• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.35 no.7
• /
• pp.791-798
• /
• 2011

All mechanical-system parameters have uncertainty, and this uncertainty directly affects system performances and results in a decrease in the manufacturing outputs. In particular, since the size of a MEMS system is extremely small, the manufacturing tolerances of a MEMS system are relatively large when compared to the tolerances of a macro-scale system. High manufacturing tolerances result from an increase in the uncertainty of the system parameters, thereby affecting the performances and manufacturing yields. In this paper, the performance uncertainty of a MEMS accelerometer due to system parameter uncertainty is analyzed by using several uncertainty analysis methods. Finally, the performance distributions and manufacturing yields of the MEMS accelerometer are predicted.

• Structural Engineering and Mechanics
• /
• v.30 no.2
• /
• pp.191-209
• /
• 2008

A structural monitoring system based on cheap and wireless monitoring system is investigated in this paper. Due to low-cost and low power consumption, micro-electro-mechanical system (MEMS) is suitable for wireless monitoring and the use of MEMS and wireless communication can reduce system cost and simplify the installation for structural health monitoring. For system identification using wireless MEMS, a finite element (FE) model updating method through correlation with the initial analytical model of the structure to the measured one is used. The system identification using wireless MEMS is evaluated experimentally using a three storey frame model. Identification results are compared to ones using data measured from traditional accelerometers and results indicate that the system identification using wireless MEMS estimates system parameters with reasonable accuracy. Another smart sensor considered in this paper for structural health monitoring is Lead Zirconate Titanate (PZT) which is a type of piezoelectric material. PZT patches have been applied for the health monitoring of structures owing to their simultaneous sensing/actuating capability. In this paper, the system identification for building structures by using PZT patches functioning as sensor only is presented. The FE model updating method is applied with the experimental data obtained using PZT patches, and the results are compared to ones obtained using wireless MEMS system. Results indicate that sensing by PZT patches yields reliable system identification results even though limited information is available.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.18 no.4
• /
• pp.458-464
• /
• 2008

The structural health monitoring has been gaining more importance in civil engineering areas such as earthquake and wind engineering. The use of health monitoring system can also provide tools for the validation of structural analytical model. However, only few structures such as historical buildings and some important long bridges have been instrumented with structural monitoring system due to high cost of installation, long and complicated installation of system wires. In this paper, the structural monitoring system based on cheap and wireless monitoring system is investigated. The use of advanced technology of micro-electro-mechanical system(MEMS) and wireless communication can reduce system cost and simplify the installation. Further the application of wireless MEMS system can provide enhanced system functionality and due to low noise densities. Identification results are compared to ones using data measured from traditional accelerometers and results indicate that the system identification using wireless MEMS system estimates system parameters accurately.

• Journal of Korea Society of Digital Industry and Information Management
• /
• v.18 no.4
• /
• pp.47-54
• /
• 2022

In this paper, MEMS embedded system design implemented the sensor events via analyzing the characteristics that dynamically happened to an abnormal status in power IoT environments in order to guarantee a maintainable operation. We used three kinds of tools in this paper, at first Bluetooth Low Energy (BLE) technology which is a suitable protocol that provides a low data rate, low power consumption, and low-cost sensor applications. Secondly LSM6DSOX, a system-in-module containing a 3-axis digital accelerometer and gyroscope with low-power features for optimal motion. Thirdly BM1422AGMV Digital Magnetometer IC, a 3-axis magnetic sensor with an I2C interface and a magnetic measurable range of ±120 uT, which incorporates magneto-impedance elements to detect the magnetic field when the current flowed in the power devices. The proposed MEMS system was developed based on an nRF5340 System on Chip (SoC), previously compared to the standalone embedded system without bluetooth technology via mobile App. And also, MEMS embedded system with BLE 5.0 technology broadcasted the MEMS system status to Android mobile server. The experiment results enhanced the performance of MEMS system design by combination of sensors, BLE technology and mobile application.

