• Title/Summary/Keyword: High-precision Equipment

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A experimental study about plasma ion treatment to improve hardness of electro-polished surface (전해연마면의 표면경도 향상을 위한 플라즈마 이온질화 처리법에 관한 실험적 연구)

  • Kim, Jin-Beom;Hong, Pil-Gi;Seo, Tae-Il;Son, Chang-Woo
    • Design & Manufacturing
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    • v.13 no.1
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    • pp.13-18
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    • 2019
  • The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.

An Experimental Study on the Dynamic Load Characteristics of Surface Mount Device(SMD) (칩마운트 (SMD) 장비의 동하중(動荷重) 발생특성에 관한 실험적 연구)

  • Baek, Jae-Ho;Lee, Hong-Ki;Kim, Kang-Boo
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.1913-1917
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    • 2000
  • SMD Equipment convey an electronic parts at high speed, then assemble parts into a circuit board, and it develop a long time-duration dynamic force to be caused by moving mass. Vibration problem to be caused by SMD Equipment have an effect on micro-meter level's precision production process, directly, and dynamic stability of building. In the cause of quantitatively access about its vibration problem, input information(or data) of structure dynamic analysis need accuracy information of dynamic load. Determination of Dynamic load is various kinds of method using experimental and theory. In this paper, we got dynamic load using direct measurement method. We expect that an study on the dynamic load characteristic of SMD can be used to Equipment development of low level vibration and basis information of structure dynamic analysis.

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실험적 방법을 이용한 TFT-LCD 정밀 검사 장비의 진동 허용 규제치 평가 및 진동 저감 대책

  • Lee Hong-Gi;Park Sang-Gon;Jeon Jong-Gyun;Son Seong-Wan
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2005.09a
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    • pp.49-54
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    • 2005
  • In the case of a sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. The aim of this study is to evaluate the allowable vibration response of a precision inspect ion equipment, which has some trouble in field, by using experimental measurement data and to proposal a proper ant i-vibration method.

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Development of Relative Position Measuring Device for Moving Target in Local Area (국소영역에서 이동표적의 상대위치 측정 장치 개발)

  • Seo, Myoung Kook
    • Journal of Drive and Control
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    • v.17 no.4
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    • pp.8-14
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    • 2020
  • Intelligent devices using ICT technology have been introduced in the field of construction machinery to improve productivity and stability. Among the intelligent devices, Machine Guidance is a device that provides real-time posture, location, and work range to drivers by installing various sensors, controllers, and satellite navigation systems on construction machines. Conversely, the efficiency of equipment that requires location information, such as machine guidance, will be greatly reduced in buildings, and tunnels in the GPS blind spots. Thus, the other high-precision positioning technologies are required in the GPS blind spot zone. In this study, we will develop a relative position measurement system that provides precise location information such as construction machinery and robots in a local area where the GPS reception is difficult. A relative position measurement system tracks a marker in the form of a sphere installed on a vehicle by using the image base tracking technology, and measures the distance and direction information to the marker to calculate a position.

Exposure Does of X-ray Generator on Full Wave Rectification Method (전파정류 방식의 X선 발생장치에서 조사선량)

  • Kim, Tae-Gon;Kim, Young-Pyo;Cheon, Min-Woo;Lee, Ho-Shik;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.138-138
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    • 2010
  • X-ray systems for medical treatment use noninvasive procedures. I fabricated a high tension generator of a full-wave rectification type using a LC resonant inviter. It is said that a full-wave rectifying X-ray equipment such as the fabricated system can shorten initiating period and be precision control because of stable output, compared with the X-ray equipment of a half wave rectifying type used in the usual clinical medicine. In order to evaluate the capability of the fabricated high tension generator, I performed exposure dose characteristics experiments.

