The Characteristics of Thick-film ZnO Sensor for CO Gas Detection

CO 검지용 후막형 ZnO 센서의 특성

  • 김봉희 (고려대학교 전기공학과) ;
  • 김상욱 (고려대학교 전기공학과) ;
  • 박근영 (고려대학교 전기공학과) ;
  • 이승환 (고려대학교 전기공학과) ;
  • 성영권 (고려대학교 전기공학과)
  • Published : 1991.11.22

Abstract

Recently, oxide semiconductor gas sensors consisted of n-type semiconductor materials such as $SnO_2$, ZnO and $Fe_2O_3$ have been widely used to detect reducing gases. In this paper, we made the thick-film ZnO gas sensors with $PdCl_2$ as a catalyst and investigated the sensitivity to CO gas. In the thick-film Zno sensor, the highest sensitivity was shown in the sensor with 1wt.% of $PdCl_2$ which was sintered for 1 hour at $700^{\circ}C$ and operated at $300^{\circ}C$.

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