• Title/Summary/Keyword: I-MOS

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Subthreshold Characteristics of a 50 nm Impact Ionization MOS Transistor (50 nm Impact Ionization MOS 소자의 Subthreshold 특성)

  • Yoon, Jee-Young;Ryu, Jang-Woo;Jung, Min-Chul;Sung, Man-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.105-106
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    • 2005
  • The impact ionization MOS (I-MOS) transistor with 50nm channel length is presented by using 2-D device simulator ISE-TCAD. The subthreshold slope cannot be steeper than kT/q since the subthreshold conduction is due to diffusion current. As MOSFETs are scaled down, this problem becomes significant and the subthreshold slope degrades which leads an increase in the off-current and off-state power dissipation. The I-MOS is based on a gated p-i-n structure and the subthreshold conduction is induced by impact ionization. The simulation results show that the subthreshold slope is 11.7 mV/dec and this indicates the I-MOS improves the switching speed and off-state characteristics.

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Radiation effects of I-V characteristics in MOS structure irradiated under $Co^{60}-{\gamma}$ ray ($Co^{60}-{\gamma}$ ray을 조사시킨 MOS 구조에서의 I-V특성의 방사선 조사 효과)

  • Kwon, S.S.;Jeong, S.H.;Lim, K.J.;Ryu, B.H.;Kim, B.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.11a
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    • pp.123-127
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    • 1992
  • When MOS devices is exposed to radiation, radiation effects of P-type MOS capacitor can cause modulation and/or degradation in devices characteristics and its operating life. The oxide layer is grown in $O_2$+T.C.E. and its thickness ranges from 40 to 80 nm. Irradiations on MOS capacitor were performed by Cobalt-60 gamma ray source and total dose ranges from $10^4$ to $10^8$ rads. The radiation effect on electrical conduction characteristics(I-V) in MOS capacitor was measured as a function of gate oxide thickness and total dose. From the experimental result, I-V characteristics is found to be influenced strongly by total dose in irradiated p-type MOS capacitors. The ohmic current is dependant on of total dose in irradiated P-type MOS capacitors. This results are explained using surface states at interface radiation-induced traps.

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Characterization and Design Consideration of 80-nm Self-Aligned N-/P-Channel I-MOS Devices

  • Choi, Woo-Young;Lee, Jong-Duk;Park, Byung-Gook
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.1
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    • pp.43-51
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    • 2006
  • 80-nm self-aligned n-and p-channel I-MOS devices were demonstrated by using a novel fabrication method featuring double sidewall spacer, elevated drain structure and RTA process. The fabricated devices showed a normal transistor operation with extremely small subthreshold swing less than 12.2 mV/dec at room temperature. The n- and p-channel I-MOS devices had an ON/OFF current of 394.1/0.3 ${\mu}A$ and 355.4/8.9 ${\mu}A$ per ${\mu}m$, respectively. We also investigated some critical issues in device design such as the junction depth of the source extension region and the substrate doping concentration.

A Study on the Reliability of Ru-Zr Metal Gate with Thin Gate Oxide (박막 게이트 산화막에 대한 Ru-Zr 금속 게이트의 신뢰성에 관한 연구)

  • 이충근;서현상;홍신남
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.4
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    • pp.208-212
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    • 2004
  • In this paper, the characteristics of co-sputtered Ru-Zr metal alloy as gate electrode of MOS capacitors have been investigated. The atomic compositions of alloy were varied by using the combinations of relative sputtering power of Ru and .Zr. C-V and I-Vcharacteristics of MOS capacitors were measured to find the effective oxide thickness and work function. The alloy made of about 50% of Ru and 50% of Zr exhibited an adequate work function for nMOS. C-V and I-V measurements after 600 and $700^{\circ}C$ rapid thermal annealing were performed to prove the thermal and chemical stability of the Ru-Zr alloy film. Negligible changes in the accumulated capacitance and work function before and after annealing were observed. Sheet resistance of Ru-Zr alloy was lower than that of poly-silicon. It can be concluded that the Ru-Zr alloy can be a possible substitute for the poly-silicon used as a gate of nMOS.

SiC/SiO2 Interface Characteristics in N-based 4H-SiC MOS Capacitor Fabricated with PECVD and NO Annealing Processes (PECVD와 NO 어닐링 공정을 이용하여 제작한 N-based 4H-SiC MOS Capacitor의 SiC/SiO2 계면 특성)

  • Song, Gwan-Hoon;Kim, Kwang-Soo
    • Journal of IKEEE
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    • v.18 no.4
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    • pp.447-455
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    • 2014
  • In this research, n-based 4H-MOS Capacitor was fabricated with PECVD (plasma enhanced chemical vapor deposition) process for improving SiC/$SiO_2$ interface properties known as main problem of 4H-SiC MOSFET. To overcome the problems of dry oxidation process such as lower growth rate, high interface trap density and low critical electric field of $SiO_2$, PECVD and NO annealing processes are used to MOS Capacitor fabrication. After fabrication, MOS Capacitor's interface properties were measured and evaluated by hi-lo C-V measure, I-V measure and SIMS. As a result of comparing the interface properties with the dry oxidation case, improved interface and oxide properties such as 20% reduced flatband voltage shift, 25% reduced effective oxide charge density, increased oxide breakdown field of 8MV/cm and best effective barrier height of 1.57eV, 69.05% reduced interface trap density in the range of 0.375~0.495eV under the conduction band are observed.

