• Title, Summary, Keyword: ITO

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Effect of Intermediate Metal on the Methanol Gas Sensitivity of ITO Thin Films (층간금속층에 따른 ITO 박막의 메탄올 검출민감도 개선 효과)

  • Lee, H.M.;Heo, S.B.;Kong, Y.M.;Kim, Dae-Il
    • Journal of the Korean Vacuum Society
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    • v.20 no.3
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    • pp.195-199
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    • 2011
  • ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 nm, IMI sensors have a sandwich structure of ITO 50 nm/metal 10 nm/ITO 40 nm. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 nm film sensors hasthe potential to be used as improved methanol gas sensor.

Microstructure and Properties of ITO and ITO/Ag/ITO Multilayer Thin Films Prepared by D.C. Magnetron Sputtering (D.C. 마그네트론 스퍼터링법으로 제조한 ITO 및 ITO/Ag/ITO 박막의 미세조직과 투명 전극 특성)

  • Choi, Yong-Lak;Kim, Seon-Hwa
    • Korean Journal of Materials Research
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    • v.16 no.8
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    • pp.490-496
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    • 2006
  • ITO monolayer and ITO/Ag/ITO multilayer thin films are prepared by D.C. magnetron sputtering method. Ag layer was inserted for applying ITO to a flexible substrate at low temperature. Carrier concentration and carrier mobility of ITO and ITO/Ag/ITO thin films were measured, the transmittance of them also was done. The amorphous phase was confirmed to be combined in addition to (400) and (440) peaks from XRD result of ITO thin film. As the substrate temperature increased, the preferred orientation of (400) appeared. From the result of application of Ag layer at room temperature, the growth of columnar structure was inhibited, and the amorphous phase formed mostly. The ITO/Ag/ITO thin film represented the transmittance of above 80% when the thickness of Ag layer was 50 ${\AA}$, and the concentration of carrier increased up to above 10 times than that of ITO thin film. Finally, since very low resistance of 3.9${\Omega}/{\square}$ was observed, the effective application of low temperature process is expected to be possible for ITO thin film.

Contact property analysis of ITO - n type emitter, ITO - Ag by TLM (TLM 분석법을 통한 ITO - n emitter간, ITO - Ag 간 접촉 저항 특성 분석)

  • Ryu, Kyungyul;Beak, Kyunghyun;YiKim, Junsin
    • 한국신재생에너지학회:학술대회논문집
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    • pp.50.2-50.2
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    • 2010
  • Indium Tin Oxide (ITO)는 투과도가 높고, 전기 전도도가 뛰어나 TFT, 태양전지 등 여러 가지 산업에서 전극의 재료로 널리 사용되고 있다. 전극의 재료로써 가장 중요하게 고려되어야 할 사항 중의 하나는 전극과 접촉하는 물질과의 접촉 저항이다. 특히, 태양전지에서 높은 접촉 저항은 셀을 직렬저항 요소를 증가시켜 태양전지의 효율 저하를 가져 온다. 본 연구에서는 ITO를 실리콘 태양전지에 적용하기 위하여, ITO - n-type emitter간, ITO - Ag 간의 접촉 특성을 Transfer Length Method(TLM)을 통하여 분석하였다. p-type 실리콘의 전면을 도핑하여 pn접합을 형성한 후, 그 위에 ITO 패턴을 형성하여 ITO-emitter 간의 접촉 특성을 측정하였고, 두껍게 증착한 SiNx 박막 전면에 ITO를 증착한 후, Ag 패턴을 형성하여 ITO-Ag간의 접촉 특성을 측정 하였다. 측정 결과, ITO와 emitter 간의 접촉 비저항은 $0.9{\Omega}-cm^2 $을 나타내었고, ITO와 Ag와의 접촉 비저항은 $0.096{\Omega}-cm^2 $을 나타내었다.

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A Study on the Optimization of the ITO/Ag/ITO Multilayer Transparent Electrode by Using In-line Magnetron Sputtering (인라인 마그네트론 스퍼티링에 의한 ITO/Ag/ITO 다층 구조 투명전극의 최적화에 관한 연구)

  • Lee, Seung Yong;Yoon, Yeo Tak;Cho, Eou Sik;Kwon, Sang Jik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.3
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    • pp.162-169
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    • 2017
  • Indium tin oxide (ITO) thin films show a low sheet resistance and high transmittance in the visible range of the spectrum. Therefore, they play an important role as transparent electrodes for flat panel displays. However, their resistivity is rather high for use as a transparent electrode in large displays. One way to improve electrical and optical properties in large displays is to use ITO/Ag/ITO multilayer films. ITO/Ag/ITO multilayer films have lower sheet resistance than single layer ITO films with the same thickness. Prior to the ITO/Ag/ITO multilayer experiments, optimal condition for thickness change are necessary. Their thicknesses were deposited differently in order to analyze electrical and optical properties. However, when optimal single film characteristics are applied to ITO/Ag/ITO multilayer films, other phenomena appeared. After analyzing the electrical and optical properties by changing ITO and Ag film thickness, ITO/Ag/ITO multilayer films were optimized. By combining ITO film at $586\;{\AA}$ and Ag film at 10 nm, the ITO/Ag/ITO multilayer films showed optimized high optical transmittance of 87.65%, and the low sheet resistance of $5.5{\Omega}/sq$.

