능동 제어를 이용한 공작기계용 정압베어링의 성능 향상에 관한 연구

Hydrostatic Bearings have been applied to ultra high precision machine tools and precision instruments, because of their low friction characteristic, high load carrying capacity and high moving accuracy at all range of speed. In regard to realizing the Hydrostatic Bearing, various restrictors such as capillary, orifice, diaphram valve, spool valve, and etc can be used. However, their stiffness and flexibility are not sufficient in practical use for ultra precision machine tool elements. In this study dynamic equations were derived and the dynamic characteristics were simulated for both orifice and flow control servo valve. Simulation was carried out on the condition that static and sinusoidal dynamic loads were applied to the table of CNC jig Boring machine. The simulation results indicate the improvement of the performance of the Bearing system when flow control servo valve has been used as restrictor of Hydrostatic Bearing.