• 한국생산제조학회지
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• 제20권3호
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• pp.322-328
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• 2011

This paper presents inverse kinematics and workspace analysis of a planar three degree-of-freedom (DOF) parallel manipulator. Furthermore, optimization problem of the manipulator is presented. The manipulator adopts PRR (Prismatic-Revolute-Revolute) mechanism and the prismatic actuators are fixed to the base. This leads to a reduction of the inertia of the moving links and hence enables it to move with high speed. The actuators are linear electric motors. First, the mechanism based on the geometry of the manipulator is introduced. Second, a workspace analysis is performed. Finally, design optimization is carried out to have large workspace. The proposed approach can be applied to the design optimization of various three DOF parallel manipulators in order to maximize their workspace. The performance of mechanism is improved and satisfies the requirements of workspace to align micro-components.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2395-2397
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• 2005

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.

• 반도체디스플레이기술학회지
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• 제3권3호
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• 대한전자공학회논문지SD
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• 제40권8호
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• pp.543-548
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• 2003

본 논문에서는 큰 회전각을 갖는 2축 자유도 마이크로 미러를 제안하고 제작하였다. 이러한 마이크로 미러는 N×N 대용량 광 크로스 커넥트 스위치(optical cross-connect switch)를 구현하는 데 필수적인 요소이다. 스위치의 용량을 증가시키기 위해서는 각각의 마이크로 미러의 회전각을 크게 해야 한다. 이 미러가 큰 각도로 회전하기 위해서는 상부 전극인 미러 판과 하부전극 사이에 충분한 공간이 확보 되어야 한다. 제안된 구조는 기판미세 가공법 (bulk micromachining)을 이용하여 상부전극인 미러와 하부전극을 각각 다른 기판에 제작한 후, 두 기판을 접합함으로써 쉽게 미러의 회전 공간을 확보하였다. 따라서 미러의 회전공간 확보를 위한 별도의 구동기(actuator)를 도입할 필요가 없었다. 제작된 마이크로 미러의 성능을 측정한 결과를 살펴보면, x축과 y축 방향으로의 회전각은 각각 ±5.5°와 ±8.4°였으며, 이 때의 풀인 (pull-in)전압은 각각 380 V와 275 V였다. 이러한 회전각의 성능은 전 세계적으로 지금까지 보고된 연구결과 중에서 가장 우수한 결과이다.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• Smart Structures and Systems
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• 제15권6호
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• pp.1601-1623
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• 2015

Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.

• 재활복지공학회논문지
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• 제10권3호
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• pp.229-236
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• 2016

자기 센서와 액추에이터는 산업과 의료 분야에서 광범위하게 사용되고 있다. 센서와 액추에이터의 기반의 통합시스템은 기계 및 전자 기기들의 일반적인 조합으로써 메카트로닉스로 정의된다. 최근에 자기 무선 센서와 액추에이터가 개발되어지고, 다양한 분야에서 사용되고 있다. 특히 이 메커니즘은 자성 물질 및 물리적 현상에 관한 것으로 자기의 세기의 따라 달라진다. 그러나 이들 연구의 경계는 명확하지 않다. 따라서, 자기 마이크로 로봇, 자기액추에이터 및 센서들을 포함한 새롭고 정확한 정의가 필요하다. 본 연구에서는 의공학 및 재활을 위한 자기 메카트로닉스의 진보되고 확장된 개념을 혈관 재활을 위한 무선 펌프 시스템과 모션 감지 시스템을 중심으로 소개하고자 한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 추계학술발표강연 및 논문개요집
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• pp.29-29
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• 1998

• 로봇학회논문지
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• 제2권1호
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• pp.64-70
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• 2007

In this paper, a robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. By the experiment, we proved that the developed the system gives acceptable performance when minute operations. Developed the micro-nano robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this system, micro gripper is designed and fabricated with MEMS technology and the displacement of jaw is up to 142.8 micro meter. We think that new robot system will be appropriate for micro system assembly tasks and life science application.

• 한국정밀공학회지
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• 제22권11호
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• pp.151-158
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• 2005

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was $0.05{\mu}m$ and position accuracy less than $2{\mu}m$ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many fuming experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.