• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.8
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• pp.634-639
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• 2001

We investigated the etching characteristics of chromium films by using Cl$_2$/O$_2$ gas mixtures with electron cyclotron resonance plasma. In order to examine the chemical etch characteristics of Cr films by using Cl$_2$/O$_2$ gas plasma, we obtained the etch rate with various gas mixing ratios. By X-ray photoelectron spectroscopy, the surface reaction on the chromium films during the etch was examined. From narrow scan analyses of Cr, Cl, and O, it was confirmed that a chromium oxychlorie (CrCl$_{x}$O$_{y}$) layer was formed on the surface by the etch using Cl$_2$/O$_2$ gas mixtures. We observed a new characteristic emission line during the etch of chromium films using Cl$_2$/O$_2$ gas mixtures by an optical emission spectroscopy. It was found that the peak intensity of this emission line had a tendency compatible with the etch rate. The origin of this emission line was discussed in detail. At the same time, the etched profile was also examined by scanning electron microscope.e.e.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.547-552
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• 2005

We have fabricated and characterized optical delay lines for optical coherence tomography, which is composed of cylindrical PZT(piezoelectric transducer) and single mode optical fiber. The polarization mode dispersion from the optical delay lines was compensated by the polarization controllers. By applying the duplex optical delay line, we minimized the thermal drift due to optical delay lines and obtained the scan range of 2 times that of a single optical delay line. The OCT system showed resolution of $18.6\pm0.5{\mu}m$, scanning range of 1.68mm, and scanning speed of 360.4mm/s.

• Journal of Korean Port Research
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• v.13 no.2
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• pp.303-312
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• 1999

The automated gate operating system is developed in this paper that controls the information of container at gate in the ACT. This system can be divided into three parts and consists of container identifier recognition car plate recognition container deformation perception. We linked each system and organized efficient gate operating system. To recognize container identifier the preprocess using LSPRD(Line Scan Proper Region Detection)is performed and the identifier is recognized by using neural network MBP When car plate is recognized only car image is extracted by using color information of car and hough transform. In the port of container deformation perception firstly background is removed by using moving window. Secondly edge is detected from the image removed characters on the surface of container deformation perception firstly background is removed by using moving window. Secondly edge is detected from the image removed characters on the surface of container. Thirdly edge is fitted into line segment so that container deformation is perceived. As a results of the experiment with this algorithm superior rate of identifier recognition is shown and the car plate recognition system and container deformation perception that are applied in real-time are developed.

• Journal of the Semiconductor & Display Technology
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• v.11 no.2
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• pp.45-51
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• 2012

Multilayer co-extrusion blown film construction is a popular technique for producing plastic films for various packaging industries. Automated detection of defective films can improve the quality of film production process. In this paper, we propose a film inspection system that can detect and classify film defects robustly. In our system, first, film images are acquired through a high speed line-scan camera under an appropriate lighting system. In order to detect and classify film defects, an inspection algorithm is developed. The algorithm divides the typical film defects into two groups: intensity-based and texture-based. Intensity-based defects are classified based on geometric features. Whereas, to classify texture-based defects, a texture analysis technique based on local binary pattern (LBP) is adopted. Experimental results revealed that our film inspection system is effective in detecting and classifying defects for the multilayer co-extrusion blown film construction line.

• The KIPS Transactions:PartB
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• v.10B no.3
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• pp.305-310
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• 2003

In this paper we deal with the system design and development of the high-speed automatic precision inspection for the defects of bolts. In order to inspect bolts continuously, we used the conveyor system. Also, this conveyor includes the servo motor and encoder to achieve accurate movement. According to encoder signal, line-scan camera captures the line-by-line image of bolts and after one frame is accumulated, various parameters are calculated and inspected by image processing algorithms. Experimental results using the developed facilities are presented to demonstrate the efficiency of the proposed equipment.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2006.04a
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• pp.229-234
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• 2006

On May 31, 2003. Landsat 7 experienced an anomaly causing the Scan Line Corrector(SLC) to stop functioning normally. The SLC-off causes individual scan lines to alternately overlap and then leave large gaps at the edge of the Image. A many scientists with ongoing experience using ETM+ data evaluated the scientific usability and validity of Landsat 7 products containing the SLC anomaly The best reference scene for gap-filling is the other SLC-on Landsat scene that provide same resolution, few changes, and similar data acquisition. But receiving of Landsat imagery is not stable in Korea. So SPOT image can be another alternative solution because it is a steady-state multispectral satellite image as Landsat image. In this study, we filled the SLC-off gap s of 2, 3, 4 bands using SPOT image by a local regression technique, and assigned the optimum spectral value to gaps of 1, 5, 7 bands based on a spectral adjacency. Through this process, we could restore Landsat SLC-off image and evaluated the accuracy of the results.

