• Transactions on Electrical and Electronic Materials
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• v.1 no.1
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• pp.40-44
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• 2000

Metal-ferroelectric-insulator-semoiconductor field effect transistor (MFISFETs) were fabricated using CMOS processes. The Pt/SBT/NO combined layers were etched for forming a conformal gate by using Ti/Cr metal masks and a two step etching method, By the method, we were able to fabricate a small-sized gate with the dimension of $16/4{\mu}textrm{m}$ in the width/length of gate. It has been chosen the non-self aligned source and drain implantation process, We have deposited inter-layer dielectrics(ILD) by low pressure chemical vapor deposition(LPCVD) at $380^{circ}C$ after etching the gate structure and the threshold voltage of p-channel MFISFETs were about 1.0 and -2.1V, respectively. It was also observed that the current difference between the $I_{ON}$(on current) and $I_{OFF}$(off current) that is very important in sensing margin, is more that 100 times in $I_{D}-V_{G}$ hysteresis curve.

• Journal of Electrochemical Science and Technology
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• v.8 no.3
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• pp.215-221
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• 2017

The electroless plating process largely consists of substrate cleaning, seed formation (activator formation), and electroless plating. The most widely used activator in the seed formation step is Pd, and Sn ions are used to facilitate the formation of this Pd seed layer. This is problematic because the Sn ions interfere with the reduction of Cu ions during electroless plating; thus, the Sn ions must be removed by a hydrochloric acid cleaning process. This method is also expensive due to the use of Pd. In this study, Cu electroless plating was performed by forming a seed layer using a silver nanosol instead of Pd and Sn. The effects of the Ag nanosol concentration in the pretreatment solution and the pretreatment time on the thickness and surface morphology of the Cu layer were investigated. The degrees of adhesion to the substrate were similar for the electroless-plated Cu layers formed by conventional Pd activation and those formed by the Ag nanosol.

• Journal of computational fluids engineering
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• v.11 no.4 s.35
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• pp.75-80
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• 2006

Navier-Stokes simulation of the flow in a micro viscous pump is carried out. The micro viscous pump consists of a rotating circular rotor placed in a two dimensional channel. All simulation is carried out by using a finite volume approach, at the Reynolds number of 0.5, to study the performance of the micro viscous pump. Length of channel of the pump is varied to simulate the effects of the pumping load. Numerical solutions show that the net flow of the pump is realized by two counter rotating vortices formed on both sides of the rotor. The volume flow rate of the pump is decreased as length of the channel is increased, while the static pressure difference across the rotor is increased. The static pressure difference across the rotor is observed to be inversely proportional to the volume flow rate as inertia effects are negligibly small. The efficiency of the pump is found to reach a maximum when two counter rotating vortices on both sides of the rotor becomes to merge forming an outer enveloping vortex.

• Korea-Australia Rheology Journal
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• v.19 no.3
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• pp.171-176
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• 2007

LCD-BLU (Liquid Crystal Display-Back Light Unit) of medium size is usually manufactured by forming numerous dots with $50{\sim}300\;{\mu}m$ in diameter by etching process and V-grove shape with $50\;{\mu}m$ in height by mechanical cutting process. However, the surface of the etched dots is very rough due to the characteristics of the etching process and V-cutting needs rather high cost. Instead of existing optical pattern made by etching and mechanical cutting, 3-dimensional continuous micro-lens of $200\;{\mu}m$ in diameter was applied in the present study. The continuous micro-lens pattern fabricated by modified LIGA with thermal reflow process was tested to this new optical design of LGP. The manufacturing process using LIGA-reflow is made up of three stages as follows: (i) the stage of lithography, (ii) the stage of thermal reflow process and (iii) the stage of electroplating. The continuous micro-lens patterned LGP was fabricated with injection molding and its test results showed the possibility of commercial use in the future.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.91-99
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• 2007

Fractures of galvannealed coating layer during actual press forming in automotive applications were observed by scanning electron microscopy in order to understand fracture mechanism. Fracture behaviors of galvannealed coating layer in extra deep drawing quality steels and high strength steels have been studied by performing the tests describing the representative plastic deformation in sheet metal forming such as uni-axial tensile test, compression test, bi-axial test and plane strain test. Growth and direction of cracks were deeply related to the plastic deformation modes and history. The material properties of galvannealed coating layer were investigated by nano-indentation test equipped with Berkovich diamond indentor for the specimens. Hardness and elastic modulus of the coating layer were higher than bared steels and that was the reason for crack of coating layer. Flat friction test and drawbead friction test were performed to observe the effect of the surface morphology on the frictional characteristics. The micro-plasto hydrodynamic lubrication were appeared and played an important role in reducing the coefficient of friction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.165-169
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• 2007

In this study, the factors that have strong relationship with size effects on forging simulation are investigated and then a dimensionless concept is implemented into the forging simulator. The approach is applied to simulating a micro former forging process of which sequence involves a piercing process to make a hole of 0.7mm diameter of the product whose maximum diameter is 3mm. The simulated results are discussed to reveal the size effect in forging simulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.397-400
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• 2004

The direct extrusion with porthole die can produce condenser tube which has the competitive power in costs and qualities compared with the existing conform extrusion. In general, porthole die extrusion has a great advantage in the forming that produces the hollow sections difficult to produce by conventional extrusion with a mandrel on the stem. Especially, condenser tube manufactured by porthole die belongs to sophisticated part and demands tighter dimension tolerance and higher surface finish than any other part. In order to confirm the general of porthole die extrusion, we perform the 3D FE analysis of hot porthole extrusion in non-steady state by using DEFORM 3D and investigate a pattern of elastic deformation for porthole die through the stress analysis using ANSYS 5.5 during extrusion process.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.448-452
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• 2005

Punching/blanking/shearing is among the oldest and most frequently used sheet metal forming process. We have developed the shear device for burrless cutting using the micro wire. Since the burr minimization and fine shear plane, this paper is a study on the effect of the shear angle and clearance of the cutter-cutter. And, we confirm the tendency of the shear plane. It is impossible to completely remove the burr in the shearing process. In order to minimize the burr size and fine shear plane, we have accomplished the various experiment conditions such as the shear angle and clearance. Despite the quality of shear plane is not good enough yet, it is possible to make the burr minimization and fine shear plane by the optimization of process parameters.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.2
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• pp.186-190
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• 2004

By this time, a mold with nano size pattern was produced using a fabrication of X-ray lithography method and in a m icro size's case it was produced using fabrication of Deep UV lithography. In this paper, we produced mold with 400 $\mu{m}$depth pattern using a new technology of SLS(Selective Laser Sintering) Rapid Prototyping method. In addition to enhance strength and thermal stability, we produced Ni structure with a thickness of 300 $\mu{m}$ on a surface of mold using electro forming method.