• Title/Summary/Keyword: Multi-stacked layer

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Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA

  • Choi Hyeon Chang;Park Jun Hyub
    • Journal of Mechanical Science and Technology
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    • v.19 no.5
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    • pp.1065-1071
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    • 2005
  • In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method (FEM). We evelop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multi­stacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA, mean stresses and stress gradients of single and multi layers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney's equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

Influence of a Stacked-CuPc Layer on the Performance of Organic Light-Emitting Diodes

  • Choe Youngson;Park Si Young;Park Dae Won;Kim Wonho
    • Macromolecular Research
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    • v.14 no.1
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    • pp.38-44
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    • 2006
  • Vacuum deposited copper phthalocyanine (CuPc) was placed as a thin interlayer between indium tin oxide (ITO) electrode and a hole transporting layer (HTL) in a multi-layered, organic, light-emitting diode (OLEOs). The well-stacked CuPc layer increased the stability and efficiency of the devices. Thermal annealing after CuPc deposition and magnetic field treatment during CuPc deposition were performed to obtain a stacked-CuPc layer; the former increased the stacking density of the CuPc molecules and the alignment of the CuPc film. Thermal annealing at about 100$^{circ}C$ increased the current flow through the CuPc layer by over 25$\%$. Surface roughness decreased from 4.12 to 3.65 nm and spikes were lowered at the film surface as well. However, magnetic field treatment during deposition was less effective than thermal treatment. Eventually, a higher luminescence at a given voltage was obtained when a thermally-annealed CuPc layer was placed in the present, multi-layered, ITO/CuPc/NPD/Alq3/LiF/AI devices. Thermal annealing at about 100$^{circ}C$ for 3 h produced the most efficient, multi-layered EL devices in the present study.

Liquid Crystal Alignment on Multi-stacked Layer HfO2 Thin Films Using a Solution-process (용액 공정 기반의 다중 적층된 HfO2 박막 상에서의 액정 배향)

  • Kim, Dai-Hyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.11
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    • pp.821-825
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    • 2013
  • Effect of multi-stacked layer (MSL), 0.1 mol (M) and 0.3 mol (M) hafnium oxide ($HfO_2$) alignment layers were fabricated via a solution-process for LCs orientation. The solutions were spin-coated and annealed in a furnace. MSL consists of three sub-layers using 0.1 M solution, mono-layer (ML) is composed of 0.3 M $HfO_2$ solution. Then ion-beam irradiation was treated with 1.8 keV for 2 min. $HfO_2$-based LC cells were investigated through photographs, pre-tilt angle using crystal rotation method, X-ray photoelectron spectroscopy (XPS) measurement, and surface roughness using atomic force microscopy(AFM) for their characteristic research. Good LC orientation characteristics were observed on MSL $HfO_2$ surface. The LC alignment mechanism on MSL $HfO_2$ and ML $HfO_2$ surfaces was attributed to van der Waals (VDW) interaction between the LC molecular and substrate surface.

Analysis of Stacked and Multi-layer Graphene fot the Fabrication of LEDs

  • Kim, Gi-Yeong;Min, Jeong-Hong;Jang, So-Yeong;Lee, Jun-Yeop;Park, Mun-Do;Kim, Seung-Hwan;Jeon, Seong-Ran;Song, Yeong-Ho;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.433.1-433.1
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    • 2014
  • The research of graphene, a monolayer of carbon atoms with honeycomb lattice structure, has explosively increased after appeared in 2004. As a result, its high transmittance, mobility, thermal conductivity, and outstanding mechanical and chemical stability have been proved. Especially, many researches were executed about the field of transparent electrode highlighting material of substituting the indium tin oxide (ITO). In addition, qualitative and quantitative improvements have been achieved due to many synthesis methods were discovered. Among them, mostly used method is chemical vapour deposition of graphene grown on copper or nickel. The transmittance, mobility, sheet resistance, and other many properties are completely changed according to these two types of synthesis method of graphene. In this research, considering the difference of characteristics as the synthesis method of graphene, what types of graphene should be used and how to use it were studied. The stacked graphene harvested on copper and multi-layer graphene harvested on nickel were compared and analyzed, as a result, the transmittance of 90% and the sheet resistance of $70{\Omega}{\square}$ was showed even though stacked graphene layers were 4 layers. The reason that could bring these results is lowered sheet resistance due to stacked monolayer graphenes. Moreover, light output power of the three stacked graphene spreading layer shows the highest value, but light-emitting diode with multi-layer graphene died out from 12mA due to also its high sheet resistance. Therefore, we need to clarify about what types of graphene and how to use the graphene in use.

