• 제목/요약/키워드: ICP(Inductively coupled plasma)

검색결과 966건 처리시간 0.027초

$BCl_3/Cl_2/Ar$ 고밀도 플라즈마에 의한 $(Ba, Sr)TiO_3$ 박막의 식각 메커니즘 연구 (A Study on the Etching Mechanism of $(Ba, Sr)TiO_3$ thin Film by High Density $BCl_3/Cl_2/Ar$ Plasma)

  • 김승범;김창일
    • 대한전자공학회논문지SD
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    • 제37권11호
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    • pp.18-24
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    • 2000
  • (Ba,Sr)$TiO_3$ 박막은 ULSI-DRAM 즉 1-4 Gbit급 DRAM용 셀(cell) 커패시터의 새로운 유전물질로 각광받고 있다. 본 연구에서는 ICP 장비에서 $BCl_3/Cl_2/Ar$ 플라즈마로 (Ba,Sr)$TiO_3$ 박막을 식각하였다. 이때 RF power/dc bias voltage는 600W/-250V, 반응로의 압력은 10mTorr 이었다. $Cl_2/(Cl_2+Ar)$은 0.2로 고정하였고, $BCl_3$ 가스를 첨가하면서 (Ba,Sr)$TiO_3$ 박막을 식각하였다. $BCl_3$ 가스를 10% 첨가하였을 때, $480{\AA}/min$으로 (Ba,Sr)$TiO_3$ 박막은 가장 높은 식각 속도를 나타내었다. $Cl_2/Ar$가스에 $BCl_3$의 첨가 비에 따른 Cl, BCl 및 B의 라디칼 밀도를 optical emission spectroscopy(OES)에 의해 구하였다. $BCl_3$를 10% 첨가하였을 때 Cl의 라디칼 밀도가 가장 높았다. (Ba,Sr)$TiO_3$ 박막의 표면반응을 규명하기 위하여 XPS 분석을 수행한 결과 이온 bombardment 식각이 Ba-O 결합을 파괴하고 Ba와 Cl의 결합형태인 $BaCl_2$을 제거하기 위하여 필요하다. Sr과 Cl의 결합의 양은 많지 않고, Sr은 주로 물리적인 스퍼터링에 의하여 제거된다. Ti와 Cl은 화학적으로 반응하여 $TiCl_4$ 결합형태로 용이하게 제거된다. 식각후 단면사진을 SEM을 통해 본 결과 식각단면이 약 65~70$^{\circ}$ 정도였다.

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$TBP/XAD-16/HNO_3$추출 크로마토그래피에 의한 모의 사용후핵연료 용해용액 중 미량 핵분열생성물 원소의 분리 (Separation of Fission Product Elements from Synthetic Dissolver Solutions of Spent Pressurized Water Reactor Fuels by $TBP/XAD-16/HNO_3$Extraction Chromatography)

  • 이창헌;최광순;김정석;최계천;지광용;김원호
    • 대한화학회지
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    • 제45권4호
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    • pp.304-311
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    • 2001
  • 경수로 사용후 핵 연료에 미량 함유되어 있는 핵분열생성물을 유도 결합 플라스마 원자방출분광법(ICP-AES)으로 분석하기 위하여 우라늄으로부터 학분열생성물을 추출 크로마토그래피로 분리, 회수하는 방법을 검토하였다. 우라늄 분리 분야에서 잘 알려져 있는 tri-n-butyl phosphate(TBP)를 추출제로 사용하여 몇 가지 Amberlite XAD 다공성 수지들에 대한 침윤능을 비교한 후 TPB침윤양이 가장 큰 Amberlite XAD-16을 지지체로 선택하였다. 사용후핵연료 용해용액과 화학조성이 유사한 모의 사용후핵연료 용해용액을 사용하여 TBP 침윤수지에 대한 핵분열생성물 원소들의 흡착거동을 조사하고, 분리에 미치는 여러 변수들을 최적화 하였다. Pd 및 Ru을 제외한 대부분의 핵분열생성물 원소들을 정밀도 3.1% 이하의 범위에서 정량적으로 회수할 수 있었다.

