• 제목/요약/키워드: Material of Target

검색결과 1,366건 처리시간 0.024초

Characteristics of ITO electrode films grown on PET substrate by Roll-to-Roll Facing Target Sputtering system for flexible OLEDs

  • Cho, Sung-Woo;Choi, Kwang-Hyuk;Jeong, Jin-A;Kim, Bong-Seok;Jeong, Dae-Ju;Kim, Han-Ki
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.613-616
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    • 2008
  • We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.

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Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target

  • Jin, Young-Min;Jeon, Min-Gwang;Park, Dong-Yong;Kim, Hyung-Jun;Oh, Ik-Hyun;Lee, Kee-Ahn
    • 한국분말재료학회지
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    • 제20권4호
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    • pp.245-252
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    • 2013
  • This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the ${\alpha}$-Cu and $Cu_3Ga$ were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.

분말 타겟을 이용하여 증착된 ITO 박막의 열처리 특성 (Effects of Heat Treatment on the Properties of ITO Films Deposited with Powder Target)

  • 이재형
    • 한국전기전자재료학회논문지
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    • 제19권2호
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    • pp.109-115
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    • 2006
  • Indium tin oxide (ITO) films have been prepared by DC magnetron sputtering. In order to improve the utilization efficiency of the target and reduce the cost of the film deposition processes, the powder target was used instead of the conventional ceramic target. As-deposited films were annealed at temperatures between $200^{\circ}C$ and $500^{\circ}C$ for 30 min in air. Also, the film was annealed in various atmospheres such as air, $O_2,\;H_2,\;N_2$, and vacuum at $400^{\circ}C$C for 30 min. Effects of the heat treatment conditions on structural, electrical, and optical properties of ITO films were investigated. The annealing temperature of $400^{\circ}C$ and atmospheres of $H_2$ and $N_2$ seem to be the most suitable conditions for post processing.

전달손실 최대화를 위한 흡음재-패널 배열 최적설계 (Sound Transmission Loss Maximization of Multi-panel Structures Lined with Poroelastic Materials by Topology Optimization)

  • 김용진;이중석;강연준;김윤영
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2008년도 추계학술대회논문집
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    • pp.728-733
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    • 2008
  • Though multi-panel structures lined with a poroelastic material have been widely used to reduce sound transmission in various fields, most of the previous works to design them were conducted by repeated analyses or experiments based on initially given configurations or sequences. Therefore, it was difficult to obtain the optimal sequence of multi-panel structures lined with a poroelastic material yielding superior sound isolation capability. In this work, we propose a new design method to sequence a multi-panel structure lined with a poroelastic material having maximized sound transmission loss. Being formulated as a one-dimensional topology optimization problem for a given target frequency, the optimal sequencing of panel-poroelastic layers is systematically carried out in an iterative manner. In this method, a panel layer is expressed as a limiting case of a poroelastic layer to facilitate the optimization process. This means that main material properties of a poroelastic material are treated as Interpolated functions of design variables. The designed sequences of panel-poroelastic layers were shown to be significantly affected by the target frequencies; more panel layers were used at higher target frequencies. The sound transmission loss of the system was calculated by the transfer matrix derived from Biot's theory.

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도로교설계기준(한계상태설계법)의 콘크리트부재 설계를 위한 재료계수 결정법 및 신뢰도 분석 (New Approaches for Calibrating Material Factors of Reinforced Concrete Members in Korean Highway Bridge Design Code (Limit State Design) and Reliability Analysis)

  • 이해성;송상원;김지현
    • 대한토목학회논문집
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    • 제39권1호
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    • pp.13-24
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    • 2019
  • 이 연구에서는 국내 도로교 한계상태설계법에서 콘크리트부재의 설계를 위하여 적용하고 있는 재료계수의 문제점을 제기하고, 잘 정립된 최적화 과정에 의한 재료계수를 제안하였다. 신뢰도분석을 통하여 현 설계기준의 하중계수와 제안 재료계수가 목표신뢰도지수 보다 높은 신뢰도수준을 확보하고 있음을 보이고, 역신뢰도해석을 통하여 목표신뢰도지수를 잘 근사할 수 있는 하중계수를 제시하였다. 유로코드에서 제시하고 있는 기본 개념에 근거하여 신뢰도기반 하중-재료계수 결정법을 정식화하였다. 제안된 접근법이 신뢰도개념에 의하여 유도되었지만, 이 접근법에 의하여 계산된 하중-재료 계수가 목표신뢰도지수를 정확히 만족시키지 못하는 요인으로서 재료와 부재간에 존재하는 불확실성의 차이를 지적하고, 이러한 차이를 고려하지 않는 유로코드의 개념적 문제점을 제기하였다.