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An Analysis of the Thermal Deformation of the Main Spindle for Small and Precision Lathe (소형 정밀 선반용 주축의 열 변형 해석)

  • Jian, Jin;Ko, Tae-Jo;Kim, Hee-Sool
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.6 no.1
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    • pp.43-49
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    • 2007
  • Multi-function and miniaturization of the medical equipment and tele-communication systems need small and high precision machined parts. For the economic machining of the small size workpiece it should be machined by small and high precision machine tools with high speed machining. The belt type driving system in turning lathe has a limitation of spindle speeds because of the vibrations from driving mechanism, built-in type of driving mechanism is used to reduce the vibration. However, the main spindle of the built-in motor is connected directly to the motor, so the heat generation of the motor and bearing makes bad influence of the accuracy of machine tools. In this study, the analysis of heat generation from motor and bearings supporting main spindle and experiment were carried out. The results of theoretical simulation of temperature and deformation of the main spindle are good agreement with those of measured.

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A Study on the Displacement Magnification Mechanism of Two-Lever System using Flexure Hinge (유연 힌지를 이용한 이중레버 시스템의 변위증폭 메카니즘에 관한 연구)

  • Jea, Wone-Soo;Ye, Sang-Don;Min, Byeong-Hyeon
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.7 no.2
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    • pp.60-65
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    • 2008
  • The high-technology industries including a semi-conductor and an information communication need an ultra-precision technology from the technological points of view. Nano technology based on an ultra-precision technology is being studied to overcome the delicate technology that may occur in the semi-conductor fields. Then, the transferring equipment with high resolution and long displacement becomes an important technology. The goal of this study is to analyze the displacement magnification mechanism driven by piezoelectric actuator which has high resolution and fast response characteristics using flexure hinge with the merits of soft displacement, negligible back-lash and stick-slip, and no-lubrication. The analyses to reduce the magnification losses occurred during the magnification process are performed using ANSYS software based on FEM. The five design variables such as arm thickness, thickness of hinge, radius of hinge, length of input side at the 1st lever and magnification ratio of 1st lever are optimized to induce the maximum magnification ratio using Taguchi method.

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Guideline on Acceptance Test and Commissioning of High-Precision External Radiation Therapy Equipment

  • Kim, Juhye;Shin, Dong Oh;Choi, Sang Hyoun;Min, Soonki;Kwon, Nahye;Jung, Unjung;Kim, Dong Wook
    • Progress in Medical Physics
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    • v.29 no.4
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    • pp.123-136
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    • 2018
  • The complex dose distribution and dose transfer characteristics of intensity-modulated radiotherapy increase the importance of precise beam data measurement and review in the acceptance inspection and preparation stages. In this study, we propose a process map for the introduction and installation of high-precision radiotherapy devices and present items and guidelines for risk management at the acceptance test procedure (ATP) and commissioning stages. Based on the ATP of the Varian and Elekta linear accelerators, the ATP items were checked step by step and compared with the quality assurance (QA) test items of the AAPM TG-142 described for the medical accelerator QA. Based on the commissioning procedure, dose quality control protocol, and mechanical quality control protocol presented at international conferences, step-by-step check items and commissioning guidelines were derived. The risk management items at each stage were (1) 21 ionization chamber performance test items and 9 electrometer, cable, and connector inspection items related to the dosimetry system; (2) 34 mechanical and dose-checking items during ATP, 22 multileaf collimator (MLC) items, and 36 imaging system items; and (3) 28 items in the measurement preparation stage and 32 items in the measurement stage after commissioning. Because the items presented in these guidelines are limited in terms of special treatment, items and practitioners can be modified to reflect the clinical needs of the institution. During the system installation, it is recommended that at least two clinically qualified medical physicists (CQMP) perform a double check in compliance with the two-person rule. We expect that this result will be useful as a radiation safety management tool that can prevent radiation accidents at each stage during the introduction of radiotherapy and the system installation process.

Development of High Precision Impedance Measurement Systems in Specific Ranges Using a Microprocessor (마이크로프로세서를 이용한 특정 영역에서 고정밀 임피던스 측정 시스템 개발)

  • Ryu, Jae-Chun;Lee, Myung-Eui
    • Journal of Advanced Navigation Technology
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    • v.23 no.4
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    • pp.316-321
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    • 2019
  • In this paper, by applying the constant current principle we develop an impedance measurement system which can measure the high precision impedance of various electric materials by using microprocessor. This measurement system board has an interface device for acquiring digital data from an external device including an impedance measuring device, and system software is also developed by a firmware program executed on such an embedded board. It can measure the high precision impedance of a specific band with 1/32768 precision by using 15-bit ADC(analog to digital converter) and calculate it to the five digits to the right of the decimal point(fraction part). Data is transmitted through a USB interface of a general computer and a measuring device to manage digital data. An impedance measurement system equipped with a communication function capable of a more general and easy-to-use interface than other equipment is developed and verified.

