Transfer technology of Micro LED

Micro LED의 전사 기술

  • 전인학 (고려대학교 공학대학원 전기전자컴퓨터공학과) ;
  • 유재수 (중앙대학교 화학신소재공학부) ;
  • 주병권 (고려대학교 전기전자공학부)
  • Published : 2018.12.31

Abstract

Micro LED, which is emerging as a next generation display, is difficult to commercialize due to various technical problems to date. In particular, transfer technology that transfers small LED to a display substrate in micro units is a key technology that can bring commercialization and is an important variable. The core of transfer technology is to move the LED quickly and accurately to the desired location. Therefore, it is necessary to pay attention on the transfer technology which is the most important task of Micro LED, and we analyzed and summarized the transfer technology using Elastomer Stamp which is one of the advanced transfer technologies.

차세대 디스플레이로 부상하고 있는 Micro LED는 현재까지 여러 기술적인 문제로 상용화가 어려운 상황이다. 특히 Micro 단위로 작은 LED를 디스플레이 기판으로 옮기는 전사(Transfer) 기술이 상용화를 가지고 올 수 있는 핵심 기술이며, 중요한 변수다. 전사기술의 핵심은 LED를 원하는 위치에 빠르고 정확하게 이동시키는 것에 있다. 따라서 Micro LED에서 가장 핵심 과제인 전사 기술에 대해 고민할 필요가 있으며, 전사 기술 중 하나인 Elastomer Stamp를 이용한 전사 기술에 대해서 분석해보고 정리해보았다.

Keywords

References

  1. 미래창조과학부, "롤 전사를 이용한 마이크로 LED 제조기술 세계 최초 개발", 보도자료 2017.07
  2. Han Eol Lee, JeHyuk Choi, Seung Hyun Lee, Minju Jeong, Jung Ho Shin, Daniel J. Joe, Do Hyun Kim, Chang Wan Kim, Jung Hwan Park, Jae Hee Lee, Dae Soo Kim, Chan Soo Shin, and Keon Jae Lee, "Monolithic Flexible Vertical GaN Light-Emitting Diodes for a Transparent Wireless Brain Optical Stimulator", Advanced Materials, Vol 30, No 28, pp. 1-10, July 2018
  3. Christopher A. Bower, Matthew A. Meitl, Brook Raymond, Erich Radauscher, Ronald Cok, Salvatore Bonafede, David Gomez, Tanya Moore, Carl Prevatte, Brent Fisher, Robert Rotzoll, George A. Melnik, Alin Fecioru, and Antonio Jose Trindade, "Emissive displays with transfer-printed assemblies of $8{\mu}m{\times}15{\mu}m$ inorganic light-emitting diodes", Photonics Research, Vol 5, No 2, pp. A23-A29, January 2017 https://doi.org/10.1364/PRJ.5.000A23
  4. Bernard Geffroy, Philippe le Roy and Christophe Prat, "Organic light-emitting diode (OLED) technology: materials, devices and display technologies", Polymer International, Vol 55, No 6, pp. 572-582, February 2006 https://doi.org/10.1002/pi.1974
  5. Delilah Lin, Micro LED: Understand the New Display Technology in 3 minutes, LEDinside of TRENDFORCE, Retrieved from https://www.ledinside.com/news/2017/4/micro_led_understand_the_new_display_technology_in_3_minutes
  6. Matthew Meitl, Erich Radauscher, Salvatore Bonafede, David Gomez, Tanya Moore, Carl Prevatte, Brook Raymond, Brent Fisher, Kanchan Ghosal, Alin Fecioru, Ant nio Jose Trindade, David Kneeburg, Christopher A. Bower, "Passive Matrix Displays with Transfer-Printed Microscale Inorganic LEDs", SID, Vol 47, No 1, pp. 743-746, San Francisco, May 2016
  7. T. Granlund, T. Nyberg, L. Stolz Roman, M. Svensson, O. Inganas, "Patterning of Polymer Light-Emitting Diodes with Soft Lithography", Advanced Materials, Vol 12, No 4, pp. 269-273, February 2000 https://doi.org/10.1002/(SICI)1521-4095(200002)12:4<269::AID-ADMA269>3.0.CO;2-5
