Finite Element Analysis on the Motion Accuracy of Hydrostatic Table ($2^{nd}$. Analysis and Experimental Verification on Double Sides Table)

FEM을 이용한 유정압테이블의 운동정밀도 해석 (2. 양면지지형 테이블의 해석 및 실험적 검증)

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.