Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of a MEMS-based H2S Sensor with a High Detection Performance and Fast Response Time

  • Dong Geon Jung (Advanced Mechatronics R&D Group, Korea Institute of Industrial Technology (KITECH)) ;
  • Junyeop Lee (Advanced Mechatronics R&D Group, Korea Institute of Industrial Technology (KITECH)) ;
  • Dong Hyuk Jung (Advanced Mechatronics R&D Group, Korea Institute of Industrial Technology (KITECH)) ;
  • Won Oh Lee (S-Package Solution CO., Ltd) ;
  • Byeong Seo Park (S-Package Solution CO., Ltd) ;
  • Daewoong Jung (Advanced Mechatronics R&D Group, Korea Institute of Industrial Technology (KITECH))
  • Received : 2023.07.03
  • Accepted : 2023.07.23
  • Published : 2023.07.31
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Abstract

H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

Keywords

Acknowledgement

This work was supported by the Technology Development Program (S3177927), funded by the Ministry of SMEs Startups (MSS), Korea. This study has been conducted with the support of the Korea Institute of Industrial Technology as "Technical support project for research and development of manufacture to improve core components of eco-mobility" (Kitech JF-23-0007). This work was supported by the Korea Innovation Foundation (INNOPOLIS) grant funded by the Korea government(MSIT) (2020-DD-UP-0348).

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