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전탕 전과 후의 중금속, 잔류농약 및 잔류이산화황의 농도변화 - 감기약을 중심으로 - (Concentration of Heavy Metals, Residual Pesticides and Sulfur Dioxide of before/after a Decoction)

  • 서창섭;황대선;이준경;하혜경;천진미;엄영란;장설;신현규
    • 대한본초학회지
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    • 제23권4호
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    • pp.51-58
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    • 2008
  • Objectives: To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods: The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer(ICP-AES) and mercury analyzer. In order to analyze pesticides in 5 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents(mg/kg) for the samples were as follows: Galgeun-tang(before decoction-Pb; 0.793, Cd; 0.133, As; 0.016 and Hg; 0.005, after decoction-Pb; 0.033, Cd; 0.004, As; 0.002 and Hg; not detected), Gumiganghwal-tang(before decoction-Pb; 0.934, Cd; 0.197, As; 0.046 and Hg; 0.006, after decoction-Pb; 0.062, Cd; 0.007, As; 0.004 and Hg; 0.0001), Sosiho-tang(before decoction-Pb; 0.891, Cd; 0.134, As; 0.091 and Hg; 0.014, after decoction-Pb; 0.036, Cd; 0.002, As; 0.004 and Hg; not detected), Ojuck-san(before decoction-Pb; 0.907, Cd; 0.136, As; 0.084 and Hg; 0.007, after decoction-Pb; 0.074, Cd; 0.007, As; 0.011 and Hg; 0.0005) and Samsoeum(before decoction-Pb; 1.234, Cd; 0.154, As; 0.016 and Hg; 0.007, after decoction-Pb; 0.094, Cd; 0.006, As; 0.002 and Hg; 0.001). 2. Contents(mg/kg) of residual pesticides before/after a decoction in all samples were not detected. 3. Contents(mg/kg) of sulfur dioxide($SO_2$) before a decoction in Galgeun-tang, Gumiganghwal-tang, Sosiho-tang, Ojuck-san and Samsoeum exhibited 1.2, 3.4, 11.1, 12.0 and 5.7, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. Conclusions: These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

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MFMIS 게이트 구조에서의 메모리 윈도우 특성 (Characteristics of Memory Windows of MFMIS Gate Structures)

  • 박전웅;김익수;심선일;염민수;김용태;성만영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.319-322
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    • 2003
  • To match the charge induced by the insulators $CeO_2$ with the remanent polarization of ferro electric SBT thin films, areas of Pt/SBT/Pt (MFM) and those of $Pt/CeO_2/Si$ (MIS) capacitors were ind ependently designed. The area $S_M$ of MIS capacitors to the area $S_F$ of MFM capacitors were varied from 1 to 10, 15, and 20. Top electrode Pt and SBT layers were etched with for various area ratios of $S_M\;/\;S_F$. Bottom electrode Pt and $CeO_2$ layers were respectively deposited by do and rf sputtering in-situ process. SBT thin film were prepared by the metal orgnic decomposition (MOD) technique. $Pt(100nm)/SBT(350nm)/Pt(300nm)/CeO_2(40nm)/p-Si$ (MFMIS) gate structures have been fabricated with the various $S_M\;/\;S_F$ ratios using inductively coupled plasma reactive ion etching (ICP-RIE). The leakage current density of MFMIS gate structures were improved to $6.32{\times}10^{-7}\;A/cm^2$ at the applied gate voltage of 10 V. It is shown that in the memory window increase with the area ratio $S_M\;/\;S_F$ of the MFMIS structures and a larger memory window of 3 V can be obtained for a voltage sweep of ${\pm}9\;V$ for MFMIS structures with an area ratio $S_M\;/\;S_F\;=\;6$ than that of 0.9 V of MFS at the same applied voltage. The maximum memory windows of MFMIS structures were 2.28 V, 3.35 V, and 3.7 V with the are a ratios 1, 2, and 6 at the applied gate voltage of 11 V, respectively. It is concluded that ferroelectric gate capacitors of MFMIS are good candidates for nondestructive readout-nonvolatile memories.

