Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Design and Fabrication of Implantable LC Resonant Blood Pressure Sensor

인체 삽입용 LC 공진형 혈압 센서 디자인 및 제작

  • Kim, Jin-Tae (Department of electronics and control Engineering, Hanbat National University) ;
  • Kim, Sung Il (Department of electronics and control Engineering, Hanbat National University) ;
  • Joung, Yeun-Ho (Department of electronics and control Engineering, Hanbat National University)
  • 김진태 (국립한밭대학교 전자제어공학과) ;
  • 김성일 (국립한밭대학교 전자제어공학과) ;
  • 정연호 (국립한밭대학교 전자제어공학과)
  • Received : 2012.11.22
  • Accepted : 2013.01.21
  • Published : 2013.03.01
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Abstract

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

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References

  1. E. Y. Chow, A. L. Chlebowski, S. chakraborty, W. J. Chappell, and P. P. Irazoqui, IEEE Trans. Biomed. Eng., 57, 1487 (2010). https://doi.org/10.1109/TBME.2010.2041058
  2. H. Fassbender, W. Mokwa, U. Urban, T. Schmitz-Rode, M. Gortz, K. Trieu, T. Gottssche, and P. Osypka, Proc. IEEE Sensors, 1226 (2008).
  3. P. Cong, D. J. Young, and W. H. Ko, Proc. IEEE Sensors, 1359 (2004).
  4. P. Cong, D. J. Young, B. Hoit, and W. H. Ko, Annual Int. Conf. IEEE Eng. Med. Biol.-Proc., 1854 (2006).
  5. Thesis: M. A. Fonseca, Polymer/Ceamic Wireless MEMS Pressure Sensors for Harsh Environment, (Georgia Institute of Technology, Atlanta, 2007).
  6. K. H. Shin, C. Y. Moon, T. H. Lee, C. H. Lim, and Y. J. Kim, Proc. IEEE Sensors, 844 (2004).
  7. W.S. Choi, J,T. Kim, and Y. H. Joung, J. KIEEME. 25, 445, (2012).
  8. Y. J. Loh, M. Nakao, W. D. Tan, C. H. Lim, Y. S. Tan, and Y. L. Chua, Asian Cardiovasc. Thorac. Ann., 15, 324 (2007). https://doi.org/10.1177/021849230701500412
  9. F. E. Terman, Radio Engineers' Handbook (McGraw-Hill, New York, 1943)
  10. T. H. Lee, The Design of CMOS Radio-Frequency Integrated Circuits, 2nd ed. (Cambridge Univ. Press, New York, 2004)
  11. W. B. Kuhn and N.M. Ibrahim, IEEE Trans. Micorw. Theory Tech., 50, 31 (2001).