In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Atomic Layer Deposition of $Ta_2O_5$ film on Si Substrate with Ta(NtBu)(dmamp)$_2Me$ and $H_2O$
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- Proceedings of the Korean Vacuum Society Conference
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- 2013.02a
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- pp.619-619
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- 2013