Analysis of patterned ITO layer of PDP thin films using spectroscopic ellipsometry (분광타원법을 이용한 PDP용 ITO 박막의 패턴 분석)

  • 윤희삼;김상열
    • Korean Journal of Optics and Photonics
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    • v.14 no.3
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    • pp.272-278
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    • 2003
  • We studied patterned ITO layers of PDP thin films on glass substrates using spectroscopic ellipsometry. The optical property of ITO is expressed with the optical model based on two Lorentz oscillators. The effect of patterned ITO is calculated by taking the weighted average of reflectance in proportion to ITO coverage. The relative coverage of ITO is determined by using the model analysis of spectroellipsometric data. The difference of ITO coverage obtained by the best-fit model analysis of ellipsometric spectra to the expected one is critically examined and suggestions are made to minimize the observed discrepancy.

Characteristic of ITO-Ag-ITO multilayer thin films grown by linear facing target sputtering system (선형대향타겟 스퍼터로 성장시킨 ITO-Ag-ITO 다층박막의 특성 연구)

  • Jeong, Jin-A;Choi, Kwang-Hyuk;Lee, Jae-Young;Lee, Jung-Hwan;Bae, Hyo-Dae;Tak, Yoon-Heung;Ye, Min-Su;Kim, Han-Ki
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.66-66
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    • 2008
  • 본 연구에서는 ITO/Ag/ITO 다층 박막을 유기발광소자와 플렉시블 광전소자의 전극으로 적용하기 위하여 선형 대항 타겟 스퍼터(Linear facing target sputter) 시스템을 이용하여 성막하였고, ITO/Ag/ITO 다층박막의 전기적, 광학적, 구조적 특성을 분석하였다. 선형 대항 타겟 스퍼터 시스템은 강한 일방항의 자계와 타겟에 걸린 음극에 의해 전자의 회전, 왕복 운동이 가능해 마주보는 두 ITO 타겟 사이에 고밀도의 플라즈마를 구속 시켜 플라즈마 데미지 없이 산화물 박막을 성막시킬 수 있는 장치이다. 대항 타겟 스퍼터 시스템을 이용하여 성막한 ITO 전극을 DC power, working pressure, Ar/O2 ratio 에 따른 특성을 각각 분석하였다. glass 기판위에 최적화된 ITO 전극을 bottom layer로 두고, bottom ITO layer 위에 thermal evaporation 을 이용하여 Ag 박막을 6~20nm의 조건에 따라 두께를 다르게 성막하고, Ag 박막을 성막한 후에 다시 bottom ITO 전극과 같은 조건으로 ITO 전극을 top layer로 성막 하였다. 두 비정질의 ITO 전극 사이에 매우 앓은 Ag 박막을 성막 함으로 해서 glass 기판위에 ITO/Ag/ITO 다층 박막전극은 매우 낮은 저항과 높은 투과도를 나타낸다. ITO/Ag/ITO 박막의 전기적 광학적 특성을 보기 위해 hall measurement와 UV/visible spectrometer 분석을 각각 진행하였다. ITO/Ag/ITO 다층 박막 전극이 매우 얇은 두께임에도 불구하고 $4\Omega$/sq.의 낮은 면저항과 85%의 높은 투과도를 나타내는 이유는 ITO/Ag/ITO 전극 사이에 있는 Ag층의 표면 플라즈몬 공명 (SPR) 현상으로 설명할 수 있다. ITO/Ag/ITO 전극의 Ag의 거동을 분석 하기위해 FESEM분석과 synchrotron x-ray scattering 분석을 하였다. ITO/Ag/ITO 전극의 Ag층이 islands의 모양에서 연속적으로 연결되는 변화과정 중에 SPR현상이 일어남을 알 수 있다. 여기서, 대항 타겟 스퍼터 시스템을 이용하여 성막한 ITO/Ag/ITO 다층박막을 OLED 또는 inverted OLEDs의 top 전극으로의 적용 가능성을 보이고 있다.

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Characteristics of ITO/Ag-Pd-Cu/ITO Multilayer Electrodes for High Efficiency Organic Solar Cells

  • Kim, Hyo-Jung;Kang, Sin-Bi;Na, Seok-In;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.257.1-257.1
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    • 2014
  • We investigated characteristics of ITO/Ag-Pd-Cu (APC)/ITO multilayer electrodes prepared by direct current magnetron sputtering for use as an anode in organic solar cells (OSCs). To optimize electrical properties of ITO/APC/ITO multilayer, we fabricated the ITO/APC/ITO multilayer at a fixed ITO thickness of 30 nm as a function of APC thickness. Compare to the surface of Ag layer on ITO, the APC had a smooth surface morphology. At optimized APC thickness of 12 nm, the ITO/APC/ITO multilayer exhibited a sheet resistance of $6{\Omega}/square$ and optical transmittance of 84.15% at a wavelength of 550 nm which is comparable to conventional ITO/Ag/ITO multilayer. However, the APC-based ITO multilayer showed a higher average transmittance in a visible region than the Ag-based ITO multilayer. The higher average transmittance of ITO/APC/ITO multilayer indicated the multilayer is suitable anode for organic solar cells with P3HT:PCBM active layer. OSCs fabricated on the optimized ITO/ACP/ITO multilayer exhibited a better performance with a fill factor of 64.815%, a short circuit current of $8.107mA/cm^2$, an open circuit voltage of 0.59 V, and power conversion efficiency (3.101%) than OSC with ITO/Ag/ITO multilayer (2.8%).

