16 no.6
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    • pp.601-613
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    • 2024
  • A new analytical buckling solution of a thermo-electro-magneto-elastic (TEME) cylindrical nano-shell made of BiTiO3-CoFe2O4 materials is obtained based on Hamiltonian approach. The Winkler and Pasternak elastic foundations as well as thermo-electro-magneto-mechanical loadings are applied, and two different types of edge conditions are taken into the investigation. According to nonlocal strain gradient theory (NSGT) and surface elasticity theory in conjunction with the Kirchhoff-Love theory, governing equations of the nano-shell are acquired, and the buckling bifurcation condition is obtained by adopting the Navier's method. The detailed parameter study is conducted to investigate the effects of axial and circumferential wave numbers, scale parameters, elastic foundations, edge conditions and thermo-electro-magnetic loadings on the buckling behavior of the nano-shell. The proposed model can be applied in design and analysis of TEME nano components with multi-field coupled behavior, multiple edge conditions and scale effect.

Effects of Blasting and Acidic Treatment on the Corrosion Characteristics of Dental Implant Fabricated with Cp-Ti and Ti-6Al-4V Alloy (Cp-Ti와 Ti-6Al-4V 합금으로 제조된 치과용 임플란트의 부식특성에 관한 블라스팅과 산세처리의 영향)

  • Moon, Young-Pil;Choe, Han-Cheol;Park, Su-Jung;Kim, Won-Gi;Ko, Yeong-Mu
    • Journal of Surface Science and Engineering
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    • v.39 no.4
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    • pp.190-197
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    • 2006
  • The effects of blasting and acidic treatment on the corrosion characteristics of dental implant fabricated with Cp-Ti and Ti-6Al-4V alloy have been researched by using electrochemical methods. The fabricated implants were cleaned and sandblasted by $Al_2O_3$ powder and then acidic treatment was carried out in nitric acid solution. The surface morphology were observed using scanning electron microscope. The corrosion behaviors were investigated using potentiosat and EIS in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The potentio-dynamic test in 0.9% NaCl indicated that the corrosion potential of blasting and acidic treated implant was lower than that of non treated implant, but current density was higher than that of non treated implant. From the cyclic potentiodynamic test results of Ti implant, the passivation current density of blasting and acidic treated implant slightly higher than that of non treated implant. From A.C. impedance test results in 0.9% NaCl solution, polarization resistance($R_p$) value of blasting and acidic treated implant was lower than that of non treated implant. In case of blasting and acidic treated implant surface, the pits were observed in valley and crest of implant surface.