• 센서학회지
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• 제29권6호
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• pp.420-426
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• 2020

A metal oxide semiconductor gas sensor is operated by measuring the changes in resistance that occur on the surface of nanostructures for gas detection. ZnO, which is an n-type metal oxide semiconductor, is widely used as a gas sensor material owing to its high sensitivity. Various ZnO nanostructures in gas sensors have been studied with the aim of improving surface reactions. In the present study, the sol-gel and vapor phase growth techniques were used to fabricate nanostructures to improve the sensitivity, response, and recovery rate for gas sensing. The sol-gel method was used to synthesize SnO₂ nanoparticles, which were used as the seed layer. The nanoparticles size was controlled by regulating the process parameters of the solution, such as the pH of the solution, the type and amount of solvent. As a result, the SnO₂ seed layer suppressed the aggregation of the nanostructures, thereby interrupting gas diffusion. The ZnO nanostructures with a sol-gel processed SnO₂ seed layer had larger specific surface area and high sensitivity. The gas response and recovery rate were 1-7 min faster than the gas sensor without the sol-gel process. The gas response increased 4-24 times compared to that of the gas sensor without the sol-gel method.

• 센서학회지
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• 제33권5호
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• pp.237-241
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• 2024

ZnWO₄-WO₃ hetero-composite microspheres were prepared by ultrasonic spray pyrolysis of a solution containing Zn and W cations, followed by heat treatment at 600℃. The gas-sensing characteristics of 5 at% of Zn-added WO₃ (5Zn-WO₃; ZnWO₄-WO₃ hetero-composite) microspheres to 1 ppm acetone, ethanol, 20 ppm hydrogen (H₂), 5 ppm carbon monoxide (CO), 25 ppb toluene, and 5 ppm ammonia (NH₃) were measured at 325-400℃ under 80% relative humidity (RH). The sensor using 5Zn-WO₃ microspheres exhibited highly selective and sensitive gas-sensing properties to acetone at 375℃ even under high humidity conditions. These superior gas-sensing properties were attributed to the increased resistance (electronic sensitization) through n-n heterojunction formation between WO₃ and ZnWO₄ phases and the acidic property of WO₃, which exhibited a low gas response to interfering ethanol gas. The superior acetone gas-sensing characteristics of the 5Zn-WO₃ sensor can be utilized in breath acetone analyzers for rapid, real-time ketogenic diet monitoring.

• 전기전자학회논문지
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• 제22권4호
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• pp.953-958
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• 2018

본 연구에서는 산업현장, 지하시설물의 밀폐공간에서 유해가스 및 생체신호를 동시에 검출이 가능한 휴대형 검출시스템을 개발하였다. 개발된 시스템은 가스검출용 센서모듈, 패치형 1채널 소형 ECG 센서, 3축가속도 검출센서용 모듈 및 통계분석용 시스템이다. 시스템모듈의 성능을 검증하기 위해 디지털해상도, 생체신호증폭도, 출력전압 및 초소형모듈의 크기로 평가하였다. 개발된 시스템의 성능결과 디지털해상도는 300(rps), 신호증폭이득은 500dB이상 성능을 가졌고, 심전도 모듈은 $50mm{\times}10mm{\times}10mm$로 제작되어 패치형으로 활용도를 높일 수 있다. 본 연구의 휴대용 가스검출기 및 패치용 심전도, 가속도검출기는 산업현장작업자의 실시간 감시용 IoT 기반 관리시스템으로 활용한다면 가치가 높을 것으로 생각된다.

• 한국전기전자재료학회논문지
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• 제26권12호
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• pp.882-887
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• 2013

We investigated a SiC-based hydrogen gas sensor with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications. The sensor was fabricated by Pd/$Ta_2O_5$/SiC structure, and a thin tantalum oxide ($Ta_2O_5$) layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high temperature as well as high permeability for hydrogen gas. In the experiment, dependence of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm was analyzed at room temperature to $500^{\circ}C$. As the result, our sensor exploiting a $Ta_2O_5$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

• 한국전기전자재료학회논문지
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• 제37권4호
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• pp.347-357
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• 2024

Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

• 한국가스학회지
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• 제28권2호
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• pp.38-46
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• 2024

도시가스 배관망은 넓은 지역에 분포되며, 계층적으로 복잡하게 연결되어 있는 것을 특징으로 한다. 넓은 지역에 분포된 배관망의 압력 상태를 정밀하게 감시하기 위하여 PCA 기반의 센서 고장탐지 및 진단 기법을 적용하였다. 도시가스 배관망은 센서의 수가 많기 때문에 상호 연관성이 높은 센서들을 하나의 블록으로 묶어 블록 차원에서 전체 센서를 다루는 다중블록 PCA(MBPCA)가 추천된다. 그런데 MBPCA는 고장센서 식별 성능이 우수한 장점이 있지만, 센서의 개수가 증가할수록 고장탐지 성능이 나빠지는 경우가 많고, 지엽적인 변화에도 모델 전체를 갱신해야 하는 문제점이 있다. 이러한 이유로 모든 센서에 대해 MBPCA를 적용하는 것보다 선택적으로 MBPCA를 적용하는 것이 필요하다. 본 연구에서는 고장탐지 성능(fault detectability) 지수와 고장진단 성능(fault identificability) 지수를 제안하였으며, 이를 통해 블록별로 MBPCA와 PCA의 성능을 비교할 수 있도록 하였다. 이 지수를 기준으로 MBPCA와 PCA 블록을 구분하여 (주)해양에너지의 도시가스 배관망의 고장 탐지 및 진단 시스템을 개발하였으며, 센서의 개수가 많은 경우에 발생하는 문제점을 해결할 수 있었다.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.809-813
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• 2016

We investigated a SiC-based hydrogen gas sensor with MIS (metal-insulator-semiconductor) structure for high temperature applications. The sensor was fabricated by $Pd/TiO_2/SiC$ structure, and a thin titanium dioxide ($TiO_2$) layer was exploited for sensitivity improvement. In the experiment, dependences of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm were analyzed at room temperature to $400^{\circ}C$. As the result, our sensor using $TiO_2$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

• Journal of Korean Society for Atmospheric Environment
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• 제20권E2호
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• pp.69-75
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• 2004

In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile ($CH_3$CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO$_2$ SnO$_2$/Pt, and Sn/Pt with thickness from 1000 to 3000 $\AA$. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000 $\AA$)/Pt (30 $\AA$) at 30$0^{\circ}C$ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with $\pm$3% in full scale range.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.120-120
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• 2010

To detect the PD events, we have studied a fusion sensor, the UHF sensor and the single-walled carbon nanotube(SWNT) gas sensor. We are accustomed to the UHF sensor which have employed to detect the partial discharges in apparatus GIS-like. But the SWNT gas sense is a newly way proposed to detect the partial discharges. In this study, we monitored not only the changes of the electrical conductance of the SWNT sensors in responding to the PD events but also the signal of the UHF sensor at the same time with IEC 60270 standard method for reference on the partial discharge events.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.245-248
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• 1991

Recently, oxide semiconductor gas sensors consisted of n-type semiconductor materials such as $SnO_2$, ZnO and $Fe_2O_3$ have been widely used to detect reducing gases. In this paper, we made the thick-film ZnO gas sensors with $PdCl_2$ as a catalyst and investigated the sensitivity to CO gas. In the thick-film Zno sensor, the highest sensitivity was shown in the sensor with 1wt.% of $PdCl_2$ which was sintered for 1 hour at $700^{\circ}C$ and operated at $300^{\circ}C$.