• Title/Summary/Keyword: Metal-oxide interface

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Characteristics of the Avalanche Injection on SiO2Layer in MOS Structures (MOS 구조에서의 Avalanche Injection에 관한 연구)

  • 성영권;김성진;백우현;박찬원
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.34 no.6
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    • pp.244-252
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    • 1985
  • A model is presented to explain charging phenomena into the oxide layer when a metal-oxide-silicon(MOS) capacitor is driven by a large amplitude and high frequency ac signal sufficient to produce avalanche injection in the silicon. During avalanche, minority carriers are injected. It is assumed that some of these minority carriers attain sufficient energy to surmount the potential barrier at the interface, and then inter the oxide. Measurements of C-V curves are made for the MOS capacitor with p-type silicon substrates before and after avalanche injection. This paper studies how charging in the oxide and the interface depends on oxide properties. It is concluded that this charging effect is related to the presence of water in the oxide.

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Study on the Electrochemical Characteristics of a EGaIn Liquid Metal Electrode for Supercapacitor Applications (수퍼커패시터 응용을 위한 EGaIn 액체 금속 전극의 전기화학 특성 연구)

  • SO, JU-HEE;KOO, HYUNG-JUN
    • Transactions of the Korean hydrogen and new energy society
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    • v.27 no.2
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    • pp.176-181
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    • 2016
  • Recent years, supercapacitors have been attracting a growing attention as an efficient energy storage, due to their long-lifetime, device reliability, simple device structure and operation mechanism and, most importantly, high power density. Along with the increasing interest in flexible/stretchable electronics, the supercapacitors with compatible mechanical properties have been also required. A eutectic gallium-indium (EGaIn) liquid metal could be a strong candidate as a soft electrode material of the supercapacitors because of its insulating surface oxide layer for electric double layer formation. Here, we report the electrochemical study on the charging/reaction process at the interface of EGaIn liquid metal and electrolyte. Numerical fitting of the charging current curves provides the capacitance of EGaIn/insulating layer/electrolyte (${\sim}38F/m^2$). This value is two orders of magnitude higher than a capacitance of a general metal electrode/electrolyte interface.

Research Trends on Interface-type Resistive Switching Characteristics in Transition Metal Oxide (전이 금속 산화물 기반 Interface-type 저항 변화 특성 향상 연구 동향)

  • Dong-eun Kim;Geonwoo Kim;Hyung Nam Kim;Hyung-Ho Park
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.4
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    • pp.32-43
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    • 2023
  • Resistive Random Access Memory (RRAM), based on resistive switching characteristics, is emerging as a next-generation memory device capable of efficiently processing large amounts of data through its fast operation speed, simple device structure, and high-density implementation. Interface type resistive switching offer the advantage of low operation currents without the need for a forming process. Especially, for RRAM devices based on transition metal oxides, various studies are underway to enhance the memory characteristics, including precise material composition control and improving the reliability and stability of the device. In this paper, we introduce various methods, such as doping of heterogeneous elements, formation of multilayer films, chemical composition adjustment, and surface treatment to prevent degradation of interface type resistive switching properties and enhance the device characteristics. Through these approaches, we propose the feasibility of implementing high-efficient next-generation non-volatile memory devices based on improved resistive switching properties.

Structural Analysis of Low Temperature Processed Schottky Contacts to n-InGaAs (저온공정 n-InGaAs Schottky 접합의 구조적 특성)

  • 이홍주
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.7
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    • pp.533-538
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    • 2001
  • The barrier height is found to increase from 0.25 to 0.690 eV for Schottky contacts on n-InGaAs using deposition of Ag on a substrate cooled to 77K(LT). Surface analysis leads to an interface model for the LT diode in which there are oxide compounds of In:O and As:O between the metal and semiconductor, leading to behavior as a metal-insulator-semiconductor diode. The metal film deposited t LT has a finer and more uniform structure, as revealed by scanning electron microscopy and in situ metal layer resistance measurement. This increased uniformity is an additional reason for the barrier height improvement. In contrast, the diodes formed at room temperature exhibit poorer performance due to an unpassivated surface and non-uniform metal coverage on a microscopic level.

