• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.288-295
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• 2009

We report the etch characteristics of GaAs and AlGaAs in the diffusion pump-based capacitively coupled $BCl_3$ plasma. Process variables were chamber pressure ($50{\sim}180$ mTorr), CCP power ($50{\sim}200\;W$) and $BCl_3$ gas flow rate ($2.5{\sim}10$ sccm). Surface profilometry was used for etch rate and surface roughness measurement after etching. Scanning electron microscopy was used to analyze the etched sidewall and surface morphology. Optical emission spectroscopy was used in order to characterize the emission peaks of the $BCl_3$ plasma during etching. We have achieved $0.25{\mu}m$/min of GaAs etch rate with only 5 sccm $BCl_3$ flow rate when the chamber pressure was in the range of 50{\sim}130 mTorr. The etch rates of AlGaAs were a little lower than those of GaAs at the conditions. However, the etch rates of GaAs and AlGaAs decreased significantly when the chamber pressure increased to 180 mTorr. GaAs and AlGaAs were not etched with 50 W CCP power. With $100{\sim}200\;W$ CCP power, etch rates of the materials increased over $0.3{\mu}m$/min. It was found that the etch rates of GaAs and AlGaAs were not always proportional to the increase of CCP power. We also found the interesting result that AlGaAs did not etched at 2.5 sccm $BCl_3$ flow rate at 75 mTorr and 100 W CCP power even though it was etched fast like GaAs with more $BCl_3$ gas flow rates. By contrast, GaAs was etched at ${{\sim}}0.3{\mu}m$/min at the 2.5 sccm $BCl_3$ flow rate condition. A broad molecular peak was noticed in the range of $500{\sim}700\;mm$ wavelength during the $BCl_3$ plasma etching. SEM photos showed that 10 sccm $BCl_3$ plama produced more undercutting on GaAs sidewall than 5 sccm $BCl_3$ plasma.

• Journal of the Korean Applied Science and Technology
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• v.36 no.2
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• pp.434-447
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• 2019

Polyethylene glycol (PEG) is widely used in cosmetics as a surfactant, detergent and emulsifier. During the manufacturing process, 1,4-dioxane, which is toxic to humans, can be produced as a by-product by dimerization of ethylene oxide. As consumers' interest in cosmetic ingredients has increased, the need for safe emulsion research without PEG ingredients in the personal care market has increased. With increasing consumer interest in cosmetic ingredients, the need for safer emulsion research without the PEG ingredient in the personal care market has increased. In this study, we aimed to develop and stabilize nanoemulsion formulation without PEG. Response Surface Methodology (RSM) was used to develop optimized nanoemulsion formulations. Surfactant content (2~4%), oil content (4~8%) and polyol content (12~24%) were set as independent variables as a result of preliminary experiments for determining independent variables and ranges. The particle size, zeta potential, turbidity, and polydispersity index of the formulation were measured as response variables. As a result of measurement of the prepared nanoemulsion by FIB (Focused ion beam), spherical particles were found to have a size distribution of 100 to 200 nm. The stability of each formulation was evaluated for 30 days at each temperature ($4^{\circ}C$, $25^{\circ}C$, and $45^{\circ}C$). The optimal formulation considering the optimum particle size, turbidity, polydispersity index and zeta potential was found to be surfactant (2%), oil (8%) and polyol (24%).

• Proceedings of the KWS Conference
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• 1995.10a
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• pp.3-20
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• 1995