  8. Christopher A. Bower, Matthew A. Meitl, Salvatore Bonafede and David Gomez, "Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing", ECTC, pp. 963-967, San Diego, May 2015
  9. 김영우, 정탁, 사기동, 김자연, 김정현, 이상헌, "마이크로 LED 응용 연구 동향", 2016년 6대 세라믹기술상 콘테스트, 19권, 3호, pp. 57-70, 2016.09
  10. Skavy Cheng, Overview of Micro-LED History and Current Developments, LEDinside of TRENDFORCE, Retrieved from https://www.ledinside.com/outlook/2016/8/overview_of_micro_led_history_and_current_developments
  11. 미래에셋대우 리서치센터, 2017.03
  12. G. Rajeswaran, M. Itoh, M, Boroson, S. Barry, T.K. Hatwar, K.B. Kahen, K. Yoneda, R. Yokoyama, T. Yamada, N. Komiya, H. Kanno, H. Takahashi, "Active Matrix Low Temperature Poly-Si TFT/OLED Full Color Displays: Development Status", SID2000 Digest, Long Beach USA, pp. 974-977, 2000
  13. Matthias Geissler, Andre Bernard, Alexander Bietsch, Heinz Schmid, Bruno Michel, and Emmanuel Delamarche, "Microcontact-Printing Chemical Patterns with Flat Stamps", Journal of the American Chemical Society, Vol 122, No 26, pp. 6303-6304, February 2000 https://doi.org/10.1021/ja000476i
  14. Yale development, Micro LED Display Report, YDLS17003, 1, 2017
  15. Pamela M. St. John and H. G. Craighead, "Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates", Applied Physics Letters, Vol 68, No 7, pp. 1022-1024, February 1996 https://doi.org/10.1063/1.116216
  16. Younan Xia, Joe Tien, Dong Qin, and George M. Whitesides, "Non-Photolithographic Methods for Fabrication of Elastomeric Stamps for Use in Microcontact Printing", Langmuir, Vol 12, No 16, pp. 4033-4038, August 1996 https://doi.org/10.1021/la960387c
  17. Anne M. Taylor, Seog Woo Rhee, Christina H. Tu, David H. Cribbs, Carl W. Cotman, and Noo Li Jeon, "Microfluidic Multicompartment Device for Neuroscience Research", Langmuir, Vol 19, No 5, pp. 1551-1556, March 2003 https://doi.org/10.1021/la026417v
  18. Homola, Andrew M., "Composite stamper for imprint lithography", US Patent No 7632087, December 2009
  19. Matthew A. Meitl, Zheng-Tao zhu, Vipan Kumar, Keon Jae Lee, Xue Feng, Younggang Y. Huang, Ilesanmi Adesida, Ralph G. Nuzzo And John A. Rogers, "Transfer printing by kinetic control of adhesion to an elastomeric stamp," Nature Materials, Vol 5, No 1, pp. 33-38, January 2006 https://doi.org/10.1038/nmat1532
  20. Alexander Papra, Andre Bernard, David Juncker, Niels B. Larsen, Bruno Michel, and Emmanuel Delamarche, "Microfluidic Networks Made of Poly(dimethylsiloxane), Si, and Au Coated with Polyethylene Glycol for Patterning Proteins onto Surfaces", Langmuir, Vol 17, No 13, pp. 4090-4095, June 2001 https://doi.org/10.1021/la0016930
  21. Andrew Carlson, Audrey M. Bowen, Yonggang Huang, Ralph G. Nuzzo and John A. Rogers, "Transfer printing techniques for materials assembly and micro/nanodevice fabrication", Advanced Materials, Vol 24, No 39, pp. 5284-5318, October 2012 https://doi.org/10.1002/adma.201201386
  22. Bart Jan Ravoo, "Microcontact chemistry: surface reactions in nanoscale confinement", Journal of Materials Chemistry, Vol 19, No 47, pp. 8902-8906, 2009 https://doi.org/10.1039/b908564e
