• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.456-456
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• 2010

CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.276-276
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• 2010

Localized surface plasmon resonance (LSPR) has been explored recently as a promising approach to increase energy conversion efficiency in photovoltaic devices, particularly for thin film hydrogenated amorphous silicon (a-Si:H) solar cells. The LSPR is frequently excited via an electromagnetic (EM) radiation in proximate metallic nanostructures and its primary con sequences are selective photon extinction and local EM enhancement which gives rise to improved photogeneration of electron-hole (e-h) pairs, and consequently increases photocurrent. In this work, high-dielectric-constant (k) $ZrO_2$ (refractive index n=2.22, dielectric constant $\varepsilon=4.93$ at the wavelength of 550 nm) is proposed as spacing layer to enhance the LSPR for application to the thin film silicon solar cells. Compared to excitation of the LSPR using $SiO_2$ (n=1.46, $\varepsilon=2.13$ at the wavelength of 546.1 nm) spacing layer with Au nanoparticles of the radius of 45nm, that using $ZrO_2$ dielectric shows the advantages of(i) ~2.5 times greater polarizability, (ii) ~3.5 times larger scattering cross-section and ~1.5 times larger absorption cross-section, (iii) 4.5% higher transmission coefficient of the same thickness and (iv) 7.8% greater transmitted electric filed intensity at the same depth. All those results are calculated by Mie theory and Fresnel equations, and simulated by finite-difference time-domain (FDTD) calculations with proper boundary conditions. Red-shifting of the LSPR wavelength using high-k $ZrO_2$ dielectric is also observed according to location of the peak and this is consistent with the other's report. Finally, our experimental results show that variation of short-circuit current density ($J_{sc}$) of the LSPR enhanced a-Si:H solar cell by using the $ZrO_2$ spacing layer is 45.4% higher than that using the $SiO_2$ spacing layer, supporting our calculation and theory.

• Horticultural Science & Technology
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• v.28 no.3
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• pp.476-483
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• 2010

Total bacterial populations were cultured from the Hydroball cultivation media in the rhizospheres of 9 different plants including $Hedera$ $helix$ L. and $Dracaena$ $deremensis$ cv. Warneckii Compacta, etc. These cultured bacterial populations were studied to test if the bacterial populations in the plant growing pots may play a role on removal of volatile organic compounds (VOCs) such as benzene and toluene in the air. To meet this objective, first, we tested the possibility of removal of VOCs by the cultured total bacteria alone. The residual rates of benzene by the inoculation of total bacterial populations from the different plant growth media were significantly different, ranging from 0.741-1.000 of $Spathiphyllum$ $wallisii$ 'Regal', $Pachira$ $aquatica$, $Ficus$ $elastica$, $Dieffenbachia$ sp. 'Marrianne' Hort., $Chamaedorea$ $elegans$, compared to the control with residual rate of 0.596 (LSD, $P$=0.05). This trend was also similar with toluene, depending on different plants. Based on these results, we inoculated the bacterial population cultured from $P.$ $aquatica$ into the plant-growing pots of $P.$ $aquatica$, $F.$ $elastica$, and $S.$ $podophyllum$ inside the chamber followed by the VOCs injection. The inoculated bacteria had significant effect on the removal of benzene and toluene, compared to the removal efficacy by the plants without inoculation, indicating that microbes in the rhizosphere could play a significant role on the removal of VOCs along with plants.

• Journal of Animal Environmental Science
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• v.16 no.3
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• pp.175-180
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• 2010

Many greenhouse gases occur naturally, such as water vapor, carbon dioxide, methane, nitrous oxide, and ozone. Others such as hydrofluorocarbons (HFCs), perfluorocarbons (PFCs), and sulfur hexafluoride ($SF_6$) result exclusively from human industrial processes. Current global warming has been linked to anthropogenic greenhouse gas concentration increases. Methods to quantify greenhouse gas emissions during animal agriculture and the possibility to apply those to circumstance in the world were studied. Various chamber methods with trace gas analyzer (TGA) were used to quantify greenhouse gas emissions from stored manure. Methane fluxes from pails storing liquid swine manure were measured. Methane emissions increased a little with time and mean was 393.2 ${\mu}g\;m^{-2}\;s{-1}$ (standard error : 4 ${\mu}g\;m^{-2}\;s{-1}$).

