Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

Sharp Edge Tool Alignment for Micro Pattern Machining

마이크로 패터닝 가공을 위한 공구 정렬에 관한 연구

  • 박순섭 (한국생산기술연구원 호남권기술지원본부) ;
  • 원종호 (충남대학교 기계.기계설계.메카트로닉스공학과)
  • Received : 2009.04.01
  • Accepted : 2009.08.31
  • Published : 2009.09.30
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents a geometrical error compensation of tool alignment for sharp edge bite on B axis controlled machine. In precision micro patterning, bite alignment is crucial parameter for machined surface. To decrease bite alignment error, plus tilted bite from B axis center is touched to reference work piece(pin gauge) and checked the deviation from original position. Same process is repeated for maximum touch deviation value. From this touched position value, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct sharp edge bite alignment.

Keywords

References

  1. R. Barry Johnsona and Michael Mandinab, "Aspheric glass lens modeling and machining", Proceedings of SPIE Vol. 5874, 2005.
  2. Suzuki, N., et al., Ultraprecision Micromachining of Hardened Steel by Applying Ultrasonic Elliptical Vibration Cutting, Proc. of the International Symposium on MHS, pp. 221-226, 2003.
  3. Soon-Sub Park, Ki-Young Lee, Hyung-Mo Kim, Jong-Ho Won, "Tool Alignment in B Axis Controlled Ultra-Precision Machine", KSPE Vol. 24, No.10, pp.25-30, 2007.
  4. Yan, J., Syoji, K., Tamaki, J., Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon, Wear, 255: pp. 1380-1387, 2003. https://doi.org/10.1016/S0043-1648(03)00076-0
  5. Thomas G. Bifano and Steven C. Fawcett, "Ductile -regime grinding. A new technology for machining brittle materials", Precision Engineering, Vol. 13, Issue 4, pp. 256-262, 1991. https://doi.org/10.1016/0141-6359(91)90003-2
  6. Moriwaki, T. and Okuda, K., "Machinability of Copper in Ultra-Precision Micro Diamond Cutting," Ann. CIRP, Vol 38, pp. 115-118, 1989. https://doi.org/10.1016/S0007-8506(07)62664-X
  7. E. Brinksmeirer and O, Riemer, "Tools and Setting for Improved Surface Finish in Diamond Turning." proc. of Int. Precision Engineering, pp125-133, 1993