• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.595-596
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• 2012

• 한국정밀공학회지
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• 제19권1호
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• pp.65-70
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• 2002

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.

• International Journal of Precision Engineering and Manufacturing
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• 제4권2호
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• pp.64-70
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• 2003

A new method using a transfer function is introduced in the present paper for analyzing the motion errors of hydrostatic bearing tables. The relationship between film reaction force in a single-side hydrostatic pad and the form error of guide rail is derived at various spatial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called 'the averaging effect of an oil film' quantitively. It is found that the amplitude of film force is reduced as the spatial frequency increases or the relative width of the pocket is reduced. The motion errors of a multi pad type table are estimated using a transfer function, the form errors of a guide rail and the geometric relationship between the pads. The method is named as the Transfer Function Method (TFM). The motion errors calculated by the TFM show good agreement with the motion errors calculated by the Multi Pad Method considering the entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.188-192
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• 2000

An analysjs model for calculation the motion accuarcy of double sides hydrostatic table is proposed in thn paper. For the analysis of motion accuracy, profiles of each rails are assumed as periodic function, and represented using Fourier coefficients. Variahon of bearing clearance is represented as the vanation of linear, angular displacement of table and profiles of rails. Motion accuracy is calculated in the basis of finite element analysis on the pressure dutributmn of table. In order to improve calculating time in the analysis of motion accuracy, The proposed modeling method converts double sides table to single side table equivalently Results by the proposed method 1s compared with directly caculated results mdyhcally, and also compared wlth experimental results. From the theoretical and experimental analysis, it is confirmed that the proposed modeling mothod is very effective to analyze the motion accuracy of dauble sides hydrostatic table.

• 한국정밀공학회지
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• 제31권7호
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• pp.635-642
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• 2014

The large volume multi-tasking vertical lathe was developed for machining the bearing parts for a wind power generator. Although the machined part is large in size high precision tolerances are required recently. One of the most important components to achieve this mission is the rotating table which holds and supports the part to be machined. The oil hydrostatic bearing is adopted for the thrust bearing and the rolling bearing for the radial bearing. In this article experimental performance evaluation and its analysis results are presented. The rotational accuracy of the table is assessed and the frequency domain analysis for the structural loop is performed. And in order to evaluate the structural characteristic of table the moment load experiment is performed. The rotational error motion is measured as below 10 ${\mu}m$ for the radial and axial direction and 22,800 Nm/arcsec of moment stiffness is achieved for the rotary table.

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• International Journal of Precision Engineering and Manufacturing
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• 제4권2호
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• pp.57-63
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• 2003

A new method using a transfer function was proposed in the previous paper for analyzing motion errors of hydrostatic tables. The calculated motion errors by the new method, named as the transfer (unction method (TFM), were compared with the results by the conventional multi pad method, and the validity of the proposed method was theoretically verified. In this paper, the relationship between rail form error and motion errors of a hydrostatic table is examined theoretically in order to comprehand so-called 'the averaging effect of an oil film', and the characteristics of the motion errors in a hydrostatic table is tested. The tested hydrostatic table has three single-side pads in the vertical direction and three pairs of double-sides pads in the horizontal direction. The motion errors are tested for three rails which have different form errors. The experimental results are compared with the theoretical results calculated by the TFM, and both results show good agreement. From the results, it is shown that the TFM is very effective to analyze the motion errors of hydrostatic tables.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.249-254
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• 1992

Hydrostatic Bearings have been applied to ultra high precision machine tools and precision instruments, because of their low friction characteristic, high load carrying capacity and high moving accuracy at all range of speed. In regard to realizing the Hydrostatic Bearing, various restrictors such as capillary, orifice, diaphram valve, spool valve, and etc can be used. However, their stiffness and flexibility are not sufficient in practical use for ultra precision machine tool elements. In this study dynamic equations were derived and the dynamic characteristics were simulated for both orifice and flow control servo valve. Simulation was carried out on the condition that static and sinusoidal dynamic loads were applied to the table of CNC jig Boring machine. The simulation results indicate the improvement of the performance of the Bearing system when flow control servo valve has been used as restrictor of Hydrostatic Bearing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.807-808
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• 2013