• Journal of the Semiconductor & Display Technology
• /
• v.21 no.2
• /
• pp.144-149
• /
• 2022

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C₄F₉OC₂H₅) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.

• Progress in Superconductivity and Cryogenics
• /
• v.9 no.1
• /
• pp.86-90
• /
• 2007

The cryoprobe used in cryosurgery should be fabricated in milimeter-order size for its practical usage. In general a miniature J-T(Joule-Thomson) refrigerator is applied to a cryoprobe. In case of the miniature J-T refrigerator, the mass flow rate of working fluid is small due to considerable friction in a minute flow path. For that reason, the miniature J-T refrigerator has a limited cooling power. To obtain the large cooling power from the J-T refrigerator, the refrigerator should have large mass flow rate and effective J-T temperature drop. These quantities are closely related to the geometry of the heat exchanger and the expansion nozzle in a cryoprobe, and are contradictory. The large mass flow rate leads to the small J-T temperature drop and vice versa in the miniature J-T refrigerator. Therefore, the optimal design of a cryoprobe to achieve maximum cooling power at fixed tube size and fixed operating temperature is required. This paper presents the design procedure of such case.

• Proceedings of the KSME Conference
• /
• 2005.11a
• /
• pp.11.1-11.1
• /
• 2005

• Superconductivity and Cryogenics
• /
• v.9 no.1
• /
• pp.26-30
• /
• 2007

• Progress in Superconductivity and Cryogenics
• /
• v.11 no.1
• /
• pp.55-59
• /
• 2009

Miniature Joule-Thomson refrigerators have been widely used for rapid cooling of infrared detectors, probes of cryosurgery, thermal cameras, missile homing head and guidance system, due to their special features of simple configuration, compact structure and rapid cool-down characteristics. The thermodynamic performance of J-T refrigerator highly depends on the hydraulic and heat transfer characteristics of the recuperative heat exchanger. The typical recuperative heat exchanger of the J-T refrigerator has the double helical tube and fin configuration. In this study, effectiveness-NTU approach was adopted to predict the thermodynamic behaviors of the heat exchanger for the J-T refrigerator. The thermodynamic properties from the REFPROP were used to account the real gas effects of the gas. The results show the effect of the operating conditions on the performance of the heat exchanger and refrigerator for the given heat exchanger. The influences of mass flow rate and the supply pressure on the effectiveness of heat exchanger and the ideal cooling capacity are discussed in details.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.11 no.4
• /
• pp.457-463
• /
• 1999

The Joule-Thomson cryocooler with $H_2$gas has been developed. Cool-down characteristics and the cooling performance of a JT cryocooler have been investigated in detail. The JT cryocooler consists of JT expansion valve, heat exchanger, expansion chamber, compressed $H_2$gas storage tank, $LN_2$precooler, heater and a cryostat. The precooling process using both $GN_2$and $LN_2$was peformed to cool down the inside components of cryocooler under the maximum inversion temperature of $H_2$. The $H_2$expansion experiments have been peformed for 2-5MPa of H$_2$pressure to evaluate steady state temperatures of the cryocooler. It is found that the steady state temperatures are decreased as the H$_2$pressures are increased. The effects of cooling temperatures on the performance have been evaluated for various $H_2$and $N_2$pressures. It is seen that the cooling loads are increased, as the cooling temperature and operating pressure are increased.

• Journal of the Semiconductor & Display Technology
• /
• v.23 no.2
• /
• pp.6-11
• /
• 2024

This paper presents the design and experimental analysis of a cryogenic refrigeration system for -100 ℃, primarily intended for semiconductor etching process. The refrigeration system utilizes non-flammable mixed refrigerant Joule-Thomson refrigeration cycle, incorporating a precooling stage to enhance overall performance. The selected refrigerants for the system include R1234yf for the precooling stage, and Ar, R14, R23 and R218 for the main cooling stage of the Joule-Thomson refrigeration cycle. Design results according to the system constraints and experimental results are discussed, including lowest evaporation temperature, compressor isentropic efficiency and overall pressure tendencies. The achieved refrigerant fraction from optimal design is Ar: R14: R23: R218 = 0.15: 0.4: 0.15: 0.3, indicating COP of 0.1118 at the isentropic compressor efficiency of 50%. The experimental result shows the developed system reaches steady state in approximately 3 hours.

• Progress in Superconductivity and Cryogenics
• /
• v.12 no.4
• /
• pp.41-45
• /
• 2010

Miniature Joule-Thomson refrigerators have been widely used for rapid cooling of infrared detectors, optoelectronic device, and integrated circuits of micro electronics. The typical J-T refrigerator consists of the recuperative heat exchanger with the double helical tube and fin configuration, J-T nozzle, a mandrel, Dewar and a compressed gas storage bottle. In this study, to predict the thermodynamic behaviors of the refrigerator with a compressed gas storage bottle during the cool-down time, numerical study of transient characteristics for a J-T refrigerator was developed. A simplified transient one.dimensional model of the momentum and energy equations was simultaneously solved to consider the thermal interactions of the each component of the refrigerator. To account for effects of the thermal mass of the solid, the heat capacities of the tube, fins, mandrel and Dewar are considered. The results show the charged gas pressure of the gas storage bottle has significant effects on the performance of the J-T refrigerator. At the elevated gas pressure of the gas storage bottle, the large capacity of the compressed gas storage does not need to get the fast cool-down performance of the J-T refrigerator in the cool-down stage.

• 한국초전도학회:학술대회논문집
• /
• 2008.08a
• /
• pp.91-91
• /
• 2008

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.16 no.11
• /
• pp.2196-2202
• /
• 1992

The optimum size combination of heat exchangers in a Joule-Thomson(J-T) circuit for small cryogenic systems has been sought analytically, when the circuit is combined with a two-stage Gifford-McMahon(GM) cooler. Full thermodynamic cycle analysis was carried out to predict the performance of the combined refrigeration system. Relevant convective heat transfer coefficients, the computerized properties of helium, and the refrigeration capacity curve of a typical GM cooler have been used in the analysis. The result showed that, by changing the configuration(heat exchanger area ratio) of the system, the performance of the commonly-used GM/J-T refrigerators could be optimized. For the maximum refrigeration performance, the optimum mass flow rate of the refrigerant and the relative size between the heat exchangers have been obtained, when the cooling load was 0.1W at 3.995K with the total heat exchanger area being given.