A Study of Equipment Accuracy and Test Precision in Dual Energy X-ray Absorptiometry (골밀도검사의 올바른 질 관리에 따른 임상적용과 해석 -이중 에너지 방사선 흡수법을 중심으로-)

  • Dong, Kyung-Rae;Kim, Ho-Sung;Jung, Woon-Kwan
    • Journal of radiological science and technology
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    • v.31 no.1
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    • pp.17-23
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    • 2008
  • Purpose : Because there is a difference depending on the environment as for an inspection equipment the important part of bone density scan and the precision/accuracy of a tester, the management of quality must be made systematically. The equipment failure caused by overload effect due to the aged equipment and the increase of a patient was made frequently. Thus, the replacement of equipment and additional purchases of new bonedensity equipment caused a compatibility problem in tracking patients. This study wants to know whether the clinical changes of patient's bonedensity can be accurately and precisely reflected when used it compatiblly like the existing equipment after equipment replacement and expansion. Materials and methods : Two equipments of GE Lunar Prodigy Advance(P1 and P2) and the Phantom HOLOGIC Spine Road(HSP) were used to measure equipment precision. Each device scans 20 times so that precision data was acquired from the phantom(Group 1). The precision of a tester was measured by shooting twice the same patient, every 15 members from each of the target equipment in 120 women(average age 48.78, 20-60 years old)(Group 2). In addition, the measurement of the precision of a tester and the cross-calibration data were made by scanning 20 times in each of the equipment using HSP, based on the data obtained from the management of quality using phantom(ASP) every morning (Group 3). The same patient was shot only once in one equipment alternately to make the measurement of the precision of a tester and the cross-calibration data in 120 women(average age 48.78, 20-60 years old)(Group 4). Results : It is steady equipment according to daily Q.C Data with $0.996\;g/cm^2$, change value(%CV) 0.08. The mean${\pm}$SD and a %CV price are ALP in Group 1(P1 : $1.064{\pm}0.002\;g/cm^2$, $%CV=0.190\;g/cm^2$, P2 : $1.061{\pm}0.003\;g/cm^2$, %CV=0.192). The mean${\pm}$SD and a %CV price are P1 : $1.187{\pm}0.002\;g/cm^2$, $%CV=0.164\;g/cm^2$, P2 : $1.198{\pm}0.002\;g/cm^2$, %CV=0.163 in Group 2. The average error${\pm}$2SD and %CV are P1 - (spine: $0.001{\pm}0.03\;g/cm^2$, %CV=0.94, Femur: $0.001{\pm}0.019\;g/cm^2$, %CV=0.96), P2 - (spine: $0.002{\pm}0.018\;g/cm^2$, %CV=0.55, Femur: $0.001{\pm}0.013\;g/cm^2$, %CV=0.48) in Group 3. The average error${\pm}2SD$, %CV, and r value was spine : $0.006{\pm}0.024\;g/cm^2$, %CV=0.86, r=0.995, Femur: $0{\pm}0.014\;g/cm^2$, %CV=0.54, r=0.998 in Group 4. Conclusion: Both LUNAR ASP CV% and HOLOGIC Spine Phantom are included in the normal range of error of ${\pm}2%$ defined in ISCD. BMD measurement keeps a relatively constant value, so showing excellent repeatability. The Phantom has homogeneous characteristics, but it has limitations to reflect the clinical part including variations in patient's body weight or body fat. As a result, it is believed that quality control using Phantom will be useful to check mis-calibration of the equipment used. A value measured a patient two times with one equipment, and that of double-crossed two equipment are all included within 2SD Value in the Bland - Altman Graph compared results of Group 3 with Group 4. The r value of 0.99 or higher in Linear regression analysis(Regression Analysis) indicated high precision and correlation. Therefore, it revealed that two compatible equipment did not affect in tracking the patients. Regular testing equipment and capabilities of a tester, then appropriate calibration will have to be achieved in order to calculate confidential BMD.

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