• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.189-191
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• 1994

YBCO bulks for levitation have fabricated using MPMG method. The superconducting properties and repulsive/attractive force against permanent magnet were investigated for the specimens annealed at various periods after MPMG. A linear induction motor type levitation - traveling vehicle using the pinning force of MPMG processed YBCO bulk has fabricated. The floating or hanging small vehicle mounted with two YBCO pellets was confirmed to travel stabley on the Nd-Fe-B permanent magnet track. The traveling speed of the vehicle was confirmed to depend on AC frequency linearly. At 200 Hz, the travel ins speed was found to be 110 cm/sec.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.

• The Transactions of the Korean Institute of Power Electronics
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• v.13 no.1
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• pp.41-45
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• 2008

This paper deals with the estimation method on the initial pole position of a z-axis permanent magnet linear synchronous motor(PMLSM) without magnetic pole sensors such as Hall sensors. The proposed method takes account of the gravitational force at z-axis and also the load conditions. The algorithm consists of two steps. The first step is to approximately estimate the initial q-axis by monitoring the movements due to the test current at predefined different test q-axes. The second step is to estimate the real q-axis as accurately as possible by using the outputs corresponding to torques due to the test current at three different test q-axes in order to avoid the effect of load mass variations. Experimental results on the z-axis PMLSM show good estimation characteristics of the proposed method irrespective of load mass conditions.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.944-949
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• 2017

Recently, the demand of maglev systems in the manufacturing industry for LCD and OLED display panels, which are required to be very clean and possess vacuum systems, has been increasing due to their characteristics such as being non-contact, noise free and eco-friendly. However, it is still a challenge to simultaneously control both the propulsion and levitation for their interactive effect difficult to be exactly measured. In this paper, we proposed a new tuning method for controlling the magnetic levitation force robustly against the levitation disturbance caused by a propulsion system, based on LQ servo optimal control. The disturbance torque of the LSM propulsion system is calculated through FEM analysis in such a way that the LQ servo controller is determined in order to minimize the effect of the disturbance. The robust performance of the proposed LQ servo control method for the in-track type magnetic levitation systems is demonstrated via simulations and experiments.

• Proceedings of the KIEE Conference
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• 2005.07b
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• pp.1192-1194
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• 2005

선형전동기는 일반적으로 회전형 전동기를 잘라 평면에 펼친 다음 회전형 전동기와 같이 구동할 경우 직선운동을 하는 전동기이다. 회전형 전동기에 비해서 효율특성을 다소 떨어지지만 직선운동을 위한 전동기가 필요할 경우에는 많이 사용하고 있는 실정이며 회전형의 경우 고정자와 회전자의 극간격을 유지하기 위해서 축을 중심으로 구동할 수 있게 제작하고 있는 실정이다. 그러나 선형전동기의 경우 정확한 극간경의 유지를 위해서 LM guide를 사용하는 것이 일반적이며 이로 인해서 고정자회 이동자 사이의 정확한 간격을 유지할 수 있게 된다. 또한 자속의 흐름과 이동자의 이동방향에 따라 일반적으로 선형전동기를 구분하는데 자속의 흐름으로 인해 만들어지는 평면과 이동자가 움직이는 방향이 같은 면 상에 있으면 종자속이라고 하고 횡방향으로 놓여질 경우 횡자속 선형전동기라고 부른다. 본 연구에서는 횡자속 선형전동기에서 발생되는 추력특성을 고려하여 선형액추에이터를 설계할 경우 발생되는 추력읜 불균일성에 대한 내용으로 전동기의 추력 특성 파형에 따른 성형 액추에이터의 동특성을 알아보았다. 특히 액추에이터에서 발생되는 공진특성을 기준으로 불때 같은 에너지로 약 2배의 동특성을 얻을 수 있었고 반력은 거의 같은 특성을 얻을 수 있었다.

• Proceedings of the KIEE Conference
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• 2006.04b
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• pp.137-139
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• 2006

단 1차형 영구자석 선형 동기 전통기(PMLSM)는 디텐트력과 단부력에 의한 큰 토크 리플을 갖는 문제점이 있다. 본 논문에서는 영구자석 선형 통기 전동기의 디텐트력을 줄이기 위해 영구자석의 극수와 전기자의 슬롯수의 비를 변경한 새로운 구조의 단 1차형 영구자석 선형 동기 전동기를 제안하였으며, 단부력을 줄이기 위하며 고정자의 길이 조정 및 챔퍼링을 통하여 영구자석 선형 동기 전동기를 설계하였다.

• Proceedings of the KIEE Conference
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• 2006.04b
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• pp.112-114
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• 2006

This paper deals with skew and overhang effects of Permanent Magnet in PMLSM. The detent force and thrust characteristics considering skew and overhang effects of permanent magnet are analyzed by 3D FEM and the results are compared to experimental values

• Proceedings of the KIEE Conference
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• 2006.04b
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• pp.121-123
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• 2006

In this paper, the notch of teeth and skew of permanent magnet are used to reduce the detent force caused by slot-teeth structure. Also, the shape of permanent magnet is optimized to reduce the detent forceowing to flux hannonics components of permanent magnet. As a result, thrust is decrease about 2[%]. But, the distortion ratio of thrust is decreased from 1.04[%] to 0.75[%]. And, the ripple ratio of thrust is decreased from 2.6[%] to 1.65[%].

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.99-104
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• 2004

Micro/meso cutting is getting more important in the fields of precision machining technology. A micro-turning lathe is one of parts to consist the Micro Factory. It accepts stepwise motion actuators that are used for feeding system instead of the conventional mechanism. It is consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the actuators are good enough for high precision motion. The spindle unit is operated with DC motor on the top of the slider. The motion is communicated with miniaturized linear encoder attached on each side of axis. A mono crystal diamond tool is used for cutting tool. This micro-lathe has been made a machining experiment to see the characteristics of micro-machining.