• 전력전자학회논문지
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• 제10권1호
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• pp.87-94
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• 2005

본 논문은 저가형 고정도 아날로그 디지털 혼합형 엔코더에서 센서 취부 오차에 의해 발생하는 정지 2축 좌표상의 두 아날로그신호의 크기, 위상오차 문제 보상에 관한 연구이다. 기존의 혼합형 엔코더에서 문제시되고 있는 두 아날로그 위치정보 신호의 크기문제는 상대 크기에 대하여 정규화 함으로써 해결하였으며, 센서 취부시 발생하는 위치오차문제는 정지 2축 좌표축을 센서의 위치 오차분을 보상할 수 있도록 회전함으로써 보상할 수 있었다. 또한 제안된 새로운 방식의 위치 검출기법을 DSP의 QEP기능과 A/D변환기를 사용한 실험을 통하여 그 타당성을 검증하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1216-1219
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• 2003

The position control is very important in semiconductor manufacturing devices, precision machining tools, precision measuring instruments, etc. The accuracy of measurement for the distance in these devices affect on the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel hybrid (digital and analog) type encoder is proposed. It is shown that from several experiments, a high-resolution angular position measurement device can be designed with a low cost incremental encoder and a DSP controller.

• 전력전자학회논문지
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• 제8권6호
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• pp.512-518
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• 2003

반도체 장비나 산업용 정밀 머신 툴 등에서 고정밀 위치제어는 매우 중요하다. 고정밀 위치제어장치와 같은 미소단위로 이동하는 물체의 이동 거리나 위치를 측정하는 다양한 기기나 반도체 제조장치 등에서 고정밀도로 위치제어를 행하는 기기들의 위치 변위 검출에 대한 정확도는 제어기의 성능을 좌우하는 중요한 요소 중의 하나가 된다 본문에서는 기존의 저가형 광학식 엔코더의 전기적 회로 부분의 변형으로 디지털 신호 및 회절격자의 회절량에 대한 아날로그 신호를 기초로 하여 마이크로프로세스의 협력으로 고정도의 위치를 얻을 수 있는 새로운 방식의 위치검출기법을 제안하였다. 또한 실험을 통하여 그 타당성을 검증하였다.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2016년도 전력전자학술대회 논문집
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• pp.371-372
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• 2016

In this paper, the encoder of the hybrid type which can use a single position sensor in order to overcome the use of multiple signal lines and the reliability reduction for the location information acquisition caused by using a plurality of position detectors to acquire the position information of the rotor offer. Encoder of the proposed method was the replacement location information generating function by the plurality of sensors to the Capture function of the shape and the microcomputer of the encoder plate. Capture of the DSP function was verified through experiments using the in order to verify the validity of the detection by the proposed method and the hybrid encoder position prototyping, a means.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 학술대회 논문집 전문대학교육위원
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• pp.116-119
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• 2004

In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 B
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• pp.1006-1008
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• 2003

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

• 한국정밀공학회지
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• 제16권2호통권95호
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• pp.74-81
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• 1999

The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2004년도 전력전자학술대회 논문집(2)
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• pp.878-882
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• 2004

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

• 한국산업융합학회 논문집
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• 제17권3호
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• pp.84-92
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• 2014

In this paper, a novel 5-axis hybrid-kinematic machine tool is introduced and the research results on accuracy improvement of the prototype machine tool are presented. The 5-axis hybrid machine tool is made up of a 3-DOF parallel manipulator and a 2-DOF serial one connected in series. The machine tool maintains high ratio of stiffness to mass due to the parallel structure and high orientation capability due to the serial-type wrist. In order to acquire high accuracy, the methodology of measuring the output shafts by additional sensors instead of using encoder outputs at the motor shafts is proposed. In the kinematic view point, the hybrid manipulator reduces to a serial one, if the passive joints in the U-P serial chain at the center of the parallel manipulator are directly measured by additional sensors. Using the method of successive screw displacements, the kinematic error model is derived. Since a ball-bar is less expensive than a full position measurement device and sufficiently accurate for calibration, the kinematic calibration method of using a ball-bar is presented. The effectiveness of the calibration method has been verified through the simulations. Finally, the calibration experiment shows that the position accuracy of the prototype machine tool has been improved from 153 to $86{\mu}m$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 추계학술대회 논문집
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• pp.286-290
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• 2001

This paper presents a full-digital low-level controller for a robotic material transfer system which has been developed for a computer-integrated manufacturing model plant. Compared to conventional analog or hybrid type controllers in current industrial environments, this controller system has some advantages such as strong noise-immunity, easy control algorithm implementation, etc The servo-controller consists of two modules, a position controller and a DC servo motor driver. The position controller operates position feedback routines by receiving position encoder data and sending control outputs to the driver. The position controller is implemented in a full-digital way using a recently introduced microcontroller. The DC servomotor driver controls speeds and torques. The driver consists of a micro-controller and insulated-gate-bipolar-transistors (IGBT). The micro-controller provides control signals, and the IGBT's amplifies the control signals and sends them to the motor.