Development of Real-Time Quality Evaluation of Friction Welding by Acousitc Emission : Report 1 ABSTRACT : According as the friction welding has been increasingly applied in manufacturing various machine components because of its significant economic and technical advantages, one of the important concerns is the reliable quality monitoring method for a good weld quality with both joint strength and toughness in the process of its production. However no reliable nondestructive test method is available at present to determine the weld quality particularly in process of production. So this paper presents an experimental examination and quantitative analysis for the real-time evaluation of friction weld quality by acoustic emission, as a new approach which attempts finally to develop an on-line quality monitoring system design for friction welds using AE techniques. As one of the important results, it was confirmed, through this study, that AE techniques can be reliably applied to evaluating the friction weld qualify with 100% joint strength, as the cumulative AE counts occurring during welding period were quantitatively correlated with reliability at 95% confidence level to the joint strength of welds. Real-Time Evaluation of Automatic Production Quality Control for Friction Welding Machine : Report 2 Abstract : Both in-process quality control and high reliability of the weld is one of the major concerns in applying friction welding to the economical and qualified mass-production. No reliable nondestructive monitoring method is available at present to determine the real-time evaluation of automatic production quality control for friction welding machine. This paper, so that, presents the experimental examinations and statistical quantitative analysis of the correlation between the initial cumulative counts of acoustic emission(AE) occurring during plastic deformation period of the welding and the tensile strength of the welded joints as well as the various welding variables, as a new approach which attempts finally to develop an on-line (or real-time) quality monitoring system and a program for the process of real-time friction welding quality evaluation by initial AE cumulative counts. As one of the important results, it was well confirmed that the initial AE cumulative counts were quantitatively and cubically correlated with reliability of 95% confidence level to the joint strength of the welds, bar-to-bar (SCM4 to SUM31, SCM4 to SUM24L) and that an AE technique using initial AE counts can be reliably applied to real-time strength evaluation of the welded joints, and that such a program of the system was well developed resulting in practical possibility of real-time quality control more than 100% joint efficiency showing good weld with no micro-structural defects.

• Journal of the Society of Naval Architects of Korea
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• v.48 no.6
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• pp.528-538
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• 2011

As a forming method for curved hull plates more efficient than the flame bending, mechanical bending using multi point press forming and die-less forming is discussed in this paper. the mechanical forming is a flexible manufacturing system for automatically forming of hull parts. It is especially suited to varied curved parts. This paper discusses a multiple point pressing machine composed of a pair of reconfigurable punches in order to achieve the rapid forming of curved hull plates using division forming and presents how forming information is obtained from the given design surface. Although the mechanical forming can be efficient in the metal forming, spring back after pressing is a phenomenon which must be carefully considered when quantifying the process variables. If the spring back is not accurately controlled, the fabricated shell plate cannot meet assembly tolerance. This paper describes the principles to calculate the proper stroke of each punch at the divided areas. the strokes are determined by an iterative process of sequential pressing and spring back compensation from an unfolded flat shape to its given design surface. FEA(finite element analysis) is used to simulate the spring back of the plate and the IDA(iterative displacement adjustment) method adjusts the offset of pressing punches from the deformation results and the design surface. The shape deviations of two surfaces due to spring back are compensated by integrated system using FEA and IDA method. For the practical application, It is aimed to develop an integrated system that can automatically perform the compensation process and calculate strokes of punches of the double sides' reconfigurable multiple-press machine and some experimental results obtained with mechanical bending are presented.

• Clean Technology
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• v.29 no.4
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• pp.255-261
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• 2023

Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

• Journal of Dairy Science and Biotechnology
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• v.36 no.3
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• pp.164-170
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• 2018

The objectives of this study were to manufacture casein phosphopeptide (CPP)/chitosan oligosaccharide (CSO) nanocomplexes and to investigate the impacts of manufacturing variables, such as CPP concentration and pH, on their morphological and physicochemical characteristics. Transmission electron microscopy (TEM) and particle size analysis were used to assess the morphological and physicochemical properties of the CPP/CSO nano-complexes, respectively. Based on the images obtained by TEM, the spherical shapes of the CPP/CSO nanocomplexes ranged from 50 to 150 nm. As the concentration of CPP was increased and the pH was decreased, the average particle size of the nanocomplexes significantly (p<0.05) increased. The CPP/CSO nanocomplexes had a highly uniform distribution with a polydispersity index value of less than 0.3. In addition, they had a negative surface charge with a zeta-potential value between -17 and -26 mV. The CPP/CSO nanocomplexes showed good stability during the freeze-drying process. In conclusion, CPP/CSO nanocomplexes were successfully manufactured, and the CPP concentration and pH were found to be key factors that affected their morphological and physicochemical properties.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.8
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• pp.1195-1208
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• 1997

