• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.219-219
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• 2008

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for ubiquitous sensor networks (USN). There are several power generating methods such as thermal gradients, solar cell, energy produced by human action, mechanical vibration energy, and so on. Most of all, mechanical vibration is easily accessible and has no limitation of weather and environment of outdoor or indoor. In particular, the piezoelectric energy harvesting from ambient vibration sources has attracted attention because it has a relative high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system hassome drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure. In this case, the energy harvester has a lower natural frequency under 200 Hz than a normal cantilever structure. Moreover, it has higher an energy conversion efficient because shear mode ($d_{15}$) is much larger than 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate as a standalone power generator for USN.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.36 no.2
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• pp.75-84
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• 2018

The purpose of this study is that the low-cost mobile mapping system using INS (Inertial Navigation System) based on MEMS (Micro Electro Mechanical System) could decipher the interpretation of road facility with the accuracy of x, y 0.546m plane error. Even though the MMS (Mobile Mapping System) technology as a new measurement technology has been used vividly to set up geographic information by some world leading surveying equipment manufacturers, the domestic technology is still in its beginning stage. Several domestic institutes and companies tried to catch up the leading technology but they just produced prototypes which needs more stabilization. Through this thesis, we developed low-cost mobile mapping system installed with INS based on MEMS after time synchronizing sensors for MMS such as LiDAR (Light Detection And Ranging), CCD (Charge Coupled Device), GPS/INS (Global Positioning System / Inertial Navigation System) and DMI (Distance Measurement Instrument).

• Journal of the Korean GEO-environmental Society
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• v.14 no.4
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• pp.47-52
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• 2013

In Korea, the number of mining operations are getting smaller. But buried accidents are on the increase every year. For this reason, it is important to safety management in construction process, especially the worker's safety. In the field of construction needs utilization of integration system according to purpose of utilization, particularly in underground construction sites utilizing is emphasized even more. The current element technologies of location tracking, sensors and wireless communication possible to utilize but it is still difficult to utilization of integration system in construction field because a study is not complete on commercialization and availability. In this study, for real time 3-dimensional management of ubiquitous construction site in ground and underground, measure data using MEMS sensor, EDM and DGPS in 2 test site. Also results were analysed by MATLAB. As a result, error is verification less than 3 meter that possible to distinguish with the naked eye and construct direction of study based on result of former.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.104-109
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• 2021

Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.10 no.2
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• pp.151-157
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• 2010

Rapid technological advances in the area of micro electro-mechanical systems (MEMS) have spurred the development of small inexpensive sensors capable of intelligent sensing. A significant amount of research has been done in the area of connecting large numbers of these sensors to create robust and scalable Wireless Sensor Networks (WSNs). The resource scarcity, ad-hoc deployment, and immense scale of WSNs make secure communication a particularly challenging problem. Since the primary consideration for sensor networks is energy efficiency, security schemes must balance their security features against the communication and computational overhead required to implement them. In this paper, we combine location information and probability to create a new security aware multipath geographic routing protocol. The implemented result in network simulator (ns-2) showed that our protocol has a better performance under attacks.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.3
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• Journal of Sensor Science and Technology
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• v.32 no.4
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• pp.207-212
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• 2023

H₂S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H₂S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H₂S sensor with a high response and fast response time, consisting of a sensing material (SnO₂), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H₂S sensor with a micro-heater (circular type) has excellent H₂S detection performance at low H₂S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H₂S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

• Korean Journal of Materials Research
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• v.34 no.5
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.41 no.5
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• pp.513-522
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• 2021

A smartphone (SMP) includes a MEMS sensor that can record 3-components motions and has a wireless network device to transmit data in live. These features and relatively low maintenance costs are the advantage of using SMPs as an auxiliary seismic observation network. Currently, 279 SMPs are monitoring seismic motions. In this study, we compare the SMP records with the seismic station (SS) records to validate SMP records. The data used for comparison are records for five earthquakes that occurred in 2019, which are 321 SS data recorded by the Korea Meteorological Administration and the Korea Institute of Geoscience and Mineral Resources and 145 recorded by SMPs. The analysis shows that the event-term corrected average residual of the SMP MEMS sensor records is 0.59 which indicating that the peak horizontal acceleration by SMP is 1.8 factor bigger than the peak ground acceleration by SS. In addition, the residuals tend to decrease as the installation floor of the smartphone MEMS sensor increases, which is the similar trend with response spectra from SS.