• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.32-37
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• 2002

High speed machining is one of most effective technologies to improve productivity. It can give great advantage for manufacture of die and Moulds. However, when the high speed machining of materials, especially in machining of micro groove, a severely thermal demage was generated on workpiece and tool. Generally, the cutting fluid is used to improve penetration, lubrication, and cooling effect. In order to rise the performance of lubrication, it contains extreme pressure agents (Cl, S, P). But the environment of work room go bad by those additive Therefore, the compressed chilly air with Oil mist system was developed to replace the conventional cutting fluid system. This paper carried out the tests to evaluate the machinability by the cutting environment in high speed micro groove machining of NAK80 (HRC40). Compressed chilly air with oil mist was ejected on the contact area between cutting edge and workpiece. The effectiveness of this developed compressed chilly air with oil mist system was evaluated in terms of tool life. The results showed that the tool life of carbide tool coated TiAIN with compressed chilly air mist cooling was much longer than with dry and flood coolant when cutting the material.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.87-90
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• 2005

An experimental investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics using a commercial tuning fork. Application of acetone and ethanol with a volume of $1 {\mu}l$ on the tine of a vibrating tuning fork cause immediate response in its amplitude and frequency. It has shown that the tuning fork has ability to recognize a chemical agent with high sensitivity.

• 한국정밀공학회지
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• 제24권3호
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• pp.108-116
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• 2007

To overcome many defects such as the high product cost, large energy consumption, and big space capacity in conventional mechanical machining, the miniaturization of machine tool and micro factory systems has been envisioned recently. The object of this paper is to research the effect of dynamic characteristic parameters in bolted-joint beams, which is widely applied to the joining of mechanical structures in order to identify structural system characteristics and to predict dynamic behavior according to scale-down from macro to micro system as the development of micro/meso-scale machine tool and micro factories. Modal parameters such as the natural frequency, damping ratio, and mode shape from modal testing and dynamic characteristics from finite element analysis are extracted with all 12 test beam models by materials, by size, and by joining condition, and then the results obtained by both methods are compared.

• 한국분말재료학회지
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• 제20권5호
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• 대한기계학회논문집A
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• 제31권12호
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• pp.1173-1179
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• 한국기계가공학회지
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• 제8권3호
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• pp.1-6
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• 2009

This paper presents a geometrical error compensation of tool alignment for sharp edge bite on B axis controlled machine. In precision micro patterning, bite alignment is crucial parameter for machined surface. To decrease bite alignment error, plus tilted bite from B axis center is touched to reference work piece(pin gauge) and checked the deviation from original position. Same process is repeated for maximum touch deviation value. From this touched position value, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct sharp edge bite alignment.

• 한국정밀공학회지
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• 제31권3호
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• pp.189-197
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• 2014

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1997년도 추계학술대회 논문집
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• pp.207-212
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• 1997

The purpose of this study is the development of CAM system which can cut and measure any shape by machining center and coordinate measuring machine. The overall goal of the CAM system is to achieve the CNC machining, from digitizing through to final cutting. The hardware of the system comprises PC and machining center, CMM. There are three steps in the CNC machining, (1) workpiece measuring on the CMM, (2) geometric modeling by the CAD system, (3) NC commands generation by the tool path compensated for tool nose radius. It is developed a software package, with which can conduct a micro CAM system in the PC without economical burden.

• Design & Manufacturing
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• 제2권1호
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• pp.27-31
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• 2008

The object of this study is a manufacture of buff die using CAM systems. Systems are consist of AutoCAD, CAM software and CNC milling machine. CAM software is purpose of G-code generation for CNC programming. Then CAM software and CNC milling machine are connect to RS-232-C cable for networking.