• The Journal of the Convergence on Culture Technology
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• v.9 no.1
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• pp.613-618
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• 2023

In this paper, a monitoring program that can automatically determine whether a patient admitted to an isolation room acts out of a stable state through a screen photographed in real time is described. The motion recognition model of this program was built by learning through transfer learning. 900 images were used for the three movements, and this program was developed for the web to support all environments. The model was determined with high accuracy to determine the state of the subject hospitalized in the isolation room, and can be applied by applying it to the existing isolation room monitoring system.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.59-64
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• 2022

Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficient vibration isolation performance in the low frequency band, so an active vibration control system that can overcome these problems is used recently. In this paper, PID controller is used to control the active vibration isolator. Methods for setting the gain of the PID controller include the Zeigler-Nichols method, the pole placement method. These methods have the disadvantage of requiring a lot of time or knowing the system model accurately. This paper proposes the gain auto tuning method of the active vibration isolator applied with the PSO algorithm, which is an optimization algorithm that is easy to implement and has stable convergence performance with low calculations. It is expected that it will be possible to improve vibration isolation performance and reduce the time required for gain tuning by applying the proposed PSO algorithm to the active vibration isolator.

• Bulletin of Food Technology
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• v.19 no.2
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• pp.3-10
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• 2006

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.6
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• pp.23-28
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• 2020

A non-linear vibration isolation system composed of a non-linear spring and a linear damper was presented in a previous study. The advantage of the proposed isolator is the simple structure of the system. When the base of the isolator is harmonically excited, the response component of the mass at the excitation frequency was approximated using three different methods: linear approximation, harmonic balance, and higher-order frequency response functions (FRFs). The method using higher-order FRFs produces significantly more accurate results compared with the other methods. The error between the exact and approximate responses does not increase monotonously with the excitation amplitude and is less than 2%.

• Aerospace Engineering and Technology
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• v.7 no.2
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• pp.95-102
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• 2008

COMS Satellite is automatically able to recover from any defined failure thanks to a full redundancy. This study assesses the effects of gyro failure on the COMS mission and analyzes the mechanism of Gyro Failure Detection, Isolation and Recovery about failure detection means, isolation and recovery actions and their consequences. At last, it checks the FDIR behavior from an injected failure on COMS simulator.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.272-278
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• 2002

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. In this paper, the effect of pattern density, trench width and selectivity of slurry on dishing in STI CMP process was investigated by using specially designed isolation pattern. As trench width increased, the dishing tends to increase. At $20{\mu}m$ pattern size, the dishing was decreased with increasing pattern density Low selectivity slurry shows less dishing at over $160{\mu}m$ trench width, whereas high selectivity slurry shows less dishing at below $160{\mu}m$ trench width.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.25-28
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• 2001

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. Without applying the conventional complex reverse moat process, CMP(Chemical Mechanical Polishing) has established the Process simplification. However, STI-CMP process have various defects such as nitride residue, torn oxide defect, damage of silicon active region, etc. To solve this problem, in this paper, we discussed to determine the control limit of process, which can entirely remove oxide on nitride from the moat area of high density as reducing the damage of moat area and minimizing dishing effect in the large field area. We, also, evaluated the reliability and reproducibility of STI-CMP process through the optimal process conditions.

• Journal of Electrical Engineering and Technology
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• v.9 no.1
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• pp.313-323
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• 2014

Sensor fault detection and isolation problems subject to H_/$H_{\infty}$, performance are concerned for linear time-invariant systems with time delay in a state and parametric uncertainties. To that end, a model-based observer bank approach is pursued. The design conditions for both continuous- and discrete-time cases are formulated in terms of matrix inequalities, which are then converted to the problems solvable via an algorithm involving convex optimization.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.441-446
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• 2003

The chemical mechanical polishing (CMP) process is now widely employed in the ultra large scale integrated (ULSI) semiconductor fabrication. Especially, shallow trench isolation (STI) has become a key isolation scheme for sub-0.13/0.10${\mu}{\textrm}{m}$ CMOS technology. The most important issues of STI-CMP is to decrease the various defects such as nitride residue, dishing, and tom oxide. To solve these problems, in this paper, we studied the planarization characteristics using slurry additive with the high selectivity between $SiO_2$ and $Si_3$$N_4$ films for the purpose of process simplification and in-situ end point detection. As our experimental results, it was possible to achieve a global planarization and STI-CMP process could be dramatically simplified. Also, we estimated the reliability through the repeated tests with the optimized process conditions in order to identify the reproducibility of STI-CMP process.

• Earthquakes and Structures
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• v.6 no.3
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• pp.281-300
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• 2014

This study proposes a scheme to design control parameters for a data center facility with a vibration controller on its top floor and a secondary isolation device with its own vibration controller designed to protect vibration-sensitive computer equipment. The aim is to reduce the effects of acceleration and drift from an earthquake on computer servers placed on the isolation device that must operate during a seismic event. A linear elastic model is constructed and the evaluation function of the linear quadratic Gaussian (LQG) control is formulated. The relationship between the control parameters and the responses is examined, and based on the observations, a control parameter design scheme is constructed to reduce the responses of both the building and the computer server effectively.