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A Method of Inspecting ITO Pattern and Node Using Measured Data of Each Node's Mutual Capacitance ITO Sensor (상호 유도 정전하 방식 ITO 센서의 노드별 측정 데이터를 이용한 ITO패턴과 노드 검사 방법)

  • Han, Joo-Dong;Moon, Byoung-Joon;Choi, Kyung-Jin;Kim, Dong-Han
    • Journal of the Institute of Electronics and Information Engineers
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    • v.51 no.7
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    • pp.230-238
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    • 2014
  • In this paper, we propose the possible way of accurate analysis and examination of ITO sensor to discriminate whether mutual capacitance ITO sensor is defective by using mutual capacitance of data in each node which consists of electrodes inside of ITO sensor. We have analyzed the structure characteristic of mutual capacitance ITO sensor which is used as an input device for not only small size electronics like mobile phone and tablets but also big size electronics and designed the circuit to inspect ITO sensor using touch screen panel IC. Set a variable related with mutual capacitance of charge and discharge and Implement to find and analyze accurate position when defect is made through the data from each node of ITO sensor. First, we can set a yield effective range through the first experiment data of mutual capacitance ITO sensor and by using the data of each node of ITO sensor which is the result from the second experiment, we can verify accuracy and effectiveness of effective range from the first experiment as a sample which is used in this experiment.

Ag embedded ITO 박막의 전기적 및 광학적 특성 변화

  • Kim, Jun-Yeong;Lee, Dong-Min;Yang, Su-Hwan;Kim, Jae-Gwan;Lee, Ji-Myeon
    • Proceedings of the Korean Vacuum Society Conference
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    • pp.350-350
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    • 2012
  • TCO 물질로 널리 사용되는 ITO 박막은 우수한 특성에도 불구하고 투과도와 전기적 특성 사이에 trade-off 현상이 존재하여 상온에서 증착시 두 가지 특성을 향상시키는데 큰 어려움이 있다 [1]. 본 실험에서는 ITO와 Ag embedded ITO (ITO-Ag) 샘플의 Ag의 증착 시간과 열처리에 따른 전기적 및 광학적 특성 변화를 연구하였다. 열처리 전에는 ITO-Ag 샘플들의 비저항이 ITO 보다 향상 되는 것을 확인 하였다. 하지만 ITO-Ag 샘플의 Ag 증착 시간이 증가 할수록 투과도는 예상한 바와 같이 계속 저하됨을 확인하였다. 열처리 이후에는 Figure 1에서와 같이 ITO와 ITO-Ag 샘플 모두 비저항과 투과도가 향상 되는 것을 알 수 있는데, 비저항의 경우 ITO-Ag 샘플 보다 ITO 샘플이 더욱 큰 향상을 나타내었다. 이러한 결과는 열처리 과정에서 일어나는 ITO의 결정화, 산소공공의 형성 등을 Ag가 방해하기 때문으로 사료된다. 하지만 투과도의 경우 Ag가 금속임에도 불구하고 박막을 형성하지 않을 정도로 매우 얇게 증착 되었기 때문에 열처리 이후 투과도가 향상되어 ITO와 ITO-Ag 샘플 모두 비슷한 향상을 나타내었다고 사료된다. 즉, embedded된 Ag는 열처리에 의해 전기적으로는 나쁜 영향을 주지만, as-deposit 상태에서는 순수 ITO 보다 좋은 전기적 특성을 나타냄을 알 수 있었으며, 이러한 결과는 유기물 반도체 소자에 적용 가능 할 것으로 사료된다.

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Preparation and Application of ITO Hollow Spheres (Hollow ITO 제조법 및 응용)

  • Im, Jung-Sup;Hwang, Byung-Woo;Jung, Dong-Woon
    • Journal of the Korean Chemical Society
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    • v.56 no.1
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    • pp.102-107
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    • 2012
  • Hollow ITO powders were prepared by using polystyrene powders as a template. The specific gravity of the prepared hollow ITO powders was less than half compared with that of normal ITO spheres. As a result, the mismatch between the specific gravity of ITO and that of polymer solution was reduced. When the prepared hollow ITO powders and the polymer solutions are mixed, some portion of the hollow particles were collapsed and generated lots of small fragments. Thousands of the broken fragments from hollow ITO powders caused the increased contact area between particles and finally resulted in the higher electrical conductivity for the coating solution made of the prepared hollow ITO powders and the polymer solution.