Measurement of 5 DOF Motion Errors in the Ultra Precision Feed Tables for Error Compensation

오차보정을 위한 초정밀 테이블의 5 자유도 운동오차 측정

  • 오윤진 (한국기계연구원 공작기계그룹) ;
  • 박천홍 (한국기계연구원 공작기계그룹) ;
  • 이득우 (부산대학교 나노과학기술학부)
  • Published : 2004.10.01

Abstract

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

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