• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.672-676
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• 2004

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.3
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.129-130
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.20 no.3
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• pp.187-193
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• 2003

This paper presents an on-machine measurement method of flatness error fur surface machining processes. There are two kinds of on-machine measurement methods available to measure flatness errors in workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are often engaged in both methods. This paper proposes an idea to realize a measurement system of flatness errors and its rigorous application for estimation of motion errors of the positioning system. The measurement system is made by modifying the straightness measurement system, which consists of a laser, a CCD camera and processing system, a sensor head, and some optical units. The sensor head is composed of a retroreflector, a ball and ball socket, a linear motion guide unit and adjustable arms. The experimental .results show that the proposed method is useful to identify flatness errors of machined workpieces as well as motion errors of positioning systems.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.305-311
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• 1993

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan,Circular Test Method by Knapp and r $_{- \theta}$ Mathod by Tsutsumi etc., but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units. In this paper, in use of magnetic type linear scale with resolution of 0.5 .mu. m and tick pulses come out from computer, it has become possible for detecting of linear displacement of radial errors and measuring of revolution angle of circular motion of NC machine tools.

• Journal of Drive and Control
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• v.20 no.4
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• pp.133-139
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• 2023

A weighing system calculates the bucket's excavation amount of an excavator. Usually, the excavation amount is computed by the excavator's motion equations with sensing data. But these motion equations have computing errors that are induced by assumptions to the linear systems and identification of the equation's parameters. To reduce computing errors, some commercial weighing system incorporates particular motion into the excavation process. This study introduces a linear regression model on an artificial neural network that has fewer predicted errors and doesn't need a particular pose during an excavation. Time serial data were gathered from a 30tons excavator's loading test. Then these data were preprocessed to be adjusted by MPL (Multi Layer Perceptron) or CNN (Convolutional Neural Network) based linear regression models. Each model was trained by changing hyperparameter such as layer or node numbers, drop-out rate, and kernel size. Finally ID-CNN-based linear regression model was selected.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.62-69
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• 2002

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, corrective machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysis method proposed in the previous paper. These processes can be iterated until the analized motion errors are satisfied with target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail, after corrective machining, are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm is effective to acquire the corrective machining information to improve the accuracy of hydrostatic table.

• 연구논문집
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• s.34
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.