  23. Jae-Young Choi, "Graphene transfer: A stamp for all substrates", Nature Nanotechnology, Vol 8, No 5, pp. 311-312, May 2013 https://doi.org/10.1038/nnano.2013.74
  24. H.G. Craighead, C.D. James, A.M.P. Turner, "Chemical and topographical patterning for directed cell attachment", Current Opinion in Solid State and Materials Science, Vol 5, No 2-3, pp. 177-184, 2001 https://doi.org/10.1016/S1359-0286(01)00005-5
  25. Kenneth G. Sharp, Gregory S, Blackman, Nicholas J. Glassmaker, Anand Jagota, and Chung-Yuen Hui, "Effect of Stamp Deformation on the Quality of Microcontact Printing: Theory and Experiment", Langmuir, Vol 20, No 15, pp. 6430-6438, July 2004 https://doi.org/10.1021/la036332+
  26. Shaoming Huang, Qiang Fu, Lei An and Jie Liu, "Growth of aligned SWNT arrays from water-soluble molecular clusters for nanotube device fabrication", Physical Chemistry Chemical Physics, pp. 1077-1079, 2004
  27. Ronald S. Cok, Matthew Meitl, Robert Rotzoll, George Melnik, Alin Fecioru, Antonio Jose Trindade, Brook Raymond, Salvatore Bonafede, David Gomez, Tanya Moore, Carl Prevatte, Erich Radauscher, Scott Goodwin, Paul Hines, Christopher A. Bower, "Inorganic light-emitting diode displays using micro-transfer printing", Journal of the Society for Information Display, Vol 25, No 10, pp. 589-609, October 2017 https://doi.org/10.1002/jsid.610
  28. David Gomez, Kanchan Ghosal, Tanya Moore, Matthew A. Meitl, Salvatore Bonafede, Carl Prevatte, Erich Radauscher, Antonio Jose Trindade and Christopher A. Bower, "Scalability and Yield in Elastomer Stamp Micro-Transfer-Printing", Electronic Components and Technology Conference, Article number 7999922, pp. 1779-1785, January 2017
  29. C. D. James, R. C. Davis, L. Kam, H. G. Craighead, M. Isaacson, J. N. Turner and W. Shain, "Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing", Langmuir, Vol 14, No 4, pp.741-744, February 1998 https://doi.org/10.1021/la9710482
  30. Bongsoo Kim, Minwoo Park, Youn Sang Kim and Unyong Jeong, "Thermal Expansion and Contraction of an Elastomer Stamp Causes Position-Dependent Polymer Patterns in Capillary Force Lithography", Applied Materials and Interfaces, Vol 3, No 12, pp. 4695-4702, December 2011 https://doi.org/10.1021/am201118u
  31. C. D. James, R. Davis, M. Meyer, A. Turner, S. Turner, G. Withers, L. Kam, G. Banker, H. Craighead, M. Isaacson, J. Turner and W. Shain, "Aligned Microcontact Printing of Micrometer-Scale Poly-L-Lysine Structures for Controlled Growth of Cultured Neurons on Planar Microelectrode Arrays", IEEE Transactions on Biomedical Engineering, Vol 47, No 1, pp. 17-21, January 2000 https://doi.org/10.1109/10.817614
  32. Maracas, George N., Timothy P. Burgin and Thomas M. Mance, "Micro-contact printing stamp", U.S. Patent No 5937758, August 1999
  33. Gabor Csucs, Tobias Kunzler, Kirill Feldman, Franck Robin, and Nicholas D. Spencer, "Microcontact Printing of Macromolecules with Submicrometer Resolution by Means of Polyolefin Stamps", Langmuir, Vol 19, No 15, pp. 6104-6109, July 2003 https://doi.org/10.1021/la0342823
  34. I. Viheriala, T. Niemi, J. Laukkanen, M. Karjalainen, M. Pessa, "Large-area nano perforated SiN membranes for optical and mechanical filtering", Microelectronic Engineering, Vol 87, No 5-8, pp. 1620-1622, August 2010 https://doi.org/10.1016/j.mee.2009.10.033
