• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Bulletin of the Korean Chemical Society
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• v.26 no.1
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• pp.47-50
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• 2005

Solvatochromic fluorescence behavior of 8-aminoquinoline based benzothiazole derivative in varying solvent systems has been investigated. Benzothiazole appended 8-aminoquinoline 3 showed distinctive fluorescence color changes depending upon the solvent polarities and the fluorescence color changes occurred over relatively wide span in visible region from 486 nm to 598 nm which can be detected with naked eye. Compound 3 also exhibited significant spectral shifts in ${\lambda}_{em}$ as a function of water composition in binary aqueous solvent systems. The changes are due to the specific interaction of 3 by hydrogen bonding with water as well as general solvent effect. The observed solvatochromic fluorescence characteristics of 3 could be used as a new probe for the micro-environmental polarity changes as well as a sensitive sensor for the determination of water composition in binary aqueous solutions.

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.301-306
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• 2007

AlN thin film for SAW filter application was deposited on (100) silicon wafers by reactive magnetron sputtering method. The structural characteristics were dependent on the deposition conditions such as sputtering pressure, RF power, substrate temperature, and nitrogen partial pressure. Scanning Electron Microscope (SEM), X-ray Diffraction (XRD), Electron Probe MicroAnalyzer (EPMA) and Atomic Force Microscope (AFM) have been used to find out structural properties and preferred orientation of AlN thin films. Insertion loss of SAW devices was 28.51 dB and out of band rejection was about 24 dB.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.6
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• pp.630-635
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• 2014

This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.11
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• pp.943-950
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• 2008

A novel nondestructive testing (NDT) system, which is able to detect a crack with high speed and high spatial resolution, is urgently required for inspecting small cracks on express train wheels. This paper proposes a high speed scan type magnetic camera, which uses the multiple amplifying circuits and the crack indicating pulse output system. The linearly integrated Hall sensors are arrayed in parallel, and the Hall voltages from each sensor in the scanning direction are obtained and amplified. High-speed NDT can be achieved by using the exclusive analog-digital converter and micro-processor because the ${\partial}\;V_H/\;{\partial}$ x value, which provides the most important crack information, can be obtained by buffering and calculating. The effectiveness of the novel method was verified by examine using cracks on the wheel specimen model.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.1059-1066
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• 2003

A power generation system are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agrees with the theoretical predictions. The system is shown to produce 2.53㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.12 s.105
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• pp.1355-1360
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• 2005

Periodic structures can be applied as a MEMS(micro-electro-mechanical system) sensor or actuator due to low energy loss and wideband frequency response. The dynamic behavior of a mistuned periodic structure Is dramatically changed from that of a perfectly tuned periodic structure. The effects of mistuning, coupling stiffness, and driving point on the forced vibration responses of a simple periodic structure ate investigate4 through numerical simulations. On the basis of that, one can design effective and reliable MEMS components using periodic structures.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.370-374
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• 2002

Many compound semiconductors which have high carrier mobility and small band gap have attentive in application of various practical a field. Especially, InSb served for Hall device and magnetic resistor such as magnetic sensor because InSb thin film has high mobility. Many studies on InSb thin film deposistion because In and Sb has been very different feature of vapor pressure ($10^{-4}$ times) When In and Sb deposited. In this paper studied it In and Sb deposited simultaneously using by method of co-sputtering deposotion. This process, get to effects of manufacture process simplification. After that this paper observed micro structure and electronic behavior of InSb thin film using by co-sputtering and we study properties of magneto-resistance by annealing.