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Characteristics of Schottky Diode and Schottky Barrier Metal-Oxide-Semiconductor Field-Effect Transistors

  • Jang, Moon-Gyu;Kim, Yark-Yeon;Jun, Myung-Sim;Lee, Seong-Jae
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.5 no.2
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    • pp.69-76
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    • 2005
  • Interface-trap density, lifetime and Schottky barrier height of erbium-silicided Schottky diode are evaluated using equivalent circuit method. The extracted interface trap density, lifetime and Schottky barrier height for hole are determined as $1.5{\times}10^{13} traps/cm^2$, 3.75 ms and 0.76 eV, respectively. The interface traps are efficiently cured by $N_2$ annealing. Based on the diode characteristics, various sizes of erbium- silicided/platinum-silicided n/p-type Schottky barrier metal-oxide-semiconductor field effect transistors (SB-MOSFETs) are manufactured from 20 m to 35nm. The manufactured SB-MOSFETs show excellent drain induced barrier lowering (DIBL) characteristics due to the existence of Schottky barrier between source and channel. DIBL and subthreshold swing characteristics are compatible with the ultimate scaling limit of double gate MOSFETs which shows the possible application of SB-MOSFETs in nanoscale regime.

An Experimental Study on the Bond Strength after Surface Treatment of Non-precious Metal Alloy for porcelain Crown (도재용 비금속합금의 표면처리에 따른 결합강도에 관한 실험적 연구)

  • So, Myung-Sub
    • Journal of Technologic Dentistry
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    • v.9 no.1
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    • pp.39-49
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    • 1987
  • This study done to evaluate some surface treatment methods in metal coping which can increase the bond strength between porcelain and metal. Therefore this experiment was performed according to the Mc Lean's Theory of bond strength between porcelain and strength between porcelain and metal. In the experiment the author measured respective thermal expansion coefficents in three types of metal(Tallasium, Vera Bond and Rexillium) and Vita Porcelain to get the differences in the coefficents between porcelain and metals. And using insteron testing machine, the author also performed Planar interface shear bond tests on the 45 specimens(15 specimens in oxide surface, rough surface and fine surface treatment methods respectively) to measure bond strength between metal and porcelain. The results Were as follows, 1. The differences in thermal expansion coefficients between three types of metal and Vita procelain: Talladium - $1.2\;10^{-6/0}\;C$, Vera Bond - $1.6\;10^{-6/0}\;C$, Rexillium - $1.9\;10^{-6/0}\;C$. 2. The bond strength in oxide surface on the Shear bond test was the lowest among the treatment methods. 3. There was no significant differences in treatment methods of rough surface of fine surface. 4. In the oxide surface treatment method, there were significant differences(P<0.05)between Vera bond and Rexillium, and between Talladium and Rexillium. 5. In the fine surface treatment, there was a significant difference(P<0.05)between Talladium and Rexillium.

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UV Photo Response Driven by Pd Nano Particles on LaAlO3/SrTiO3 Using Ambient Control Kelvin Probe Force Microscopy

  • Kim, Haeri;Chan, Ngai Yui;Dai, Jiyan;Kim, Dong-Wook
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.207.1-207.1
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    • 2014
  • High-mobility and two dimensional conduction at the interface between two band insulators, LaAlO3 (LAO) and SrTiO3 (STO), have attracted considerable research interest for both applications and fundamental understanding. Several groups have reported the photoconductivity of LAO/STO, which give us lots of potential development of optoelectronic applications using the oxide interface. Recently, a giant photo response of Pd nano particles/LAO/STO is observed in UV illumination compared with LAO/STO sample. These phenomena have been suggested that the correlation between the interface and the surface states significantly affect local charge modification and resulting electrical transport. Water and gas adsorption/desorption can alter the band alignment and surface workfunction. Therefore, characterizing and manipulating the electric charges in these materials (electrons and ions) are crucial for investigating the physics of metal oxide. Proposed mechanism do not well explain the experimental data in various ambient and there has been no quantitative work to confirm these mechanism. Here, we have investigated UV photo response in various ambient by performing transport and Kelvin probe force microscopy measurements simultaneously. We found that Pd nano particles on LAO can form Schottky contact, it cause interface carrier density and characteristics of persistence photo conductance depending on gas environment. Our studies will help to improve our understanding on the intriguing physical properties providing an important role in many enhanced light sensing and gas sensing applications as a catalytic material in different kinds of metal oxide systems.