마이크로 가스센서의 열적 성능에 관한 연구 (A Study of Thermal Performances for Micro Gas Sensor)

  • 주영철;김창교
    • 대한기계학회논문집B
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    • 제30권6호
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    • pp.531-537
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    • 2006
  • A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.

Monte Carlo N-Particle Extended Code를 이용한 연 X선 정전기제거장치의 최적제작에 관한 연구(II) (A Study on the Optimal Make of X-ray Ionizer using the Monte Carlo N-Particle Extended Code(II))

  • 정필훈;이동훈
    • 한국안전학회지
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    • 제32권6호
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    • pp.29-33
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    • 2017
  • In order to solve this sort of electrostatic failure in Display and Semiconductor process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. There exist variable factors such as type of tungsten thickness deposited on target, Anode voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. Here, MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was compared according to target material thickness using MCNPX and actual X-ray tube source under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W). At the result, In Tube voltage 5 keV and distance 100 mm, optimal target thickness is $0.05{\mu}m$ and fastest decay time appears + decay time 0.28 sec. - deacy time 0.30 sec. In Tube voltage 10keV and distance 100 mm, optimal target Thickness is $0.16{\mu}m$ and fastest decay time appears + decay time 0.13 sec. - deacy time 0.12 sec. In the tube voltage 15 keV and distance 100 mm, optimal target Thickness is $0.28{\mu}m$ and fastest decay time appears + decay time 0.04 sec. - deacy time 0.05 sec.

역구조 유기태양전지 버퍼층 응용을 위한 스퍼터링 방법으로 제작된 VOx 박막의 특성 (Characteristics of VOx Thin Films Fabricated by Sputtering as Buffer Layer in Inverted Organic Solar Cell )

  • 양성수;박용섭
    • 한국전기전자재료학회논문지
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    • 제36권1호
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    • pp.36-41
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    • 2023
  • We investigated the properties of vanadium oxide (VOx) buffer layers deposited by a dual RF magnetron sputtering method under various target powers for inverted organic solar cells (IOSCs). Sputter fabricatged VOx thin films exhibited higher crystallinity with the increase of target power, resulting in a uniform and large grain size. The electrical properties of VOx films are improved with the increase of target power because of the increase of V content. In the results, the performance of IOSCs critically depended on the target power during the film growth because the crystalllinity of the VOx film affects the carrier mobility of the VOx film.

대면적 마그네트론 스퍼터링 증착장비의 수냉시스템 방열성능 해석 (Cooling Performance Analysis of Water-Cooled Large Area Magnetron Sputtering System)

  • 김경진
    • 반도체디스플레이기술학회지
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    • 제9권2호
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    • pp.111-116
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    • 2010
  • In a large area magnetron sputtering system, which is under the influence of high heat load from the plasma, it is necessary to use the effective water cooling in order to maintain the proper deposition performance and the economic use of target materials. A series of three-dimensional numerical simulations are carried out on the simplified model of the large area magnetron sputtering system with the cooling plate that includes the U-shaped water channel. The analysis is focused on the effects of water channel geometry, cooling water flowrate, thermal conductivity of target material, and the degree of target erosion on the cooling performance of cooling plate, which is represented by the temperature distribution of target material.

A Study on Gene Detection using Non-labeling DNA

  • Choi Yong-Sung;Lee Kyung-Sup;Kwon Young-Soo
    • 한국전기전자재료학회논문지
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    • 제19권10호
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    • pp.960-965
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    • 2006
  • This research aims to develop the multiple channel electrochemical DNA chip using microfabrication technology. At first, we fabricated a high integration type DNA chip array by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the gold electrodes. Then target DNAs were hybridized and reacted. Cyclic voltammetry showed a difference between target DNA and control DNA in the anodic peak current values. Therefore, it is able to detect a plural genes electrochemically after immobilization of a plural probe DNA and hybridization of non-labeling target DNA on the electrodes simultaneously. It suggested that this DNA chip could recognize the sequence specific genes.