Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.05a
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- Pages.197-201
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- 2002
The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trench Structures
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Chung, Gwiy-Sang
(School of Information System Engineering, Dongseo University) ;
- Hong, Seok-Woo (Samsung Advanced Institute of Technology)
- Published : 2002.05.11
Abstract
This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10