• Journal of the Korean Society for Precision Engineering
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• v.20 no.8
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• pp.101-107
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• 2003

A new mechanical probe for 3-D feature measurement on coordinate measuring machines (CMMs) is presented. The probe is composed of the contact stylus and the three-component force sensor. With the stylus mounted on the force sensor, the probe can not only measure 3-D features, but also detect contact force acting on the stylus tip. Furthermore, the probing direction and the actual contact position can be determined by the relationship among three components of contact force to be detected. In this paper, transformation matrix representing the relationship between the external force acting on the stylus tip and the output voltages of measurement gauges is derived and calibrated. The prototype of probe is developed and its availability is investigated through the experimental setup for calibration test of the probe. A series of experimental results show that the proposed probe can be an effective means of improving the accuracy of touch probing on CMM.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.71-79
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• 2001

The use of a glass-plate probe of rectangular shape is proposed for the measurement of transmission loss in optical waveguides. The light-collecting window is of a thin, rectangular shape and is perpendicular to the light streak, while the conventional fiberglass probe has a small circular face. This transversely elongated form results in a grate improvement of mechanical tolerance for the probe movement in the vortical as well as in the transverse direction. A theoretical investigation also presents a reasonable agreement with the experiments.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.75-80
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• 2008

This paper presents an atomic force probe for triggering coordinate measuring machines(CMMs). A rigorous comparison is made between touch trigger probe and atomic force probe for CMMs. Typical CMMs(touch trigger probe based CMMs) often lead to some errors associated with object curvature and difference in triggering sensitivity. Their applicability is limited only to hard objects. The aim of this work is to develop a trigger sensor for CMMs using atomic force. In order to show the applicability of atomic force as a trigger sensor, a cylindrical shape is measured with a CMM and an atomic force microscope. Three different touch probe heads with different ball sizes are tested. The experiments show that smaller ball provides better results for curved objects. The experimental results also show that the performance of atomic force as a trigger sensor is about that of the smallest ball probe. In addition, experiments are also performed to measure soft objects. Finally, this paper suggests and verifies a trigger sensor using atomic force for CMMs.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.3
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• Nuclear Engineering and Technology
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• v.32 no.5
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• pp.433-445
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• 2000

The interfacial area concentration (IAC) is one of the most important parameters in the two-fluid model for two-phase flow analysis. The IAC can be measured by a local conductivity probe method that uses the difference of conductivity between water and air/steam. The number of sensors in the conductivity probe may be differently chosen by considering the flow regime of two-phase flow. The four sensor conductivity probe method predicts the IAC without any assumptions of the bubble shape. The local IAC can be obtained by measuring the three dimensional velocity vector elements at the measuring point, and the directional cosines of the sensors. The five sensor conductivity probe method proposed in this study is based on the four sensor probe method. With the five sensor probe, the local IAC for a given referred measuring area of the probe can be predicted more exactly than the four sensor probe. In this paper, the mathematical approach of the five sensor probe method for measuring the IAC is described, and a numerical simulation is carried out for ideal cap bubbles of which the sizes and locations are determined by a random number generator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).

• Journal of Sensor Science and Technology
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• v.30 no.4
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• pp.236-242
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• 2021

In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 ㎂/V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

• Journal of Electrical Engineering and Technology
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• v.6 no.1
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• pp.111-118
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• 2011

In recent years, various types of partial discharge (PD) methods such as capacitive, inductive, electromagnetic, and acoustic coupling techniques have been developed for diagnosing rotating machines. An electromagnetic (EM) probe, which is an inductively coupled type of sensor, is required for detecting corona and internal discharges during off-line tests. In this study, a new technique for enhancing the measurement sensitivities for corona and internal discharge based on an EM inductive position sensor is proposed. An EM probe that winds wires around horseshoe-shaped and cylindershaped ferrites as helices is designed and optimized for the implementation of off-line PD monitoring of the stator winding of a rotating machine. The measurement system based on this design is implemented, and it is verified from the results of the experiment performed in this study that the probe provides similar performance as existing commercial products.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.158-163
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• 2002

This paper presents a multiple sensor system for rapid and high-precision coordinate data acquisition in the OMM (On-machine measurement) process. In this research, three sensors (touch probe, laser, and vision sensor) are integrated to obtain more accurate measuring results. The touch-type probe has high accuracy, but is time-consuming. Vision sensor can acquire many point data rapidly over a spatial range but its accuracy is less than other sensors. Also, it is not possible to acquire data for invisible areas. Laser sensor has medium accuracy and measuring speed among the sensors, and can acquire data for sharp or rounded edge and the features with very small holes and/or grooves. However, it has range- constraints to use because of its system structure. In this research, a new optimum sensor integration method for OMM is proposed by integrating the multiple-sensor to accomplish mote effective inspection planning. To verify the effectiveness of the proposed method, simulation and experimental works are performed, and the results are analyzed.