• Journal of Practical Agriculture & Fisheries Research
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• v.20 no.2
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• pp.89-97
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• 2018

This study was conducted to elucidate the effect of after-ripening of gourd fruits before seed collection. Five varieties of commercial gourd varieties were cultivated and the fruits were picked after 24, 31, 50, and 70 days from pollination. For after-ripening treatments the fruits were placed for five days in a cool, air-circulated place while a number of fruits were placed for longer periods to 85 days including growing period, 24 + 62 days, 31 + 55 days, 50 + 35 days, and 70 + 15 days. The seeds collected from fruits harvested on 24^th day were not emerged at all, but the seeds from after-ripening treatment for 62 days showed 78% emergence or higher. The growth of seedlings showed the effects of after-ripening treatment of the fruits before seed collection; the seeds collected after ripening treatment showed better hypocotyl growth and larger embryo size than the non-treated seeds.

• Journal of Animal Environmental Science
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• v.16 no.2
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• pp.135-142
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• 2010

The composting of layer manure is economical and efficiently process. In this study, the variation of composting characteristics in layer manure was investigated according to air supply capacity. The fermented compost was added in layer manure and mixed with sawdust inside composting reactors. The level of air supply capacity was varied in the range of $50{\sim}200\;{\ell}/m^3/min$. During composting the temperature variations of composting piles was different the temperatures of composting piles for T-1 ($50\;{\ell}/m^3/min$) and T-2 ($100\;{\ell}/m^3/min$) were reached at $40^{\circ}C$ and $50^{\circ}C$ within 2 days, respectively. For T-3 ($150\;{\ell}/m^3/min$) and T-4 ($200\;{\ell}/m^3/min$), their temperatures was $60^{\circ}C$ within same days and maintained during 8 days. Water contents decreased according to the air supply capacity; 8.9%, 15.4%, 18.0% and 18.6% for T-1, T-2, T-3 and T-4. The weight ratios of T-1, T-2, T-3 and T-4 were reduced to 12.8%, 15.6%, 18.1% and 17.9%, respectively. The decreasing volumetric ratios of T-1, T-2, T-3 and T-4 were 18.0%, 21.0%, 22.3% and 22.0%. The oxygen discharge concentrations during composting were 12 ppm for T-1, T-2 and 9 ppm for T-3 and T-4. After composting, fertilizer components such as total nitrogen (TN) and phosphorous pentoxide ($P_2O_5$) were examined at each air supply capacity. Nitrogen contents of the T-1, T-2, T-3 and T-4 were 0.75%, 0.74%, 0.72% and 0.64%. Also, The contents of $P_2O_5$ were 0.35%, 0.40%, 0.38% and 0.42% for T-1, T-2, T-3 and T-4.

• Journal of Korean Society of Forest Science
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• v.99 no.3
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• pp.267-276
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• 2010

This study was performed to obtain basic data about vegetation structure and site environment of rare and endangered plant, viola websteri in five natural habitats. The dominant species of Hongcheon habitat were Pyrus pyrifolia (tree layer), Morus bombycis (subtree layer), Pyrus pyrifolia (shrub layer) and Isodon inflexus (herb layer). Mt. Yeonin habitat were dominated by Quercus mongolica (tree layer), Morus bombycis (subtree layer), Philadelphus schrenckii (shrub layer) and Viola websteri (herb layer). Mt. Yumyung habitat were dominated by Cornus controversa (tree layer), Morus bombycis (subtree layer), Fraxinus rhynchophylla (shrub layer) and Adenocaulon himalaicum (herb layer). Mt. Daebu habitat were dominated by Acer mono (tree layer), Staphylea bumalda (subtree layer), Staphylea bumalda(shrub layer) and Dryopteris crassirhizoma (herb layer). And the dominant species of Mt. Worak habitat were Larix leptolepis (tree layer), Fraxinus rhynchophylla (subtree layer), Alangium platanifolium var. macrophylum (shrub layer) and Adenocaulon himalaicum (herb layer). It was found out that the average acidity of soil pH was 5.23; 0.30ds/m for electron conductivity; 12.6% for organic matter content; 0.68% for total nitrogen; 21.66 ppm for available phosphorous; and 23.45 cmol(+)/kg for CEC. Interchangeable cation was decreased in order of $Ca^{2+}$ > $Mg^{2+}$ > $K^{2+}$. Viola websteri had positive association with Polygonatum odoratum var. pluriflorum and Geranium thunbergii but negative association with Poa sphondylodes. Species diversity index(H'), maximum Species diversity index (H' max), evenness(J') and dominance (1-J'), of investigated sites ranged 0.6816 (Mt. Worak)~0.9656 (Mt. Daebu), 1.0000 (Mt. Yeonin)~1.3010 (Hongcheon, Gangwon), 0.5330 (Mt. Worak)~0.8947 (Mt. Daebu) and 0.1053 (Mt. Daebu)~0.4670 (Mt. Worak) in woody layer and 1.0414 (Mt. Yumyung)~1.3295 (Mt. Worak), 1.4314 (Mt. Yumyung)~1.6435 (Mt. Daebu), 0.6984 (Hongcheon, Gangwon)~0.8356 (Mt. Worak) and 0.1644 (Mt. Worak)~0.3016 (Hongcheon, Gangwon) in herb layer, respectively.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.259-267
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• 2010

