International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Experimental Verification on a Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function

  • Park, Chun-Hong (Machine tools group, Korean Institute of Machinery & materials) ;
  • Oh, Yoon-Jin (Machine tools group, Korean Institute of Machinery & materials) ;
  • Lee, Chan-Hong (Machine tools group, Korean Institute of Machinery & materials) ;
  • Joon hee Hong (Department of mechanical engineering, Chungnam University)
  • Published : 2003.03.01
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Abstract

A new method using a transfer function was proposed in the previous paper for analyzing motion errors of hydrostatic tables. The calculated motion errors by the new method, named as the transfer (unction method (TFM), were compared with the results by the conventional multi pad method, and the validity of the proposed method was theoretically verified. In this paper, the relationship between rail form error and motion errors of a hydrostatic table is examined theoretically in order to comprehand so-called 'the averaging effect of an oil film', and the characteristics of the motion errors in a hydrostatic table is tested. The tested hydrostatic table has three single-side pads in the vertical direction and three pairs of double-sides pads in the horizontal direction. The motion errors are tested for three rails which have different form errors. The experimental results are compared with the theoretical results calculated by the TFM, and both results show good agreement. From the results, it is shown that the TFM is very effective to analyze the motion errors of hydrostatic tables.

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References

  1. Park, C. H., Oh, Y. J., Lee, C. H., Hong, J. H., 'Proposal and Theoretical Verification on Motion Error Analysis Method of Hydrostatic Tables Using Transfer function,' Jr. of KSPE, Vol. 19, No. 5, PP. 56-63, 2002
  2. Park, C. H., Chung, J. H., Lee, H. and Kim, S. T, 'Finite Element Analysis on the Motion Accuracy of Hydrostatic Table (Ist. Analysis and Experimental Verification on Single-side Table),' Jr. of KSPE, 17-12, PP. 137-144, 2000
  3. Park, C. H., Lee, H., Kim, T. H. and Kim, M. G., 'Finite Element Analysis on the Motion Accuracy of Hydrostatic Table (2nd. Analysis and Experimental Verification on Double-sides Table),' Jr. of KSPE Vol. 19, No. 1, PP. 65-70, 2002
  4. Park, C. H., Chung, J. H., Lee, H. and Kim, S. T., 'Development of a Submicron Order Straightness Measuring Device,' Jr. of KSPE, Vol. 17, No. 5, PP. 124-130, 2000