Electrical Characteristics of Carbon Nanotube Embedded 4H-SiC MOS Capacitors (탄소나노튜브를 첨가한 4H-SiC MOS 캐패시터의 전기적 특성)

  • Lee, Taeseop;Koo, Sang-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.9
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    • pp.547-550
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    • 2014
  • In this study, the electrical characteristics of the nickel (Ni)/carbon nanotube (CNT)/$SiO_2$ structures were investigated in order to analyze the mechanism of CNT in MOS device structures. We fabricated 4H-SiC MOS capacitors with or without CNTs. CNT was dispersed by isopropyl alcohol. The capacitance-voltage (C-V) and current-voltage (I-V) are characterized. Both devices were measured by Keithley 4200 SCS. The experimental flatband voltage ($V_{FB}$) shift was positive. Near-interface trap charge density ($N_{it}$) and negative oxide trap charge density ($N_{ox}$) value of CNT embedded MOS capacitors was less than that values of reference samples. Also, the leakage current of CNT embedded MOS capacitors is higher than reference samples. It has been found that its oxide quality is related to charge carriers and/or defect states in the interface of MOS capacitors.

A MOS Assignment Model to Enlisted Recruits Using AHP and Goal Programming (AHP기법과 목표계획법을 이용한 신병 군사특기 분류 모형)

  • 민계료;김해식
    • Journal of the military operations research society of Korea
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    • v.25 no.1
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    • pp.142-159
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    • 1999
  • To assign the soldiers in the adequate positions I military is almost as important as managing officers because they compose the main part of military structure and equipment operators. The current Military Occupational Specialty(MOS) assignment system lacks the capability to optimize the use of recruit's potential. We suggest an MOS assignment method for enlisted recruits using the Analytic Hierarchy Process(AHP) method, this method systematically provides a method of calculation of composite relative weights of decision elements to be considered during MOS assignment and a method of quantification for personal quality of new recruits. The quantified value of personal quality, Mission Performance Capability(MPC), in this study means the mission performance capability when a personnel is assigned to a certain MOS. This paper develops a multiple objectives MOS assignment model for enlisted recruits. It uses MPC of personnels, calculated with AHP method and consensus method, as parameters. The goal constraints are assurance of filling requirement, minimization of the number of unassigned personnel to MOS, capability satisfaction of education facility and support facility, assurance of desired MPC value level for MOS assignment, and maximization of total MPC. The objective function is to terminalization of the negative or positive deviation for the above goal constraints.

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An Algorithm for One-Dimensional MOS-LSI Gate Array (1차원 MOS-LSI 게이트 배열 알고리즘)

  • 조중회;정정화
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.21 no.4
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    • pp.13-16
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    • 1984
  • This paper proposes a new layout algorithm in order to minimize chip area in one dimensional MOS - LSI composed of basic cells, such as NAND or NOR gates. The virtval gates are constructed, which represent I/O of signal lines at the left-most and at the right-most side of the MCS gate array. With this, a heuristic algorithm is realized that can minimize the number of straight connectors passing through each gate, and as the result, minimize the horizontal tracks necessary to route. The usefulness of the algorithm proposed is shown by the execution of the experimental program on practical logic circuits.

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A study on MOS Characteristics of 2'nd Silicidation Process (2단계 실리사이드 형성방법에 의한 MOS 공정특성 연구)

  • Eom, Gum-Yong;Han, Gi-Kwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.195-196
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    • 2005
  • In recent years, as the needs of MOS's a high quality is desired to get the superior electrical characteristics and reliability on MOSFET. As an alternative gate dielectric have drawn considerable alternation due to their superior performance and reliability properties over MOSFET, 2'nd silicidation formation process has been proposed as a dielectric growth/annealing process. In this study the author observed process characteristics on MOS structure. In view points of the process characteristics of MOS capacitor, the oxygen & polysilicon was analyzed by SIMS analysis on l'st & 2'nd Ti process, the oxygen and Si2 contents[Count/sec] of 1.5e3 & 3.75e4 on l'st process and l.1e3 & 2.94e4 on 2'nd process, the Ti contents' of 8.2e18 & 6.5e18 on 1'st and 2'nd process. The sheet resistance[$\Omega/sq.$] was 4.5 & 4.0, the film stress[dyne/cm 2] of 1.09e10 & 1.075e10 on l'st and 2'nd process. I could achieved the superior MOS characteristics by 2'nd silicidation process.

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Characteristics of Oxynitride MOS Capacitor Prepared in $N_2O$ Atmosphere of Furnace (Furnace의 $N_2O$ 분위기에서 성장시킨 Oxynitride MOS 캐패시터 특성)

  • 박진성;문종하;이은구
    • Journal of the Korean Ceramic Society
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    • v.32 no.11
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    • pp.1241-1245
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    • 1995
  • Ultrathin oxynitride (SiOxNy) films, 8nm thick, were formed on Si(100) in furnace using O2 and N2O as reactant gas. Compared with conventional furnace grown oxide, oxynitride dielectrics show better characteristics of Qbd and I-V, and less flat-band voltage shift. Excellent diffusion barrier property to dopant (BF2) is also confirmed.

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