A Study on the Performance of Atomic Force Probe for Coordinate Measuring Machines

3차원 측정기를 위한 원자간력 프로브 성능 연구

  • 정판곤 (금오공과대학교 대학원 기전공학과) ;
  • 배규현 (금오공과대학교 대학원 기전공학과) ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • Published : 2008.08.15

Abstract

This paper presents an atomic force probe for triggering coordinate measuring machines(CMMs). A rigorous comparison is made between touch trigger probe and atomic force probe for CMMs. Typical CMMs(touch trigger probe based CMMs) often lead to some errors associated with object curvature and difference in triggering sensitivity. Their applicability is limited only to hard objects. The aim of this work is to develop a trigger sensor for CMMs using atomic force. In order to show the applicability of atomic force as a trigger sensor, a cylindrical shape is measured with a CMM and an atomic force microscope. Three different touch probe heads with different ball sizes are tested. The experiments show that smaller ball provides better results for curved objects. The experimental results also show that the performance of atomic force as a trigger sensor is about that of the smallest ball probe. In addition, experiments are also performed to measure soft objects. Finally, this paper suggests and verifies a trigger sensor using atomic force for CMMs.

Keywords

References

  1. Song, K. S., Kwon, K. H., Park, J. J., and Cho, N. G., 2003, "A study of development for contact CMM probe using three-component force sensor," Journal of the KSPE, Vol. 20, No. 8, pp. 101-107
  2. Cho, N. G., Lee, J. H., and Choi, M. Y., 1999, "An Error Compensation in Rough Surface Measurement by Contact Stylus Profilometer," Trans. KSMTE, Vol. 8, No. 1, pp. 126-134
  3. Hong, S. W., Ko, M. J., Shin, Y. H., and Lee, D. W., 2005, "Development of a measurement system for the surface shape of micro-parts by using atomic force microscope," Trans. KSMTE, Vol. 14, No. 6, pp. 22-30
  4. Shin, Y. H., Jung, P. G., and Hong, S. W., 2006, "A spherical shape measurement by using atomic force microscope," Proc. of the 2006 KSMTE Fall conference, pp. 196-201
  5. Hong, S. W., Shin, Y. H., Jung, P. G., and Lee, D. W., 2006, "Shape measurement for meso-scale objects using atomic force microscope," The 2nd International Conference for Positioning Technology, pp. 128-131
  6. Yoo, S. B., Chang, I. C., and Kim, S. W., 2000, "Contact Probing Technique for Profile Measurement of Aspheric Lenses," Proc. of the 2005 KSPE Spring Conference, pp. 603-606
  7. Meli, F. et al., 2003, "High precision, low force 3D touch probe for measurements on small objects," Euspen Int. Topical Conference, pp. 411-414
  8. Lee, S. H., 2004, "Error analysis and performance improvement for flatness measurement system," MS Thesis, Kumoh National Institute of Technology, Republic of Korea
  9. Jung, P. G., Bae, G. H., and Hong, S. W., 2007, "Soft lens measurement by using atomic force microscope," Proc. of the 2007 KSPE Spring Conference, pp. 665-666