• Journal of Chest Surgery
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• v.19 no.2
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• pp.188-196
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• 1986

Spirometry and regional function studies using 99m-Technetium were performed preoperatively to predict postoperative pulmonary function change in 34 patients who had various pulmonary resectional procedures at the Department of Thoracic and Cardiovascular Surgery, Seoul National University Hospital. Between two months and fourteen months postoperation all the patients were reinvestigated with spirometry and clinical examination to evaluate their functional respiratory status. The postoperative obtained values, especially forced vital capacity [FVC] and forced expiratory volume in one second [FEV1] among the other parameters were compared with the postoperative predicted values. Estimated values of FVC and FEV1 derived from preoperative spirometry and quantitative perfusion lung scan correlated well with the measured postoperative values. The linear regression line derived from correlation between postoperative estimated[X] and postoperative measured[Y] values of FVC and FEV1 in all patients are as follows; 1. Y=0.76x + 0.39 in correlation of FVC [r=0.91] 2. Y=0.88x + 0.17 in correlation of FEV1 [r=0.96],br> This method of estimation was one of the best methods of predicting postoperative pulmonary function change and valuable in determining the extent of safe resection and postoperative prognosis to a poor risk patient with chronic obstructive lung disease.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.590-595
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• 2004

The shape and size variations of the nanopatterns produced on a positive photoresist using a near-field scanning optical microscope(NSOM) are investigated with respect to the process variables. A cantilever type nanoprobe having a 100nm aperture at the apex of the pyramidal tip is used with the NSOM and a He-Cd laser at a wavelength of 442nm as the illumination source. Patterning characteristics are examined for different laser beam power at the entrance side of the aperture( $P_{in}$ ), scan speed of the piezo stage(V), repeated scanning over the same pattern, and operation modes of the NSOM(DC and AC modes). The pattern size remained almost the same for equal linear energy density. Pattern size decreased for lower laser beam power and greater scan speed, leading to a minimum pattern width of around 50nm at $P_{in}$ =1.2$\mu$W and V=12$\mu$m/. Direct writing of an arbitrary pattern with a line width of about 150nm was demonstrated to verify the feasibility of this technique for nanomask fabrication. Application on high-density data storage using azopolymer is discussed at the end.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.5
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• pp.698-704
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• 2010

The machine vision system has been widely applied at automatic inspection field of the industries. Especially, the machine vision system shows good performance at difficult inspection field by contact method. In this paper, the automatic system of a slant method to inspect screw/bolt shape using machine vision is developed. The inspection system uses pattern matching method that search similar degree of the lucidity, the average lucidity, length and angle of inspection set up area using a circular scan and a line scan method. Also the feeding method for inspection product is the slant method, and feed rate is controlled by the ramp angle adjustment. This inspection system is composed of a feeding device, a transfer device, vision systems, a lighting device and computer, and is composed the sorting discharge system of the inferior product. The performance test carried out the feeding speed, the shape correct degree and the sorting discharge speed according to the type of screw/bolt. This sorting inspection system showed a satisfied test results in whole inspection items. Presently, this sorting inspection system is being used in the manufacturing process of screw/bolt usefully.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.50-55
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• 2007

Stereolithography (SLA) is a technique using a laser beam to cure a photopolymer liquid resin with three-dimensional computer-aided design (CAD) data, The accuracy of the prototype, the build time, and the cured properties of the resins are controlled by the SLA process parameters such as the size of the laser beam, scan velocity, hatch spacing, and layer thickness, In particular, the size of the laser beam is the most important parameter in SLA, This study investigated the curing properties of photopolymers as a function of the laser beam size, The cure width and depth were measured either on a single cure line or at a single cure layer for various hatch spacings and laser beam sizes, The cure depth ranged from 0.23 to 0.34 mm and was directly proportional to the beam radius, whereas the cure width ranged from 0.42 to 1.07 mm and was inversely proportional to the beam radius, The resulting surface roughness ranged from 1.12 to $2.23{\mu}m$ for a ratio of hatch spacing to beam radius in the range 0.5-2.0 at a beam radius of 0.17 mm and a scan velocity of 125 mm/sec.