• KEPCO Journal on Electric Power and Energy
• /
• v.6 no.4
• /
• pp.405-411
• /
• 2020

In this paper, we designed the COS MEMS system for sensing the falling detection and explosive noise of fuse link in COS (Cut Out Switch) installing on the power distribution. This system analyzed the failure characteristics and an instantaneous breakdown of power distribution. Therefore, our system strengths the industrial competence and guaranties the stable power supply. In this paper, we applied BLE (Bluetooth Low Energy) technology which is suitable protocol for low data rate, low power consumption and low-cost sensor applications. We experimented with LSM6DSOX which is system-in-module featuring 3 axis digital accelerometer and gyroscope boosting in high-performance mode and enabling always-on low-power features for an optimal motion for the COS fuse holder. Also, we used the MP34DT05-A for gathering an ultra-compact, low power, omnidirectional, digital MEMS microphone built with a capacitive sensing element and an IC interface. The proposed COS MEMS system is developed based on nRF52 SoC (System on Chip), and contained a 3-axis digital accelerometer, a digital microphone, and a SD card. In this paper of experiment steps, we analyzed the performance of COS MEMS system with gathering the accelerometer raw data and the PDM (Pulse Data Modulation) data of MEMS microphone for broadcasting the failure of COS status.

• Progress in Medical Physics
• /
• v.24 no.1
• /
• pp.61-67
• /
• 2013

In this study, we developed and evaluated the patient respiration training method which can help to avoid the problems for the limitation of RGRT applicable patient cases. By using the MEMS (micro-electro-mechanical-system) acceleration sensor, we measured movement of motion phantom. We had compared the response of MEMS with commercially introduced real time patient monitoring (RPM) system. We measured the response of the MEMS with 1 dimensional motion phantom movement for 2.5, 3.0, 3.5 second of period and the 2.0, 3.0, 4.0 cm of the amplitudes. The measured period error of the MEMS system was 0.6~6.0% compared with measured period using RPM system. We found that the shape of MEMS signals were similar with RPM system. From this study, we found the possibility of MEMS as patient training system.

• Journal of the Microelectronics and Packaging Society
• /
• v.24 no.4
• /
• pp.9-17
• /
• 2017

In these days, MEMS (micro-electro-mechanical system) devices become the crucial sensor components in mobile devices, automobiles and several electronic consumer products. For MEMS devices, the packaging determines the performance, reliability, long-term stability and the total cost of the MEMS devices. Therefore, the packaging technology becomes a key issue for successful commercialization of MEMS devices. As the IoT and wearable devices are emerged as a future technology, the importance of the MEMS sensor keeps increasing. However, MEMS devices should meet several requirements such as ultra-miniaturization, low-power, low-cost as well as high performances and reliability. To meet those requirements, several innovative technologies are under development such as integration of MEMS and IC chip, TSV(through-silicon-via) technology and CMOS compatible MEMS fabrication. It is clear that MEMS packaging will be key technology in future MEMS. In this paper, we reviewed the recent development trends of the MEMS packaging. In particular, we discussed and reviewed the recent technology trends of the MEMS bonding technology, such as low temperature bonding, eutectic bonding and thermo-compression bonding.

• Journal of Positioning, Navigation, and Timing
• /
• v.3 no.2
• /
• pp.53-62
• /
• 2014

In the guided missile and unmanned vehicle system, the navigation system is one of the most important components. Recently, low-cost effective smart projectiles and guided bomb are being developed using MEMS based navigation system which has high-G, low-cost and small size. In this paper, locally developed MEMS based GPS/INS integrated navigation system will be introduced in comparison with the state of the art of MEMS based navigation system. And technical design and development method is described to satisfy the required performance of GPS receiver, MEMS inertial sensor assembly, navigation computer and software.

• Journal of Sensor Science and Technology
• /
• v.19 no.4
• /
• pp.259-270
• /
• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• Journal of the Semiconductor & Display Technology
• /
• v.22 no.3
• /
• pp.62-66
• /
• 2023

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.