The catalytic wet oxidations of the wastewater containing azo dye Reactive Black 5(RB5) with heterogeneous catalyst of CuO have been carried out to investigate the effects of temperature($190{\sim}230^{\circ}C$) and catalyst concentration(0.00~0.20 g/l) on the removals of colour and total organic carbon TOC. The wastewater colour was measured with spectrophotometer, and the oxidation rate was estimated with TOC. About 90% of colour was removed during 120 min in thermal degradation of the RB5 wastewater at $230^{\circ}C$, while TOC was not removed at all. As increasing reaction temperature and catalyst concentration, the removal rates of colour and TOC increased in the catalytic wet oxidations of RB5 wastewater. The effects of catalyst were already considerable even at 0.01 g CuO/l, while the removal rates of colour and TOC increased negligibly with increasing the catalyst concentration above 0.05 g CuO/l. The initial destruction rates of the wastewater colour have shown the first-order kinetics with respect to the wastewater colour. TOC changes during catalytic wet oxidations have been well described with the global model, in which the easily degradable TOC was distinguished from non-degradable TOC of the wastewater. The impacts of reaction temperature on the destruction rate of the wastewater colour and TOC could be described with Arrhenius relationship. Activation energies of the colour removal reaction in thermal degradation, wet oxidation, and catalytic wet oxidation(0.20 g CuO/l) of the RB5 wastewater were 108.4, 78.3 and 74.1 kJ/mol, respectively. The selectivity of wastewater TOC into the non-degradable intermediates relative to the end products in the catalytic wet oxidations of RB5 wastewater was higher compared to that in phenol wet oxidations.

• Journal of Animal Environmental Science
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• v.16 no.3
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• pp.237-244
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• 2010

Using a vertical composting system in layer farms, the composting process was characterized in terms of temperature variation, change of moisture contents, fertilizer ingredient and so on. In this study, two types of layer farms were examined. The layer manure was produced as 3,300 and 116,650 kg/day for Farm A and Farm B, respectively. Also, their average moisture contents were 74.4% (Farm A) and 65.6 % (Farm B). The inside temperature of composting in Farm A was varied in the range of 50 to $70^{\circ}C$, and moisture content of it decreased from 59.5% to 20.6% at the edge of vertical composting system. While in Farm B, composting temperature was fluctuated between 50 and $65^{\circ}C$ and moisture content declined from 34.0% to 13.4% at the end of vertical composting system. The fertilizer ingredients such as T-N, $P_2O_5$ and $K_2O$ were not significantly influenced by seasonal effect. Their values were changed in the range of 0.90% to 0.47% for T-N, 0.16% to 0.42% for $P_2O_5$, and 0.22% to 0.28 for $K_2O$, respectively. Also, OM/N ratio was varied from 36.8 to 84.4.

• Journal of Animal Environmental Science
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• v.16 no.1
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• pp.1-12
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• 2010

This survey was conducted to investigate the status and strategy of swine manure utilization of 109 swine farms in the Gyeongnam, Korea. The personal properties of owner, types of swine buildings, facilities and equipment for manure management, conditions for manure recycling and farming for recycling resources were surveyed. Age of farm owners were occupied as 44.1% for 50s followed by the 60s with one-forth and 40s with 22.9%. Educational background of farm owners, a high school graduate makes up the largest proportion of farm owners followed by a college graduation with 35.8%. The swine manure collection methods were occupied as 34.9% with totally slurry system and more than 50% slurry system with 34.9% of farms. The manure management cost per ton were occupied as more than two-third with 10,000 won~15,000 won. The cost will pay for manure management, 10,000 won~15,000 won per ton makes up the largest proportion of farm owners. Separator, loader and vehicle to collection, transportation of liquid manure were occupied as 72.5%, 44% and 10.1%, respectively. Recognition of the farming for recycling resources were occupied as 37.6%, however, 25.8% of swine farm owners don't know that. More than sixty percent of swine farms will take a recycling system according to the farming for recycling resources. Conclusively, we have a suggestion in order to promotion of the farming for recycling resources in the Gyeongnam with increasing the portion of recycling of swine manure in each county and revitalizing the marketing of the liquid and solid swine manure fertilizers.