Bellows is a component in piping systems which absorbs mechanical deformation with flexibility. Its geometry is an axial symmetric shell which consists of two toroidal shells and one annular plate or conical shell. In order to analyze bellows, this study presents the finite element analysis using a conical frustum shell element. A finite element analysis is developed to analyze various bellows. The validity of the developed program is verified by the experimental results for axial and lateral stiffness. The formula for calculating the natural frequency of bellows is made by the simple beam theory. The formula for fatigue life is also derived by experiments. The shape optimal design problem is formulated using multiple objective optimization. The multiple objective functions are transformed to a scalar function by weighting factors. The stiffness, strength and specified stiffness are considered as the multiple objective function. The formulation has inequality constraints imposed on the fatigue limit, the natural frequencies, and the manufacturing conditions. Geometric parameters of bellows are the design variables. The recursive quadratic programming algorithm is selected to solve the problem. The results are compared to existing bellows, and the characteristics of bellows is investigated through optimal design process. The optimized shape of bellows is expected to give quite a good guideline to practical design.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.3
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• pp.309-316
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• 2011

Canoes are usually made from wood or FRP. However, today environment-friendly materials are preferred, and hulls made of FRP are prohibited in some countries. Polyethylene can be recycled and so is suitable for synthetic canoe construction. We used 3D Boat-Design to determine the hydrostatic properties of the canoe. Flow-structure coupled analysis was performed using ANSYS Workbench R12.1. The hull pressure and passenger weight were considered as canoe loading factors. The key parameters for the canoe are the design variables. The constraints are as follows: (1) The maximum stress must not exceed 50% of the polyethylene yield stress; and (2) the canoe weight must not exceed 50 kg. The optimal structural conditions were obtained by the response optimization process. The components of the canoe hull were manufactured from polyethylene pipes and joined by thermal fusion methods. Tests showed that the polyethylene canoe had better performance than existing canoes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1643-1646
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• 2003

Drawing is a mechanical operation that attenuates thick material to an appropriate thickness for the next processing or end usage. When the input material has the form of a bundle or bundles made of very thin and long shaped wire or fibers, this attenuation operation is called "bundle drawing" or "drafting" Drafting is being used widely in manufacturing staple yarns. which is indispensable for the textile industry. However, the bundle processed by this operation undertake more or less defects in the evenness of linear density. Such irregularities cause many problems not only for the product quality but also for the efficiency of the next successive processes. Since long there have been many researches tying to find out factors affecting the irregularity of linear desity, to obtain optimal drafting conditions, to develop efficient measuring and analysis methods of linear density of bundle, etc., but there exists yet no fundamental equation describing the dynamic behavior of the flowing bundle during processing. In this research a mathematical model for the dynamic behavior of the bundle fluid is to be set up on the basis of general physical lows representing physical variables, i.e. linear density and velocity as the dynamic state of bundle. The conservation of mass and momentum balance was applied to the fluid field of bundle. while the movement of′ individual material was taken into account. The constitutive model relating the surface force and the deformation of bundle was introduced by considering a representative prodedure that stands for the bundle movement. Then a fundamental equations system could be simplified considering a steady state of the process. On the basis of the simplified model, the simulation was performed and the results could be confirmed by the experiments under various conditions.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.40 no.4
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• pp.29-37
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• 2017

This papers focuses on remanufacturing processes in a closed loop supply chain. The remanufacturing processes is considered as one of the effective strategies for enterprises' sustainability. For this reason, a lot of companies have attempted to apply remanufacturing related methods to their manufacturing processes. While many research studies focused on the return rate for remanufacturing parts as a control parameter, the relationship with demand certainties has been studied less comparatively. This paper considers a closed loop supply chain environment with remanufacturing processes, where highly fluctuating demands are embedded. While other research studies capture uncertainties using probability theories, highly fluctuating demands are modeled using a fuzzy logic based ambiguity based modeling framework. The previous studies on the remanufacturing have been limited in solving the actual supply chain management situation and issues by analyzing the various situations and variables constituting the supply chain model in a linear relationship. In order to overcome these limitations, this papers considers that the relationship between price and demand is nonlinear. In order to interpret the relationship between demand and price, a new price elasticity of demand is modeled using a fuzzy based nonlinear function and analyzed. This papers contributes to setup and to provide an effective price strategy reflecting highly demand uncertainties in the closed loop supply chain management with remanufacturing processes. Also, this papers present various procedures and analytical methods for constructing accurate parameter and membership functions that deal with extended uncertainty through fuzzy logic system based modeling rather than existing probability distribution based uncertainty modeling.