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한방처방의 전탕 전과 후의 위해물질 농도변화 -보양.보음 처방을 중심으로 - (Concentration of Hazardous Substances of before/after a Decoction in Prescription of Herbal Medicine -In Prescription of tonify Yang and tonify Yin-)

  • 서창섭;황대선;이준경;하혜경;천진미;엄영란;장설;신현규
    • 대한한의학방제학회지
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    • 제17권2호
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    • pp.53-63
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    • 2009
  • Objective : To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods : The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 4 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide ($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Jaeumganghwa-tang (before decoction - Pb; 1.190, Cd; 0.184, As; 0.099 and Hg; 0.028, after decoction - Pb; .033, Cd; 0.003, As; 0.005 and Hg; 0.001), Yukmijiwhang-tang (before decoction - Pb; 0.484, Cd; 0.133, As; 0.053 and Hg; 0.009, after decoction - Pb; 0.065, Cd; 0.008, As; 0.007 and Hg; not detected), Bojungikgi-tang (before decoction - Pb; 0.863, Cd; 0.197, As; below 0.016 and Hg; 0.011, after decoction - Pb; 0.071, Cd; 0.009, As; 0.004 and Hg; 0.001) and Ssangwha-tang (before decoction - Pb; 1.511, Cd; 0.212, As; 0.094 and Hg; 0.016, after decoction - Pb; 0.029, Cd; 0.006, As; 0.005 and Hg; 0.0004). 2. Contents (mg/kg) of sulfur dioxide ($SO_2$) before a decoction in Jaeumganghwa-tang, Yukmijiwhang-tang and Ssangwha-tang exhibited 22.7, 107.3 and 5.5, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. 3. Contents (mg/kg) of residual pesticides before/after a decoction in all samples were not detected. Conclusion : These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

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전탕 전과 후의 중금속, 잔류농약 및 잔류이산화황의 농도변화 - 십전대보탕 구성처방을 중심으로 - (Concentration of Heavy Metals, Residual Pesticides and Sulfur Dioxide before/after a Decoction - In Prescription consist of Sipjeondaebo-tang -)

  • 서창섭;황대선;이준경;하혜경;천진미;엄영란;장설;신현구
    • 대한한의학회지
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    • 제30권4호
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    • pp.108-117
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    • 2009
  • Objective: To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods: The heavy metal contents before/after a decoction were measured by inductively-coupled plasma atomic emission spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 5 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide ($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Sipjeondaebo-tang (before decoction - Pb; 1.163, Cd; 0.257, As; 0.080 and Hg; 0.016, after decoction - Pb; 0.059, Cd; 0.007, As; 0.006 and Hg; 0.0003), Palmul-tang (before decoction - Pb; 1.181, Cd; 0.242, As; 0.152 and Hg; 0.014, after decoction - Pb; 0.067, Cd; 0.008, As; 0.008 and Hg; 0.0003), Sagunja-tang (before decoction - Pb; 1.285, Cd; 0.283, As; 0.063 and Hg; 0.012, after decoction - Pb; 0.047, Cd; 0.009, As; 0.004 and Hg; not detected) and Samul-tang (before decoction - Pb; 1.025, Cd; 0.169, As; 0.099 and Hg; 0.013, after decoction - Pb; 0.065, Cd; 0.007, As; 0.010 and Hg; 0.001). 2. Contents (mg/kg) of residual pesticides before/after a decoction were not detected in any samples. 3. Contents (mg/kg) of sulfur dioxide ($SO_2$) before a decoction in Sipjeondaebo-tang, Palmul-tang, Sagunja-tang and Samul-tang exhibited 5.0, 6.0, 14.0 and 6.9, respectively. However, contents of sulfur dioxide after a decoction were not detected in any samples. Conclusion: These results will be used to establish a criterion for heavy metals, residual pesticides and sulfur dioxide.

