Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2013.02a
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- Pages.619-619
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- 2013
In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Atomic Layer Deposition of $Ta_2O_5$ film on Si Substrate with Ta(NtBu)(dmamp)$_2Me$ and $H_2O$
- Lee, Seung Youb (BK21 Physics Research Division, Sungkyunkwan University) ;
- Jung, Woosung (BK21 Physics Research Division, Sungkyunkwan University) ;
- Kim, Yooseok (BK21 Physics Research Division, Sungkyunkwan University) ;
- Kim, Seok Hwan (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
- An, Ki-Seok (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
- Park, Chong-Yun (BK21 Physics Research Division, Sungkyunkwan University)
- Published : 2013.02.18
Abstract
The interfacial state between
Keywords
- Tantalum pentoxide;
- In-situ atomic layer deposition;
- In-situ synchrotron radiation photoemission spectroscopy