• Title/Summary/Keyword: Microwave substrate

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A Study on the Diamond Synthesis by MPECVD using $CO-H_2$ Mixture ($CO-H_2$ 혼합 기체의 MPECVD 에 의한 다이아몬드 합성에 관한 연구)

  • Ku, Ja-Chun;Oh, Jeong-Seob;Hwang, Ki-Woong
    • Proceedings of the KIEE Conference
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    • 1989.07a
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    • pp.390-393
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    • 1989
  • Diamond is synthesized from the gaseous mixture of carbon monoxide and hydrogen by microwave PECVD. $10{\times}10mm^2$ silicon wafers are used as the substrate,and it can be raised more than $900^{\circ}C$ by microwave absorption, radiation by plasma and bombardment of ions. The changes of the morphology and the growth rates of the deposits with the experimental conditions are examined by Scanning Electron Microscopy. The d values of all the deposited films concide with those of powder diffraction data in XRD. In Raman spectra, the peak of the deposit coincides with that of the natural diamond which has a value of 1332.5 $cm^{-1}$, and the broad peak from 1360 $cm^{-1}$to 1600 $cm^{-1}$which represents the amorphous graphite was observed in the higher concentration of carbon monoxide.

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A Trapezoidal Ultra-Wideband Antenna Design (사다리꼴 모양의 UWB 안테나 설계)

  • Lee Jung-Nam;Lee Seong-Hun;Park Jong-Kweon
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.16 no.3 s.94
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    • pp.235-245
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    • 2005
  • In this paper, a novel Ultra-Wideband(UWB) antenna fed by CPW is designed, fabricated, and measured for UWB communications. We have used the Microwave Studio of CST to simulate the proposed antenna. It is designed to work on a substrate TMM4 of thickness 0.762 mm and relative permittivity 4.5. The proposed antenna is satisfied with Ultra-Wideband communication band from 3.1 GHz to 11.5 GHz, for VSWR$\leq$2, and isolated IEEE 802.1la frequency band(5.15 GHz$\~$5.825 GHz) using a rectangular slot. Measured group delay variation is less than 1 ns, thus indicating the proposed antenna a good candidate for UWB applications.

Low Temperature Thermal Oxidation using ECR Oxygen Plasma (ECR 산소 플라즈마를 이용한 저온 열산화)

  • 이정열;강석원;이진우;한철희;김충기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.3
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    • pp.68-77
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    • 1995
  • Characteristics of electron cyclotron resonance (ECR) plasma thermal oxide grown at low-temperature have been investigated. The effects of several process parameters such as substrate temperature, microwave power, gas flow rate, and process pressure on the growth rate of the oxide have been also investigated. It was found that the plasma density, reactive ion species, is strongly related to the growth rate of ECR plasma oxied. It was also found that the plasma density increases with microwave power while it decreases with decreasing O2 flow rate. The oxidation time dependence of the oxide thichness showed parabolic characteristics. Considering ECR plasma thermal oxidation at low-temperature, the linear as well as parabolic rate constants calculated from fitting data by using the Deal-Grove model was very large in comparison with conventional thermal oxidation. The ECR plasma oxide grown on (100) crystalline-Si wafer exhibited good electrical characteristics which are comparable to those of thermal oxide: fixed oxide charge(N$_{ff}$)= 7${\times}10^{10}cm^{-2}$, interface state density(N$_{it}$)=4${\times}10^[10}cm^{-2}eV^{-1}$, and breakdown field > 8MV/cm.

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A Short Wavelength Transmission Line Employing Periodically Arrayed Capacitive Devices on MMIC (MMIC상에서 주기적으로 배치된 용량성 소자를 이용한 단파장 전송선로)

  • Jeong, Jang-Hyeon;Kang, Suk-Youb;Yun, Young
    • Journal of Advanced Marine Engineering and Technology
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    • v.34 no.6
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    • pp.840-845
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    • 2010
  • In this paper, short-wavelength transmission line employing periodically arrayed capacitive devices (PACD) structures were developed for application to a development of miniaturized on-chip passive components on GaAs monolithic microwave integrated circuit (MMIC). The transmission line employing PACD structure showed a wavelength much shorter than conventional microstrip line. Concretely, the wavelength of the transmission line employing PACD structure was 8 % of the conventional microstrip line on GaAs substrate at 5GHz. And It was 38% of the microstrip line employing PPGM at 5GHz. It was recognized that the basic characteristics of the transmission line employing PACD structure were investigated for application to the miniaturized passive on-chip components.

GROWTH OF CARBON NANOTUBES ON GLASS BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (마이크로웨이브 플라즈마 화학기상증착장비를 사용한 유리기판상의 탄소나노튜브의 합성)

  • Lee, Jae-Hyeoung;Choi, Sung-Hun;Choi, Won-Seok;Hong, Byung-You;Kim, Jeong-Tae;Lim, Dong-Gun;Yang, Kea-Joon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.99-100
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    • 2005
  • We have grown carbon nanotubes (CNTs) with a microwave plasma chemical vapor deposition (MPECVD) method, which has been regard as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. We use methane ($CH_4$) and hydrogen ($H_2$) gas for the growth of CNTs. 60 nm thick Ni catalytic layer were deposited on the TiN coated glass substrate by RF magnetron sputtering method. In this work, we report the effects of pressure on the growth of CNTs. We have changed pressure of processing (10 $\sim$ 20 Torr) deposition of CNTs. SEM (Scanning electron microscopy) images show diameter, length and cross section state CNTs.