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다년생 근채류 중 중금속 모니터링 및 위해성평가 (Monitoring and Risk Assessment of Heavy Metals in Perennial Root Vegetables)

  • 조민자;최훈;김혜정;윤혜정
    • 한국환경농학회지
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    • 제35권1호
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    • pp.55-61
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    • 2016
  • 다년생 근채류인 인삼, 산양삼, 더덕, 도라지의 중금속 함량 실태조사를 통해 우리나라 국민의 식품 섭취로 인한 중금속 노출수준에 따른 위해성을 평가하였으며, 이를 위해 총 214건을 수거하였다. 근채류 중 납, 카드뮴 및 비소 함량분석을 위해 microwave장치를 이용해 전처리한 후 ICP/MS로 측정하는 시험법을 확립하였다. 중금속의 검출한계는 0.010~0.050 μg/kg이었으며 정량한계는 0.035~0.175 μg/kg이었다. 표준용액 첨가법과 CRM을 이용하여 회수율을 실험한 결과, 76~102%의 양호한 결과를 얻었다. 다년생 근채류 중 납 함량은 평균 0.013(인삼)~0.070(산양삼) mg/kg이었고, 카드뮴 함량은 평균 0.009(인삼)~0.034(더덕) mg/kg이었으며 비소 함량은 평균 0.002(인삼)~0.004(도라지) mg/kg이었다. 다년생 근채류 섭취에 따른 중금속 위해성 평가를 수행한 결과, 중금속 노출량은 각각 Pb 0.070 μg/day, Cd 0.041 μg/day, As 0.008 μg/day으로 인체섭취한계량의 0.03%, 0.08%, 0.0003% 수준이었다. 따라서, 국내 유통되는 인삼, 산양삼, 더덕 및 도라지 섭취로 인한 중금속 노출수준은 JECFA 등의 인체노출안전기준보다 매우 낮았으며 우리나라 국민은 다년생 근채류에 존재하는 중금속의 위해성으로부터 안전하였다.

Korean solar salts reduce obesity and alter its related markers in diet-induced obese mice

  • Ju, Jaehyun;Song, Jia-Le;Park, Eui-Seong;Do, Myoung-Sool;Park, Kun-Young
    • Nutrition Research and Practice
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    • 제10권6호
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    • pp.629-634
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    • 2016
  • BACKGROUND/OBJECTIVE: The aim of this experiments was to show anti-obesity effects of Korean solar salt from different salt fields in diet-induced obese mice. MATERIALS/METHODS: Diet-induced obesity (DIO) was induced by a high-fat diet (HFD; 45% cal from fat) in C57BL/6J mice for eight weeks. The mice were fed with the designated diets (chow diet for Normal, HFD for Control, 0.47%-salt-mixed HFD for purified salt (PS), Guerande solar salt from France (SS-G), solar salt from Y salt field (SS-Y), solar salts from T salt field (SS-T) and S salt field (SS-S)) for another eight weeks. We checked body weight, food efficiency ratio (FER) and tissue weights (liver and epididymal adipose tissue (EAT)), and observed serum concentrations of triacylglycerol (TG), total cholesterol (TC), leptin and insulin. We also evaluated gene expressions of adipogenic / lipogenic mRNAs of $C/EBP{\alpha}$, $PPAR{\gamma}$ and FAS and beta-oxidation-related factors ($PPAR{\alpha}$ and CPT-1) in liver and EAT. The mineral composition of salt samples were analyzed using inductively coupled plasma optical emission spectrometry (ICP-OES). RESULTS: SS-T and SS-S significantly reduced body weight gain, FER, and weight of EAT compared to control and other samples (P < 0.05). SS-T and SS-S also significantly decreased serum levels of TG, TC, leptin and insulin (P < 0.05). SS-T and SS-S suppressed expressions of adipogenic / lipogenic mRNAs in liver and EAT, while promoting expression of beta-oxidation-related factors. The lowest sodium concentration was observed in SS-T ($30.30{\pm}0.59%$), and the lowest sodium-to-potassium (Na/K) ratio was found in SS-S (17.81). CONCLUSIONS: Our study shows that well-processed Korean solar salt may have anti-obesity effects in vivo, probably owing to its differences in mineral composition and other components, presumably resulting from the manufacturing processes. Further research is needed into the mechanism and to explore optimal manufacturing processes.

