• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.15-18
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• 2007

As the line width of the pattern become thin more and more, the accuracy of ultra-precision stage should be increased. Various type stages have been developed and used in fabrication phase and inspection lab. Furthermore the line with become several tens of nanometer recently. We need ultra high precision stage. In this paper a new type stage is proposed in order to reduce the deformation of working table. The table is supported by several flexure hinges and actuated by a PZT. The local deformation is analyzed and the vibratory motion is also examined by FEM package.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.792-795
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• 2004

Despite is product that ship, vehicles, development equipment and Metal Bearing for plant equipment that is mass-produced by present domestic companies Cast White Metal Lining Bearing that is Bimetal Bearing standing 2 generation is accomplishing master and servant and this is foreseen to be used widely on industry whole in hereafter but Cast White Metal Bearing need minuteness processing, while price competitive power is depending on income from superior another thing area than itself manufacture already in advanced nation to lowdown that the technique is generalized widely, when take into account technology change aspect of industrial technology developing country, Go added value creation by deepening of price competition is judged to be difficult hereafter. Because domestic production and supply are wholly lacking almost in Metal Bearing Cladding that take advantage of these technology, Data-base about connection technology is weak with technique and Know-How for product. This research unites Back Steel and Aluminium Alloy different kind metal and make the Clad river studying technology about union of Gogangseong Dacheung metal bearing hereupon.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.743-746
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• 1997

The Master-Slave manipulator is the generally used remote handling equipment in the hot cell, in which the high level radioactive materials such as spent fuels are handled. To analyze the motion and to implement the training system by virtual reality technology, the simulator for M-S manipulator using the computer graphics is developed. The parts are modelled in 3-D graphics, assembled, and kinematics are assigned. The inverse kinematics of the manipulator is defined, and the slave of manipulator is coupled with master by the manipulator's specification. Also, the virtual workcell is implemented in the graphical environment which is the same as the real environment. This graphic simulator of manipulator can be effectively used in designing of the maintenance processes for the hot cell equipment and enhance the reliability of the spent fuel management.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.1
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• Design & Manufacturing
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• v.10 no.3
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• pp.46-50
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• 2016

Laminate products for motor core are developed with a structure in which the importance of quality level and clamping force is influenced by the recent performance and safety of the product. It has been confirmed that the accuracy of the mold is emphasized, and that the accuracy of the tightening force produced by the stacked product for the motor core is greatly influenced by the change in the bottom dead center displacement of the aged high speed press. The reason why setting the mold, and test the effect of bottom dead center of high speed press is to improve product pull force in embossing process at mold. We have applied the system to minimize the effect on the damping displacement under the dynamical degree of the equipment by applying the emboss complement device which can test the influence and complement in the process.

• Journal of Magnetics
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• v.22 no.2
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• pp.315-325
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• 2017

Magnetically suspended sensitive gyroscopes (MSSGs) provide an interesting alternative for achieving precious attitude angular measurement. To effectively reduce the measurement error caused by the non-uniformity of the air-gap flux density in a MSSG, this paper proposes a novel compensation method based on measuring and modeling of the air-gap flux density. The angular velocity measurement principle and the structure of the MSSG are described, and then the characteristic of the air-gap flux density has been analyzed in detail. Next, to compensate the flux density distribution error and improve the measurement accuracy of the MSSG, a real-time compensation method based on the online measurement with hall probes is designed. The common issues caused by the non-uniformity of the air-gap flux density can be effectively resolved by the proposed method in high-precision magnetically suspended configurations. Comparative simulation results before and after compensation have verified the effectiveness and superiority of the proposed compensation method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.10
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• pp.1075-1084
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• 2014

It is necessary to construct an equipment catalog in plant design. A different level of detail may be needed for the three-dimensional (3D) computer aided design (CAD) data for equipment, depending on the purpose. Equipment suppliers provide CAD data with high complexity, whereas plant designers need CAD data with low complexity. Therefore, it is necessary to simplify the 3D CAD assembly data. To resolve this issue, a system for automatically simplifying the 3D CAD assembly data of equipment was developed. This paper presents the architecture of the system, the detailed functions of the system, and a neutral data format used for uploading simplified 3D CAD assembly data to a plant 3D CAD system. In addition, experiment results using the prototype system are explained.

• Journal of Ocean Engineering and Technology
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• v.28 no.4
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• pp.345-350
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• 2014

A special usage impeller pump for ballast water treatment is part of an offshore plant's structure. It has to maintain a high corrosion resistance in an extreme environment, in which it can contact several kinds of aqueous solutions. The duplex stainless steel used in such severe environments is known to have corrosion resistance and excellent mechanical properties. This study estimated the performance of an impeller pump system designed using duplex stainless steel through a computational fluid dynamics analysis. As a result, it was determined that the pressure drop increases and the impeller performance is lowered if the equivalent roughness is enlarged. The surface precision of the duplex stainless steel must be consistently maintained. If thisis the case, it was determined that the existing STS steel can be substituted for the Duplex stainless steel.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.24-27
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• 2001

Nowadays, increasing demand of the customized products has led to an increased usage of rapid prototyping in the product development. However, the acquisition price of a rapid prototyping equipment is still too high that not every body can afford to buy one. To offer a wide access to the users who need physical prototypes, a connection of the rapid prototyping equipment to the Internet is a viable step. It would allow a large group of customers all over the world to use the manufacturing capability of a service provider offering this kind of manufacturing service. To realize how such an e-manufacturing concept can look like, a LOM-type 3D printer developed at KIST has been used as test site and connected to the Internet. A possible user can log on to the server of the equipment and view his STL file and start the building operation from a remote place. To see whether the operation runs properly, a CCD camera is used to transmit the actual state of operation online. The result so far proves the feasibility of rapid prototyping on the Internet as well as an order-adaptive manufacturing system via web.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.392-397
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• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.