• 제목/요약/키워드: Laser Ray

검색결과 578건 처리시간 0.031초

고전압 방전 플라즈마에 의한 질화탄소 박막 증착 시 플라즈마 영역에 가한 레이저 애블레이션의 효과 (Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition)

  • 김종일
    • 한국전기전자재료학회논문지
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    • 제15권6호
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    • pp.551-557
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.

고전압 방전 플라즈마에 의한 질화탄소 박막 층착 시 레이저 애블레이션 효과 (Effect of a Laser Ablation for Carbon Nitride Film Deposition)

  • 김종일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.240-243
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

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X-Ray Emission Spectroscopic Analysis for Crystallized Amorphous Silicon Induced by Excimer Laser Annealing

  • John, Young-Min;Kim, Dong-Hwan;Cho, Woon-Jo;Lee, Seok;Kurmaev, E.-Z.
    • Journal of the Optical Society of Korea
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    • 제5권1호
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    • pp.1-4
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    • 2001
  • The results of investigating $SiL_{2,3}$/ X-ray emission valence spectra of amorphous silicon films irradiated by excimer laser are presented. It is found that laser annealing leads to crystallization of amorphous silicon films and the crystallinity increases with the laser energy density from 250 to 400 mJ/$\textrm{cm}^2$. The vertical structure of the film is investigated by changing the accelerating voltage on the X-ray tube, and the chemical and structural state of Si$_3$N$_4$ buffer layer is found not to be changed by the excimer laser treatment.

PAL-XFEL 빔라인 허치 구조물 개발 (The Development of Beamline Hutch Structures at PAL-XFEL)

  • 김승남;김명진;김성한;김영찬;신호철;김지화;김경숙;김광우;엄인태
    • 한국소음진동공학회논문집
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    • 제26권5호
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    • pp.567-577
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    • 2016
  • The hutches which are installed in the beamline are largely classified into two, i.e XPP (X-ray pump probe) and CXI (Coherent X-ray image). Laser room is installed on the hutch and provides laser to XPP and CXI simultaneously. And two hutches have heavy crane to install some optics equipments. Safety and reliability of hutch structures should be taken into account for the precise operating of the laser facilities, so vibration analysis is essential to do this. The main purpose of vibration analysis is to install hutch structures with large stiffness. We have changed materials specification several times to install hutch structures having strong stiffness. Now hutch structures were installed and checked vibration status at laser room and XPP hutch. The results of laser table and robot arm satisfy vibration criteria. This paper explains about the design and vibration analysis of hutch structures.

집속된 광분해 옥소레이저에 의한 플라즈마로부터 방출되는 연속 X-선 스펙트럼 분석과 전자온도 결정 (Analysis of Continuum X-ray Specturum and Determination of Electron Temperature from Iodine Photodissociation Laser produced plasma)

  • 김동환;김남성;이상수
    • 한국광학회:학술대회논문집
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    • 한국광학회 1988년도 광학 및 양자전자학 워크샵
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    • pp.135-144
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    • 1988
  • 1-GW Iodine photodissociation Laser (λ=1.315${\mu}{\textrm}{m}$)is focused to generate the continuum x-ray radiation at titanium(z=22)target. A piced of aluminum(360 )-mylar(8${\mu}{\textrm}{m}$) film is used to isolate the soft X-ray radiation emitted. Convex-xurved mica crystal spectrometer is used to obtain the soft x-ray spectra from the laser titanium target plasma and the slope of continum X-ray spectra are found to show two different different electron effective temperaturres, 0.11keV and 7.1KeV. We compare the two temperature result with the foil absorption method.

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레이저 플라즈마 기반의 생물의료용 연 X-선 현미경 설계 (Conceptual Design of Laser Plasma-based Soft X-ray Microscope system for Biomedical Application)

  • 김경우;윤권하
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.690-693
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    • 2003
  • Soft x-ray microscopy provides a unique set of capabilities in-between those of visible light and electron microscopy. It has long been recognized that nature provides a 'water window' spectral region between the K shell x-ray absorption edges of carbon (~290eV) and oxygen (~540eV), where organic materials show strong absorption and phase contrast, while water is relatively non-absorbing. This enables imaging of hydrated biological specimens that are several microns thick with high intrinsic contrast using x-rays with a wavelength of 2.3~4.4nm. Soft X-ray microscopy is therefore well suited to the study of specimens like single biological cells. The most direct advantage of X-ray microscope is their high spatial resolution when compared with visible light microscopes, combined with an ability to image hydrated specimens that are several microns with a minimum of preparation. Our study describes the conceptual design of soft x-ray microscope system based on a laser-based source for biomedical application with high resolution ($\leq$50nm) and short exposure time ($\leq$30sec).