  35. Matt Meitl, "Mass transfer with elastomer stamps for microLED displays", ECTC, pp. 1-16, San Diego May 2018
  36. Christopher A. Bower, Matthew Meitl and David Kneeburg, "Micro-transfer-printing: Heterogeneous integration of microscale semiconductor devices using elastomer stamps", IEEE Sensors Conference, pp. 2111-2113, 2014
  37. Laura B. Goetting, Tao Deng, and George M. Whitesides, "Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching", Langmuir, Vol 15, No 4, pp. 1182-1191, 1999 https://doi.org/10.1021/la981094h
  38. Liang Cui, Zexin Zhang, Xue Li, Yanchun Ha, "Surface-induced phase separation of binary polymer blends on the chemically patterned substrate", Polymer Bulletin, Vol 55, No 1-2, pp. 131-140, August 2005 https://doi.org/10.1007/s00289-005-0404-3
  39. C. Y. Hui, A. Jagota, Y. Y. Lin, E. J. Kramer, "Constraints on microcontact printing imposed by stamp deformation", Langmuir, Vol 18, No 4, pp. 1394-1407, February 2002 https://doi.org/10.1021/la0113567
  40. LeeAnn Kim, Polina O. Anikeeva, Seth A. Coe-Sullivan, Jonathan S. Steckel, Moungi G. Bawendi and Vladimir Bulovic, "Contact Printing of Quantum Dot Light-Emitting Devices", Nano Letters, Vol 8, No 12, pp. 4513-4517, December 2008 https://doi.org/10.1021/nl8025218
  41. M.E Hasenbein, T. T Andersen, R Bizios, "Micropatterned surfaces modified with select peptides promote exclusive interactions with osteoblasts", Biomaterials, Vol 23, No 19, pp. 3937-3942, 2002 https://doi.org/10.1016/S0142-9612(02)00129-1
  42. Jie Song, Fong-Yu Kam, Rui-Qi Png, Wei-Ling Seah, Jing-Mei Zhuo, Geok-Kieng Lim, Peter K. H. Ho and Lay-Lay Chua, "A general method for transferring graphene onto soft surfaces", Nature Nanotechnology, Vol 8, No 5, pp. 356-362, May 2013 https://doi.org/10.1038/nnano.2013.63
  43. Chun Xu, Pietro Taylor, Mustafa Ersoz, Paul D. I. Fletcher and Vesselin N. Pauno, "Microcontact printing of DNA-surfactant arrays on solid substrates", Journal of Materials Chemistry, Vol 13, No 12, pp.3044-3048, December 2003 https://doi.org/10.1039/b307788h
  44. D.C. Trimbach, H. Stapert, J, vanOrselen, K.D. Jandt, C.W.M. Bastiaansen, D.J. Broer, "Improved Microcontact Printing of Proteins using Hydrophilic Thermoplastic Elastomers as Stamp Materials", Advanced Engineering Materials, Vol 9, No 12, pp. 1123-1128, December 2007 https://doi.org/10.1002/adem.200700282
  45. Xizeng Feng, Clive J. Roberts, David A, Armitage, Martyn C. Davies, Saul J. B. Tendler, Stephanie Allen and Philip M. Williams, "Investigation of microcontact transfer of proteins from a selectively plasma treated elastomer stamp by fluorescence microscopy and force microscopy", Analyst, Vol 126, No 7, pp.1100-1104, 2001 https://doi.org/10.1039/b102269p
  46. Inganas, Olle, Tobis Nyberg and Tomas Granlund, "Methods for patterning polymer films, and use of the methods", U.S. Patent No. 6966997, November 2005
  47. Andre Bernard, Emmanuel Delamarche, Heinz Schmid, Bruno Michel, Hans Rudolf Bosshard, and Hans Biebuyck, "Printing Patterns of Proteins", Langmuir, Vol 14, No 9, pp. 2225-2229, April 1998 https://doi.org/10.1021/la980037l
