• Interaction and multiscale mechanics
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• 제3권3호
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• pp.257-266
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• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• 센서학회지
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• 제15권1호
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• pp.13-19
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• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

• Composites Research
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• 제24권6호
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• pp.12-17
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• 2011

자체-센서와 미세 작동기 응용을 위한 CNT와 ITO로 코팅된 나노복합재료의 계면접착 내구성과 전기적 특성을 평가하였다. 나노복합재료의 접착 및 계면 내구성은 반복하중 피로시험에 따른 전기저항도를 측정하여 평가하였다. CNT와 ITO의 고유 전기적 특성으로 인하여 CNT가 코팅된 PVDF 나노복합재료는 ITO가 코팅된 경우보다 다소 낮은 전기저항도를 나타내었으나, 모두 양호한 자체-감지능을 보여주었다. CNT/PVDF와 ITO/PVDF 나노복합재료 모두 계면 내구성은 양호함을 확인하였다. 정적 접촉각 시험을 통해 CNT와 ITO 그리고 PVDF간의 표면에너지, 접착일, 그리고 퍼짐계수를 평가하여 계면 내구성과 의 상호 관련성을 확인하였다. 수용액에서 CNT와 ITO로 코팅된 PVDF 시편의 최적의 작동성은 주파수와 전압을 달리하여 레이져 변위센서를 사용한 연신율 변화로 측정하였다. 작동된 두 나노복합재료들의 연신율은 주파수가 증가함에 따라 감소하며, 반면에 전압의 증가에 따라 상승하였다. 각 나노복합재료의 나노구조 및 고유의 전기적 특성으로 인하여, CNT/PVDF가 ITO/PVDF 보다 자체-감지 및 작동기로서 더 적합하다는 것을 알 수 있었다.

• 센서학회지
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• 제24권6호
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• 한국정밀공학회지
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• 제19권3호
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• pp.7-12
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• 2002

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.113-113
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on $AlN(0.1{\mu}m)/3C-SiC(1.0{\mu}m)$ suspended membranes by surface micro- machining technology. The 3C-SiC and AlN thin films which have wide energy bandgap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3C-SiC RTD (resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR (thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 $ppm/^{\circ}C$ within a temperature range from $25^{\circ}C$ to $50^{\circ}C$ and -1040 $ppm/^{\circ}C$ at $500^{\circ}C$. The micro heater generates the heat about $500^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.197-201
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• 2002

This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

• 센서학회지
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• 제14권4호
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2008년도 정보통신설비 학술대회
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• pp.559-562
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• 2008

In this paper we propose a lock-in detection method for portable sensor systems and demonstrate with the portable detection module that has high sensitivity and robustness against the noise. The simple portable sensor module is manufactured using MCU(Micro Contorl Unit), OPAMP, MOSFET and a pair of infrared sensor. Manufactured sensor module is testified in the noisy environment caused by an external light and an white noise source. Without any type of band pass filters, we recover a signal of 33 $mV_{p-p}$ in 80 $mV_{p-p}$ white noise and get the DR(Dynamic Reserve) of 14 dB.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1433-1438
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• 2007

Characteristics of a phase change type micro actuator have been studied. The micro actuator has been designed for a micro-pump in an active direct methanol fuel cell(DMFC), consisting of an actuating chamber, a membrane, an electric heater, and a sensor of resistance temperature detector (RTD). In the present study, researches have been focused on the response of the actuator to control algorithm of the heater. The experiments demonstrated that the displacement of the membrane increase with temperature variation which is a function of applied voltage, duty ratio, and operating frequency of heating. The results also showed that operation of the actuator with high voltage at small duty of heating is more efficient than the same power consumption of heating with low voltage at large duty.