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Low Temperature Sintering and Microwave Dielectric Properties of Alumina-Silicate/Zinc Borosilicate Glass Composites (Alumina-silicate/zinc borosilicate glass 복합체의 저온 소결 및 유전 특성)

  • Kim, Kwan-Soo;Um, Gyu-Ok;Yoon, Sang-Ok;Kim, Shin;Kim, Yun-Han;Kim, Kyung-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.314-314
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    • 2008
  • The low temperature sintering and the dielectric properties of $Al_2O_3/SiO_2$-zinc borosilicate glass composites were investigated in the view of the application for LTCC. When the sintering was conducted at $900^{\circ}C$ $ZnAl_2O_4$ and $ZnB_2O_4$ compounds formed at the $Al_2O_3$-rich and the $SiO_2$-rich compositions, respectively. The reaction between ZBS glass and $Al_2O_3/SiO_2$ caused the formation of these compounds. The $Al_2O_3/SiO_2$ ratio affected the dielectric properties. The excellent dielectric properties, i.e., Q$\times$f value= 40,000 GHz and ${\varepsilon}_r$=4.5, were obtained in the $Al_2O_3/SiO_2$-ZBS glass system and fabricated the LTCC substrate materials.

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Design of compact antenna for dual-band (이중대역 소형 안테나 설계)

  • Bayarmaa, Bayarmaa;Kim, Bit-Na;Kwon, Jin-Young;Oh, Guang-Jin;Kim, Kab-Ki
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.10a
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    • pp.76-78
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    • 2011
  • In this paper, 0.8 GHz and 1.8 GHz dual-band antenna was designed for global system for mobile communications (GSM) and the Long Term Evolution (LTE) The proposed antenna was made using CST Microwave Studio 2009. My script antenna's substrate is Taconic TLY-5 and dielectric constant is 2,2 and has 1.0mm thickness with a compact design of the proposed antenna, Thus it shows that this proposed antenna can be used in Wireless Communication System.

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Dielectric and Structural properties of highly oriented $PST/LaNiO_3$ Thin Films for Microwave application (초고주파 응용을 위한 (100) 방향으로 성장된 PST / $LaNiO_3$박막의 구조적, 유전적 특성)

  • Eom, Joon-Chul;Lee, Sung-Gap;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.648-651
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    • 2004
  • Pb0.5Sr0.5TiO3(PST) thin films were deposited on the LaNiO3 (LNO(100))/Si and Pt/Ti/SiO2/Si substrates by the alkoxide-based sol-gel method. Structural and dielectric properties of PST thin films for the tunable microwave device applications were investigated. The PST films, which were directly grown on the Pt/Ti/SiO2/Si substrates showed the random orientation. For the LNO/Si substrates, the PST thin films exhibited highly (100) orientation. Compared with randomly oriented films, the highly (100)-oriented PST thin films showed better dielectric constant, tunability, and figure of merit (FOM). The dielectric constant, tunability, and FOM of the highly (100)-oriented PST thin film increased with increasing annealing temperature due to the decrease in lattice distortion. The differences in dielectric properties may be attributed to the change in the film stress and the in-plane oriented Polar axis depending on the substrate was used. The dielectric constants, dielectric loss and tunability of the PST thin films deposited on the LNO/Si substrates measured at 1 MHz were 483, 0.002, and 60.1%, respectively.

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Micro/Millimeter-Wave Dielectric Indialite/Cordierite Glass-Ceramics Applied as LTCC and Direct Casting Substrates: Current Status and Prospects

  • Ohsato, Hitoshi;Varghese, Jobin;Vahera, Timo;Kim, Jeong Seog;Sebastian, Mailadil T.;Jantunen, Heli;Iwata, Makoto
    • Journal of the Korean Ceramic Society
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    • v.56 no.6
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    • pp.526-533
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    • 2019
  • Indialite/cordierite glass-ceramics demonstrate excellent microwave dielectric properties such as a low dielectric constant of 4.7 and an extremely high quality factor Qf of more than 200 × 103 GHz when crystallized at 1300℃/20 h, which are essential criteria for application to 5G/6G mobile communication systems. The glass-ceramics applied to dielectric resonators, low-temperature co-fired ceramic (LTCC) substrates, and direct casting glass substrates are reviewed in this paper. The glass-ceramics are fabricated by the crystallization of glass with cordierite composition melted at 1550℃. The dielectric resonators are composed of crystallized glass pellets made from glass rods cast in a graphite mold. The LTCC substrates are made from indialite glass-ceramic powder crystallized at a low temperature of 1000℃/1 h, and the direct casting glass-ceramic substrates are composed of crystallized glass plates cast on a graphite plate. All these materials exhibit excellent microwave dielectric properties.

Characteristics of Lipoxygenase in Black Rice (진도산 흑미의 lipoxygenase의 특성)

  • 이유석;송선주;이종욱
    • Food Science and Preservation
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    • v.6 no.2
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    • pp.216-220
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    • 1999
  • Lipoxygenase(LOX) activity of black rice(Chindo) was measured by spectrophotometric method at In m. Studies at different pH levels revealed that the optimal activity was exhibited at pH 7.0 with 24.97 unit/mg. Enzyme activity was tested at different concentration of the substrate. The apparent Vmax and Km values were determined from the Lineweaver-Burk plot to be 53.85 unit/mg and 0.21 mM. Enzyme activity due to storage temperature (-40, 4 and 25$^{\circ}C$) and period were decreased at all storage temperature. LOX activity of black rice was significantly decreased during the microwave heating.

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