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X-선 자유전자 레이저를 위한 새로운 과학 (New Science Opportunities with X-Ray Free Electron Laser)

  • 구태영
    • 한국자기학회지
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    • 제21권6호
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    • pp.231-236
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    • 2011
  • X-선 자유전자레이저(XFEL)는 펨토초의 펄스형태, 완벽한 결맞음 및 고휘도 특성으로 X-선 실험과학분야의 새로운 시대를 예고하는 꿈의 X-선 광원장치로 언급되고있다. XFEL에 관한 간략한 소개와 현재 세계적으로 진행되고 있는 XFEL 시설현황을 살펴보고, 대표적인 실험장치를 개념적으로 분류해서 정리해 보고자 한다. 특히 자성연구분야와 관련된 제안 및 연구사례를 간략하게 언급하고, 지금 현재 진행 중인 포항가속기연구소의 XFEL 프로젝트의 개요와 XFEL 활용을 위해서 제안된 대표적인 과학프로그램을 살펴보고자 한다.

4세대 방사광: 엑스선 자유전자레이저 (4th Generation Light Source: X-ray Free Electron Laser)

  • 한장희
    • 진공이야기
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    • 제3권4호
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    • pp.4-7
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    • 2016
  • An X-ray Free Electron laser facility (PAL-XFEL) has been built in Pohang Accelerator Laboratory to provide X-ray FEL radiations for photon users. The machine consists of a 10 GeV normalconducting S-band linear accelerator and two undulator beamlines. The hard and soft X-ray beamlines will provide FEL radiations with wavelengths of 0.6 to 0.1 nm and 4.5 to 1 nm, respectively. Beam commissioning of PAL-XFEL is ongoing and user service will start in 2017. In this report, the PAL-XFEL layout and the working principle are discussed.

UV 레이저를 이용한 폴리이미드 표면 개질에 관한 연구 (Polyimide Surface Modification using UV Laser)

  • 오재용;이정한;박덕수;신보성
    • 한국레이저가공학회지
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    • 제13권3호
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    • pp.13-18
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    • 2010
  • In this paper, polyimide (PI) surface was modified by UV Laser with a low laser fluence and investigated changes of surface geometry and chemical characteristics by SEM (scanning electron microscope), X-ray diffraction (XRD), XPS (x-ray photoelectron spectroscopy) and the measurements of contact angle of water. PI surface was peeled off and modified with microstructure fabrications by photochemical ablation over the laser fluence of 50 mJ/cm2. As laser fluence increased, delamination of PI surface was occurred largely and strongly. In chemical characteristics, the O/C and N/C atomic ratios increased and contact angle decreased from $80^{\circ}$ to $40^{\circ}$.

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High-power Femtosecond Ti:sapphire Laser at 1 KHz with a Long-cavity Femtosecond Oscillator

  • Sung, Jae-Hee;Hong, Kyung-Han;Nam, Chang-Hee
    • Journal of the Optical Society of Korea
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    • 제7권3호
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    • pp.135-138
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    • 2003
  • A chirped-pulse amplification femtosecond Ti:sapphire laser operating at 1 KHz has been developed. The laser system consisted of a long-cavity femtosecond oscillator, a four-pass grating pulse stretcher, two multi-pass amplifiers and a double-pass grating pulse compressor. Thermal lensing at the amplifiers was reduced by cooling Ti:sapphire crystals using Peltier coolers. Gain narrowing and residual phase errors were compensated for by the use of an acousto-optic pulse shaper. The final laser output had an energy per pulse of 2.0 mJ and a pulse duration of 19.5 fs, reaching 0.1 TW at 1 KHz.