A Study on precision encoder design using diffraction grating

광학식 엔코더의 회절격자를 이용한 고정도 엔코더 개발

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.