  48. Shihao Liu, Wenbo Liu, Wenyu Ji, Jing Yu, Wei Zhang, Letian Zhang & Wenfa Xie, "Top-emitting quantum dots light-emitting devices employing microcontact printing with electricfield-independent emission", Scientific Reports, Vol 6, pp. 1-9, March 2016 https://doi.org/10.1038/s41598-016-0001-8
  49. H. Schmid, B. Michel, "Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography", Macromolecules, Vol 33, No 8, pp. 3042-3049, April 2000 https://doi.org/10.1021/ma982034l
  50. Hongwei Li, Dae-Joon Kang, Mark G. Blamire, and Wilhelm T. S. Huck, "High-Resolution Contact Printing with Dendrimers", Nano Letters, Vol 2, No 4, pp. 347-349, April 2002 https://doi.org/10.1021/nl025503c
  51. Takamasa Kawanago, Wanjing Du, Ryo Ikoma, Tomoaki Oba, Hiroyuki Takagi and Shunri Oda, "Transfer printing of nanostructured membrane with elastomeric stamp and its application to TMDC-based field-effect transistors", The 17th International Workshop on Junction Technology, Article number 7966509, pp. 40-43, June 2017
  52. Sang Yoon Yang, Andrew Carlson, Huanyu Cheng, Qingmin Yu, Numair Ahmed, Jian Wu, Seok Kim, Metin Sitti, Placid M. Ferreira, Yonggang Huang, John A. Rogers, "Elastomer Surfaces with Directionally Dependent Adhesion Strength and Their Use in Transfer Printing with Continuous Roll-to-Roll Applications", Advanced Materials, Vol 24, No 16, pp. 2117-2122, April 2012 https://doi.org/10.1002/adma.201104975
  53. John Justice, Chris Bower, Matthew Meitl, Marcus B. Mooney, Mark A. Gubbins and Brian Corbett, "Wafer-scale integration of group III-V lasers on silicon using transfer printing of epitaxial layers", Nature Photonics, Vol 6, No 9, pp. 610-614, September 2012 https://doi.org/10.1038/nphoton.2012.204
  54. Atsushi Takakuwa, Mitsuhiro Ikawa, Mariko Fujita and Kiyoshi Yase, "Micropatterning of electrodes by microcontact printing method and application to thin film transistor devices", Japanese Jornal of Applied Physics, Vol 46, No 9, pp. 5960-5963, September 2007 https://doi.org/10.1143/JJAP.46.5960
  55. H. G. Craighead, S. W. Turner, R. C. Davis, C. James, A. M. Perez, P. M. St. John, M. S. Isaacson, L. Kam, W. Shain, J. N. Turner, G. Banker, "Chemical and Topographical Surface Modification for Control of Central Nervous System Cell Adhesion", Biomedical Microdevices, Vol 1, No 1, pp. 49-64, September 1998 https://doi.org/10.1023/A:1009982306118
  56. Atsushi Takakuwa, Masahiro Misaki, Yuji Yoshida, Kiyoshi Yase, "Micropatterning of emitting layers by microcontact printing and application to organic light-emitting diodes", Thin Solid Films, Vol 518, No 2, pp. 555-558, November 2009 https://doi.org/10.1016/j.tsf.2009.07.046
  57. Young-jun Park, "마이크로 LED 동향과 전망", Insight Report 2017.07
  58. David Gomez, Kanchan Ghosal, Matthew A. Meitl, Salvatore Bonafede, Carl Prevatte, Tanya Moore, Brook Raymond, David Kneeburg, Alin Fecioru, Ant nio Jose Trindade and Christopher A. Bower, "Process Capability and Elastomer Stamp Lifetime in Micro Transfer Printing", Electronic Components and Technology Conference, Article number 7545503, pp. 680-687, August 2016