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Enhanced Adhesion of Cu Film on the Aluminum Oxide by Applying an Ion-beam-mixd Al Seed Layar

  • Kim, Hyeong-Jin;Park, Jae-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.229-229
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    • 2012
  • Adhesion of Copper film on the aluminum oxide layer formed by anodizing an aluminum plate was enhanced by applying ion beam mixing method. Forming an conductive metal layer on the insulating oxide surface without using adhesive epoxy bonds provide metal-PCB(Printed Circuit Board) better thermal conductivities, which are crucial for high power electric device working condition. IBM (Ion beam mixing) process consists of 3 steps; a preliminary deposition of an film, ion beam bombardment, and additional deposition of film with a proper thickness for the application. For the deposition of the films, e-beam evaporation method was used and 70 KeV N-ions were applied for the ion beam bombardment in this work. Adhesions of the interfaces measured by the adhesive tape test and the pull-off test showed an enhancement with the aid of IBM and the adhesion of the ion-beam-mixed films were commercially acceptable. The mixing feature of the atoms near the interface was studied by scanning electron microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy.

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The Influence of CuO on Bonding Behaviors of Low-Firing-Substrate and Cu Conductor (저온소성 기판과 Cu와의 동시소성에 미치는 CuO의 첨가효과)

  • 박정현;이상진
    • Journal of the Korean Ceramic Society
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    • v.31 no.4
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    • pp.381-388
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    • 1994
  • A new process which co-fires the low-firing-substrate and copper conductor was studied to achieve good bond strength and low sheet resistance of conductor. Cupric oxide is used as the precursor of conductive material in the new method and the firing atmosphere of the new process is changed sequently in air H2N2. The addition of cupric oxide and variations of firing atmosphere permited complete binder-burnout in comparison with the conventional method and contributed to the improvement of resistance and bonding behaviors. The potimum conditions of this experiment to obtain the satisfactory resistance and bond strength are as follows (binder-burnout temperature in air; 55$0^{\circ}C$, reducing temperature in H2; 40$0^{\circ}C$ for 30 min, ratio of copper and cupric oxide; 60:40~30:70 wt%). The bonding mechanism between the substrate and metal was explained by metal diffusion layer in the interface and the bond strength mainly depended on the stress caused by the difference of shrinkage and thermal expansion coefficient between the substrate and metal.

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Effect of the fixed oxide charge on the metal-oxide-silicon-on-insulator structures (metal-oxide-silicon-on-insulator 구조에서 고정 산화막 전하가 미치는 영향)

  • Jo, Yeong-Deuk;Kim, Ji-Hong;Cho, Dae-Hyung;Moon, Byung-Moo;Koh, Jung-Hyuk;Ha, Jae-Geun;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.83-83
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    • 2008
  • Metal-oxide-silicon-on-insulator (MOSOI) structures were fabricated to study the effect caused by reactive ion etching (RIE) and sacrificial oxidation process on silicon-on-insulator (SOI) layer. The MOSOI capacitors with an etch-damaged SOI layer were characterized by capacitance-voltage (C-V) measurements and compared to the sacrificial oxidation treated samples and the reference samples without etching treatment. The measured C-V curves were compared to the numerical results from 2-dimensional (2-D) simulations. The measurements revealed that the profile of C-V curves significantly changes depending on the SOI surface condition of the MOSOI capacitors. The shift in the measured C-V curves, due to the difference of the fixed oxide charge ($Q_f$), together with the numerical simulation analysis and atomic force microscopy (AFM) analysis, allowed extracting the fixed oxide charges ($Q_f$) in the structures as well as 2-D carrier distribution profiles.

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