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Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors (적층 수에 따른 YBCO 선재의 전송전류 손실 특성)

  • Han, Byung-Wook;Lim, Hee-Hyun;Kang, Myung-Hun;Lim, Hyoung-Woo;Cha, Guee-Soo;Lee, Hee-Joon
    • Proceedings of the KIEE Conference
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    • 2006.07d
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    • pp.2231-2232
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors (적층 수에 따른 YBCO 선재의 전송전류 손실 특성)

  • Han, Byung-Wook;Lim, Hee-Hyun;Kang, Myung-Hun;Lim, Hyoung-Woo;Cha, Guee-Soo;Lee, Hee-Joon
    • Proceedings of the KIEE Conference
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    • 2006.07b
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    • pp.1265-1266
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors (적층 수에 따른 YBCO 선재의 전송전류 손실 특성)

  • Han, Byung-Wook;Lim, Hee-Hyun;Kang, Myung-Hun;Lim, Hyoung-Woo;Cha, Guee-Woo;Lee, Hee-Joon
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1725-1726
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    • 2006
  • Multi-stacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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The Optical Properties of Si3N4/SnZnO/AZO/Ag/Ti/ITO Multi-layer Thin Films with Laminating Times (Si3N4/SnZnO/AZO/Ag/Ti/ITO 다층 박막의 적층 횟수에 따른 광학적 특성)

  • Lee, Sang-Yun;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.1
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    • pp.7-11
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    • 2015
  • In this study, $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film were prepared on glass substrate by DC/RF magnetron sputtering method. To prevent interfacial reaction between Ag and ITO layer, Ti buffer layer was inserted. Optical properties and sheet resistance were studied depending on laminating times of each multi-layered film especially in visible ray. The simulation program, EMP (essential macleod program), was adopted and compared with experimental data to expect the experimental result. It was found out that the transmittance of the first stacked $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film was more than 90%. However, with increasing stacking times, the optical properties of $Si_3N_4$/SnZnO/AZO/Ag/Ti/ITO multi-layer film get worse. Consequently, Ti layer is good for oxidation barrier, but too many uses of this layer may have an adverse effect to optical properties of TCO film.

Scheduling Methodology for MCP(Multi-chip Package) with Layer Sequence Constraint in Semiconductor Package (반도체 Package 공정에서 MCP(Multi-chip Package)의 Layer Sequence 제약을 고려한 스케쥴링 방법론)

  • Jeong, Young-Hyun;Cho, Kang-Hoon;Choung, You-In;Park, Sang-Chul
    • Journal of the Korea Society for Simulation
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    • v.26 no.1
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    • pp.69-75
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    • 2017
  • An MCP(Multi-chip Package) is a package consisting of several chips. Since several chips are stacked on the same substrate, multiple assembly steps are required to make an MCP. The characteristics of the chips in the MCP are dependent on the layer sequence. In the MCP manufacturing process, it is very essential to carefully consider the layer sequence in scheduling to achieve the intended throughput as well as the WIP balance. In this paper, we propose a scheduling methodology considering the layer sequence constraint.

Characteristic of Transport Current Losses of Multi-Stacked YBCO Coated Conductors (적층 수에 따른 YBCO 선재의 전송전류 손실 특성)

  • Han, Byung-Wook;Lim, Hee-Hyun;Kang, Myung-Hun;Lim, Hyoung-Woo;Cha, Guee-Soo;Lee, Hee-Joon
    • Proceedings of the KIEE Conference
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    • 2006.07a
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    • pp.599-600
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    • 2006
  • Multi-slacked HTS tapes are needed to conduct large current in the power application of superconducting machine. This paper deals with the transport current loss of multi-stacked YBCO coated conductor. YBCO coated conductor that was used in this experiment has two Cu layers above and below of YBCO layer for stabilization. Transport losses of four different stacks, single, 2 stack, 3 stack and 4 stack, were measured. Measured results were compared analytic equation suggested by Norris.

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