한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Characteristics of ITO electrode films grown on PET substrate by Roll-to-Roll Facing Target Sputtering system for flexible OLEDs

  • Cho, Sung-Woo (Dept. of Information and Nano-Material Engineering, Kumoh National Institute of Technology) ;
  • Choi, Kwang-Hyuk (Dept. of Information and Nano-Material Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Jin-A (Dept. of Information and Nano-Material Engineering, Kumoh National Institute of Technology) ;
  • Kim, Bong-Seok (Z-TEC Co.,Ltd) ;
  • Jeong, Dae-Ju (Z-TEC Co.,Ltd) ;
  • Kim, Han-Ki (Dept. of Information and Nano-Material Engineering, Kumoh National Institute of Technology)
  • Published : 2008.10.13
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Abstract

We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.

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