Journal of Korean Society for Atmospheric Environment

Korean Society for Atmospheric Environment (한국대기환경학회)
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Detection of Blood Agent Gas Using $SnO_2$ Thin Film Gas Sensor

  • Choi, Nak-Jin (School of Electronic Kyungpook National University) ;
  • Kwak, Jun-Hyuk (School of Electronic Kyungpook National University) ;
  • Lim, Yeon-Tae (School of Electronic Kyungpook National University) ;
  • Joo, Byung-Su (School of Electronic Kyungpook National University) ;
  • Lee, Duk-Dong (Electrical Engineering, Kyungpook National University) ;
  • Bahn, Tae-Hyun (Department of Sensor Engineering, Kyungpook National University)
  • Published : 2004.06.01
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Abstract

In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile ($CH_3$CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO$_2$ SnO$_2$/Pt, and Sn/Pt with thickness from 1000 to 3000 $\AA$. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000 $\AA$)/Pt (30 $\AA$) at 30$0^{\circ}C$ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with $\pm$3% in full scale range.

Keywords

References

  1. Choi, N.J., B.T. Ban, J.H. Kwak, W.W. Baek, J.C. Kim, J.S. Huh, and D.O. Lee (2003) Fabrication of $S_{n}O_{2}$, gas sensor added by metal oxide for DMMP, J. Korea Institute of Military Science and Technology, 6(3), 54-6l
  2. Choi, N.J., T.H. Ban, J.H. Kwak, W.W. Baek, J.C. Kim, J.S. Huh, and D.O. Lee (2003) Fabrication of DMMP thick film gas sensor based on $S_{n}O_{2}$, J. Korean Institute of Electrical and Electronic Material Engineers, 16(12S), 1217-1223
  3. Choi, N.J., C.H. Shim, K.D. Song, B.S. Joo, J.K. Jung, O.S. Kwon, Y.S. Kim, and D.D. Lee (2002) Recognition of indoor environmental gases using two sensing films on a substrate, J. Korean Phys. Soc. 41, 1058
  4. Chung, W.Y. (2002) Tungsten oxide thin films prepared for $NO_{2}$ sensors by using the hydrothermal method and dip coating, J. Korean Phys. Soc. 41(2), L181-183
  5. Kim, S.Y. and J.T. Song (1995) A study on characteristics of thin film SnOz gas sensor, J. Korean Institute of Electrical and Electronic Material Engineers, 8(3), 278-284
  6. Kwak, D.Y. (2002) $LabVIEW^{TM}$ Control of computer based and measurement solution, Ohm, Seoul, 403 pp.
  7. Lee, D.S. and D.D. Lee (1999) NOz sensing properties of W03-based thin film gas sensors, J. Korean Phys. Soc. 35, 1092
  8. Lee, J.R. (2001) Application of sensor, Sewha edition, Seoul, 285 pp.
  9. Lee, J.C. (1999) Chemical weapons destruction technology(I), J. Korea Solid Wastes Engineering Society, 16(3), 207
  10. Lee, T.J., H.Y. Song, and D.J. Chung (2003) ICP etching of Pt thin films for fabrication of SAW devices, J. Korean Phys. Soc. 42, 814-818
  11. Lee, Y.S., B.S. Joo, N.J. Choi, B.H. Kang, and D.O. Lee (2000) Pattern recognition of a gas sensor array using impedance, J. Korean Phys. Soc. 37, 862-865
  12. Marrs, T.C., R.L. Maynard, and P.R. Sidell (1996) Chemical warfare agents : Toxicology and treatment, John Wiley & Sons, New York, 1-5
  13. Park, H.D. (1992) $CH_{3}$CN sensing characteristics of SnOz-based gas sensors added $Nb_{2}O_{5}$, Thesis of doctor degree, Kyungpook National University, Daegu, 10-17
  14. Shim, C.H., D.S. Lee, S.I. Hwang, M.B. Lee, J.S. Huh, and D.D. Lee, (2002) Gas sensing characteristics of $S_{n}O_{2}$ thin film fabricated by thermal oxidation of a Sn/Pt double layer, Sensors and Actuators B, 81(2), 176-18l
  15. Shin, S.H. and H.H. Kim (1996) Preparation of damageless SnOz thin films by RF magnetron sputtering with oxide target, J. Korean Institute of Electrical and Electronic Material Engineers, 9(5), 490-497
  16. Sohn, J.R., H.D. Park, and D.D. Lee (2000) Acetonitrile sensing characteristics and infrared study of SnOz-based gas sensors, Applied Surface Science 161, 78-85