• 제목/요약/키워드: Multi-stacked layer

검색결과 64건 처리시간 0.026초

Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA

  • Choi Hyeon Chang;Park Jun Hyub
    • Journal of Mechanical Science and Technology
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    • 제19권5호
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    • pp.1065-1071
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    • 2005
  • In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method (FEM). We evelop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multi­stacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA, mean stresses and stress gradients of single and multi layers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney's equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

Influence of a Stacked-CuPc Layer on the Performance of Organic Light-Emitting Diodes

  • Choe Youngson;Park Si Young;Park Dae Won;Kim Wonho
    • Macromolecular Research
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    • 제14권1호
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    • pp.38-44
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    • 2006
  • Vacuum deposited copper phthalocyanine (CuPc) was placed as a thin interlayer between indium tin oxide (ITO) electrode and a hole transporting layer (HTL) in a multi-layered, organic, light-emitting diode (OLEOs). The well-stacked CuPc layer increased the stability and efficiency of the devices. Thermal annealing after CuPc deposition and magnetic field treatment during CuPc deposition were performed to obtain a stacked-CuPc layer; the former increased the stacking density of the CuPc molecules and the alignment of the CuPc film. Thermal annealing at about 100$^{circ}C$ increased the current flow through the CuPc layer by over 25$\%$. Surface roughness decreased from 4.12 to 3.65 nm and spikes were lowered at the film surface as well. However, magnetic field treatment during deposition was less effective than thermal treatment. Eventually, a higher luminescence at a given voltage was obtained when a thermally-annealed CuPc layer was placed in the present, multi-layered, ITO/CuPc/NPD/Alq3/LiF/AI devices. Thermal annealing at about 100$^{circ}C$ for 3 h produced the most efficient, multi-layered EL devices in the present study.

용액 공정 기반의 다중 적층된 HfO2 박막 상에서의 액정 배향 (Liquid Crystal Alignment on Multi-stacked Layer HfO2 Thin Films Using a Solution-process)

  • 김대현
    • 한국전기전자재료학회논문지
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    • 제26권11호
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    • pp.821-825
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    • 2013
  • Effect of multi-stacked layer (MSL), 0.1 mol (M) and 0.3 mol (M) hafnium oxide ($HfO_2$) alignment layers were fabricated via a solution-process for LCs orientation. The solutions were spin-coated and annealed in a furnace. MSL consists of three sub-layers using 0.1 M solution, mono-layer (ML) is composed of 0.3 M $HfO_2$ solution. Then ion-beam irradiation was treated with 1.8 keV for 2 min. $HfO_2$-based LC cells were investigated through photographs, pre-tilt angle using crystal rotation method, X-ray photoelectron spectroscopy (XPS) measurement, and surface roughness using atomic force microscopy(AFM) for their characteristic research. Good LC orientation characteristics were observed on MSL $HfO_2$ surface. The LC alignment mechanism on MSL $HfO_2$ and ML $HfO_2$ surfaces was attributed to van der Waals (VDW) interaction between the LC molecular and substrate surface.

Analysis of Stacked and Multi-layer Graphene fot the Fabrication of LEDs

  • 김기영;민정홍;장소영;이준엽;박문도;김승환;전성란;송영호;이동선
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.433.1-433.1
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    • 2014
  • The research of graphene, a monolayer of carbon atoms with honeycomb lattice structure, has explosively increased after appeared in 2004. As a result, its high transmittance, mobility, thermal conductivity, and outstanding mechanical and chemical stability have been proved. Especially, many researches were executed about the field of transparent electrode highlighting material of substituting the indium tin oxide (ITO). In addition, qualitative and quantitative improvements have been achieved due to many synthesis methods were discovered. Among them, mostly used method is chemical vapour deposition of graphene grown on copper or nickel. The transmittance, mobility, sheet resistance, and other many properties are completely changed according to these two types of synthesis method of graphene. In this research, considering the difference of characteristics as the synthesis method of graphene, what types of graphene should be used and how to use it were studied. The stacked graphene harvested on copper and multi-layer graphene harvested on nickel were compared and analyzed, as a result, the transmittance of 90% and the sheet resistance of $70{\Omega}{\square}$ was showed even though stacked graphene layers were 4 layers. The reason that could bring these results is lowered sheet resistance due to stacked monolayer graphenes. Moreover, light output power of the three stacked graphene spreading layer shows the highest value, but light-emitting diode with multi-layer graphene died out from 12mA due to also its high sheet resistance. Therefore, we need to clarify about what types of graphene and how to use the graphene in use.

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적층 수에 따른 YBCO 선재의 전송전류 손실 특성 (Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors)

  • 한병욱;임희현;강명훈;임형우;차귀수;이희준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 D
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    • pp.2231-2232
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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적층 수에 따른 YBCO 선재의 전송전류 손실 특성 (Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors)

  • 한병욱;임희현;강명훈;임형우;차귀수;이희준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 B
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    • pp.1265-1266
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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적층 수에 따른 YBCO 선재의 전송전류 손실 특성 (Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors)

  • 한병욱;임희현;강명훈;임형우;차귀수;이희준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1725-1726
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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Si3N4/SnZnO/AZO/Ag/Ti/ITO 다층 박막의 적층 횟수에 따른 광학적 특성 (The Optical Properties of Si3N4/SnZnO/AZO/Ag/Ti/ITO Multi-layer Thin Films with Laminating Times)

  • 이상윤;장건익
    • 한국전기전자재료학회논문지
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    • 제28권1호
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    • pp.7-11
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    • 2015
  • In this study, $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film were prepared on glass substrate by DC/RF magnetron sputtering method. To prevent interfacial reaction between Ag and ITO layer, Ti buffer layer was inserted. Optical properties and sheet resistance were studied depending on laminating times of each multi-layered film especially in visible ray. The simulation program, EMP (essential macleod program), was adopted and compared with experimental data to expect the experimental result. It was found out that the transmittance of the first stacked $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film was more than 90%. However, with increasing stacking times, the optical properties of $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film get worse. Consequently, Ti layer is good for oxidation barrier, but too many uses of this layer may have an adverse effect to optical properties of TCO film.

반도체 Package 공정에서 MCP(Multi-chip Package)의 Layer Sequence 제약을 고려한 스케쥴링 방법론 (Scheduling Methodology for MCP(Multi-chip Package) with Layer Sequence Constraint in Semiconductor Package)

  • 정영현;조강훈;정유인;박상철
    • 한국시뮬레이션학회논문지
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    • 제26권1호
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    • pp.69-75
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    • 2017
  • MCP(Multi-chip Package)는 두 개 이상의 Chip을 적층하여 하나의 패키지로 합친 제품이다. MCP를 만들기 위해서는 두 개 이상의 Chip이 동일한 Substrate에 적층되기 때문에 다수의 조립 공정이 필요하다. Package 공정에서는 Lot들이 동일한 특성을 가지는 Chip으로 구성되고 MCP를 구성하는 Chip의 특성은 Layer sequence에 의해 결정된다. MCP 생산 공정에서 WIP Balance 뿐만 아니라 Throughput을 달성하기 위해서는 Chip의 Layer sequence가 중요하다. 본 논문에서는 Chip들의 Layer sequence의 제약 조건을 고려한 스케쥴링 방법론을 제안한다.

적층 수에 따른 YBCO 선재의 전송전류 손실 특성 (Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors)

  • 한병욱;임희현;강명훈;임형우;차귀수;이희준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 A
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    • pp.599-600
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    • 2006
  • Multi-slacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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