• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.167-172
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• 2003

The machining method by using end-milling tool has been applying in machining structures of various shapes because of the availability. Recently, all kinds of industries based on the parts of micro shape are developing, and the demands of mechanical micro machining technology are Increasing suddenly to produce these parts. According to such changes, the technology of the micro end-milling machining is applying as one of the most important machining means. This research is to aim at developing machining technology for various micro structures using micro end-mill. This paper introduces micro mechanical machining system with ultra precision, and demonstrates methods manufacturing all sorts of parts and moldings for industry and examples of applicable machining by using micro end-milling tool of micro sizes from hundreds to tens in diameter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.1039-1042
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• 2000

This research will deal with Innovative manufacturing technology for milli-structure manufacturing technology which is located betweon the traditional manufacturing technology for macro-sized structure and the recently emerging manufacturing technology for micro-scaled structure such as MEMS. There are four fields in this research, which are micro-sheet metal forming technology, micro-bulk forming technology micro-molding technology and micro die making technology. As a project for new-technology in next generation, this research will be carried out through three terms and each term and be composed of three years.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2263-2265
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• 2000

본 연구에서는 광 픽업의 소형, 경량 제작을 위해 MEMS 기술을 이용하여 planar micro optics 방법으로 광 픽업을 구성하는 micro lens, actuator, beamsplitter 등을 설계, 제작하고 집적화한 픽업헤드를 구성하여 그 특성을 분석하였다. 특성분석 결과 disk에 focusing 되는 beam의 형상은 circle type의 비교적 양호한 결과를 얻을 수 있었고 beam spot size는 약 22$\mu m$로 실제 system에서 요구되는 0.9$\mu m$이내의 beam spot size에 비해 약 25배 가량 큰 beam spot size를 얻을 수 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.239-244
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• 2002

In this study, we developed the manufacturing technology of micro-hole and micro-shaft for micro punching system using micro electrical discharge machining and micro electro chemical machining. Micro punching dies of tungsten carbide with $55\;{\mu}m\;and\;110\;{\mu}m$ diameter and $250\;{\mu}m$ depth were made by micro electrical discharge machining. The form accuracy and surface roughness of die hole were pretty good and it was shown that the punched hole quality was fine. WC micro-shaft with $30\;{\mu}m$ diameter was made by the multistep micro electro chemical machining. The developed technologies can be effectively used in precision manufacturing of micro punching die and mass production of micro-shaft.

• Design & Manufacturing
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• 제13권1호
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• pp.5-12
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• 2019

In this paper, we studied the micro tool deflection, micro cutting with low temperature, and deformation of micro ribs caused by cutting forces. First, we performed an integrated machining error compensation method based on captured images of tool deflection shapes in micro cutting process. In micro cutting process, micro tool deflection generates very serious problems in contrast to macro tool deflection. To get the real images of micro tool deflection, it is possible to estimate tool deflection in cutting conditions modeled and to compensate for machining errors using an iterative algorithm correcting tool path. Second, in macro cutting fields, the cryogenic cutting process has been applied to cut the refractory metal but, the serious problem may be generated in micro cutting fields by the cryogenic environment. However, if the proper low temperature is applied to micro cutting area, the cooling effect of cutting heat is expected. Such effect can make the reduction of tool wear and burr formation. For verifying this passibility, the micro cutting experiment at low temperature was performed and SEM images were analyzed. Third, the micro pattern was deformed by the cutting forces and the shape error occurred in the sidewall multi-step cutting process were minimized. As the results, the relationship between the cutting conditions and the deformation of micro-structure during micro cutting process was investigated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1061-1064
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• 1997

Micro injection molding technology is very important fiw mass product of micro structures or micro parts. And, it is so difficult that the molding technology of micro pole or thin wall(barrier rib) structures with high aspect ratio. In this stud). \vc intend to research on the basic technology of micro wall structure part:< with high aspect ratio by the inject~on moldins method. The mold for esperimenrs with micro multi-square structures was made by L, I(;A process. One square polc's size is 157 157pm. height 50011111. And the distance of each poles is 5011n1. 7'hus. molding products will be for~nctl like as the net structure with thin wall of about 50pn thickness.(aspect ratio 10) Ihrough the e~lxriment. \be obtained the prociuctr of micro multi-square slructure with bout 37.000 cell per a piece. 'Ihe micro injection molding process technolog for thin wall by multi-square structure mold was analy~cd.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• 기술혁신학회지
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• 제6권4호
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• pp.429-446
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• 2003

The status of microfactory or microfactory-related research in some advanced countries are investigated. Under the financial support of government, Japan has accomplished the Microfactory Project, the United States has pursued the Micro/Meso mMf project, and European countries have been studying micro assembly systems. In Korea, several universities and some large manufacturers have participated in the development of micro-components or micrcrdevices based on MEMS technology since the late 1990's. Microfactory is a process which achieves an integrated micro-manufacturing system in a production system, which is followed by the steps of micro-technology of machine parts based on micro-system technology. In addition, this process is a new concept of manufacturing system that renovates the existing manufacturing system It is sure that the research of micro- manufacturing technology must lead to nano-technology in the near future, with intensive financial supports of government for this technology.

• 인포메이션 디스플레이
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• 제19권6호
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• pp.41-51
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• 2018

차세대 디스플레이로 부상하고 있는 Micro LED는 현재까지 여러 기술적인 문제로 상용화가 어려운 상황이다. 특히 Micro 단위로 작은 LED를 디스플레이 기판으로 옮기는 전사(Transfer) 기술이 상용화를 가지고 올 수 있는 핵심 기술이며, 중요한 변수다. 전사기술의 핵심은 LED를 원하는 위치에 빠르고 정확하게 이동시키는 것에 있다. 따라서 Micro LED에서 가장 핵심 과제인 전사 기술에 대해 고민할 필요가 있으며, 전사 기술 중 하나인 Elastomer Stamp를 이용한 전사 기술에 대해서 분석해보고 정리해보았다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.452-457
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• 2003

As a fundamental study on developing elements with micro shape, micro mold parts machining and experiment of injection molding using it were performed. The ultra precision micro machining system with high functionality was fabricated, and utilized in the machining of micro parts. By using this machining system and micro end-mill tool, a micro circle column structure of high aspect ratio, diameter 60 $\mu\textrm{m}$, height 500 $\mu\textrm{m}$, was fabricated. And a micro lens molds were fabricated by using ball end-mill tool of 300 $\mu\textrm{m}$ diameter and diamond fly-cut tool of 150 $\mu\textrm{m}$ radius. A micro injection molding machine, which is clamping force 1.75 ton, injection capacity 2.8cc, was fabricated for injection molding experiment using micro molds. The injection molding experiment was performed by using the injection molding machine, micro cylinder structures and lens molds. This paper introduces these micro machining system and injection molding machine and demonstrates examples of injection molding using fabricated molds.