가로수 수종별 잎의 미세먼지 축적량 및 금속 원소 함량 평가 (Evaluation of accumulated particulate matter on roadside tree leaves and its metal content)

  • 권선주;차승주;이주경;박진희
    • Journal of Applied Biological Chemistry
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    • 제63권2호
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    • pp.161-168
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    • 2020
  • 식물 종마다 잎에 미세먼지(PM)를 흡착하는 정도가 서로 다르며 잎을 통해 PM을 흡수할 수 있는 것으로 알려져 있다. PM에 포함된 중금속은 인체 및 식물에 영향을 미칠 수 있으며 입자 크기에 따라 미치는 영향이 다를 수 있다. 따라서 충북대학교 내 도로변에 위치한 회양목 (Buxus koreana), 주목 (Taxus cuspidate), 철쭉 (Rhododendron yedoense), 이팝나무 (Chionanthus retusa)와 같은 가로수 잎에 축적된 PM을 입자 크기(PM>10 및 PM2.5-10)에 따라 분획 및 정량화하였다. 잎에 축적된 크기 별 PM의 금속 농도는 유도 결합 플라스마 질량 분석법(ICP-MS)으로 분석하였다. 나무 잎 표면에 축적된 PM>10의 질량은 6.11-32.7 ㎍/㎠, PM2.5-10의 질량은 0-14.8 ㎍/㎠이었다. 잎 표면에 홈이 있고 털을 갖고 있는 철쭉이 작은 PM 입자를 잘 유지하고 있었으며 광택이 있는 잎 표면을 가진 주목과 회양목은 많은 PM을 축적하고 있었다. PM은 Al, Ca, Mg, Fe와 같은 지각 구성 원소와 Cu, Pb, Zn와 같은 중금속을 포함하고 있었다. 지각 구성 원소의 농도는 PM>10 입자에서 더 높았고, 중금속 농도는 PM2.5-10 입자에서 상대적으로 더 높았다. 잎에 흡수된 Mn, Cd, Cu, Ni, Pb, Zn과 PM2.5-10의 중금속 농도는 유의한 상관관계를 보여 나무 잎을 통해 PM이 흡수될 수 있음을 확인하였다.

중금속, 잔류농약 및 잔류이산화황의 전탕 전, 후의 농도 변화 - 다빈도 태음인 사상처방을 중심으로 - (Concentration of Heavy Metals, Residual Pesticides and Sulfur Dioxide of before/after Decoction)

  • 서창섭;황대선;이준경;하혜경;천진미;엄영란;장설;김종열;이시우;신현규
    • 사상체질의학회지
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    • 제21권1호
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    • pp.237-246
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    • 2009
  • 1. Objectives To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after decoction. 2. Methods The heavy metal contents before/after decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometry (ICP-AES) and mercury analyzer. In order to analyze pesticides in 3 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide (SO2) were performed by Monier-Williams distillation method. 3. Results 1) The mean values of heavy metal contents (mg/kg) for the samples were as follows: Yuldahanso-tang (before decoction - Pb; 1.85, Cd; 0.148, As; 0.042 and Hg; 0.003, after decoction - Pb; 0.096, Cd; 0.006, As; 0.006 and Hg; 0.002), Chongsimyonja-tang (before decoction - Pb; 1.193, Cd; 0.094, As; 0.084 and Hg; 0.008, after decoction - Pb; 0.053, Cd; 0.007, As; 0.011 and Hg; not detected) and Taeyeumjowee-tang (before decoction - Pb; 0.878, Cd; 0.078, As; 0.302 and Hg; 0.004, after decoction - Pb; 0.079, Cd; 0.005, As; 0.006 and Hg; not dectcted). 2) Contents (mg/kg) of residual pesticides before/after decoction in all samples were not detected. 3) Contents (mg/kg) of sulfur dioxide (SO2) before decoction in Yuldahanso-tang, Chongsimyonja-tang and Taeyeumjowee-tang exhibited 6.1, 37.8, 31.5 and 19.7, respectively. However, contents of sulfur dioxide after decoction in all samples were not detected. 4. Conclusion These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

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